Abstract

In this paper, we present a new design for angle-sensitive pixels (ASPs). The proposed ASPs take advantage of subwavelength compound gratings to capture the light angle, which enables pixel size to reach the wavelength scale of 0.7 μm × 0.7 μm. The subwavelength compound gratings are implemented by the wires of the readout circuit inherent to the standard complementary metal–oxide–semiconductor manufacturing process, thus avoiding additional off-chip optics or post-processing. This technique allows the use of two pixels for horizontal or vertical angle detection, and can determine the light’s angle in the range from −45° to +45°. The proposed sensor enables surface-profile reconstruction of microscale samples using a lensless imaging system.

© 2022 Optical Society of Korea

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