Abstract

Monocrystalline silicon has excellent properties, but it is difficult to design and manufacture silicon-based mirrors that can meet engineering applications because of its hard and brittle properties. This paper used monocrystalline silicon as the main mirror material in an imaging system to carry out a feasibility study. The lightweight design of the mirror is completed by the method of center support and edge cutting. The support structure of the mirror was designed to meet the conditions of wide temperature applications. Isight software was used to optimize the feasibility sample, and the optimized results are that the root mean square error of the mirror surface is 3.6 nm, the rigid body displacement of the mirror is 2.1 μm, and the angular displacement is 2.5″ under the conditions of a temperature of Δ20 ℃ and a gravity load of 1 g. The optimized result show that the silicon-based mirror developed in this paper can meet the requirements of engineering applications. This research on silicon-based mirrors can provide guidance for the application of other silicon-based mirrors.

© 2022 Optical Society of Korea

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