Abstract
In this work, we present a comparison among four different piezoelectric
materials (PVDF-TrFE, Piezopaint, AlN and ZnO), all deposited at low
temperature (from RT up to 160
$^{\circ}{{C}}$
) on flexible substrate
such as thin Polyimide, in order to investigate their possible implementation
as flexible tactile sensors. Flexible capacitive sensors were tested
by using a mini-shaker, investigating the sensors behavior in force
and frequency with the intent of mimicking the human sense of touch.
We optimized the piezoelectric properties of the materials by using
specific texturing buffer layers or maximizing the poling procedure
to increase the dipole alignment. Finally, by using a multi-foil approach,
the different sensors have been integrated with polysilicon thin film
transistor fabricated on flexible substrates and the specific device
sensitivity was evaluated.
© 2015 IEEE
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