Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Journal of Display Technology
  • Vol. 9,
  • Issue 9,
  • pp. 699-703
  • (2013)

Effect of ${{SiO}}_{2}$ and/or ${{SiN}}_{x}$ Passivation Layer on Thermal Stability of Self-Aligned Coplanar Amorphous Indium–Gallium–Zinc–Oxide Thin-Film Transistors

Not Accessible

Your library or personal account may give you access


We report the post-annealing effect on the performance of amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistors (TFTs) with self-aligned coplanar structure. The a-IZGO layer was passivated with ${{SiO}}_{2}$ or ${{SiN}}_{x}$ by plasma enhanced chemical vapor deposition (PECVD). The field-effect mobility of a-IGZO TFT with ${{SiN}}_{x}$ is almost unchanged by extending the post-annealing time at 250 $^{\circ}{{C}}$ , but that of ${{SiO}}_{2}$ passivated TFT significantly degrades by increasing annealing time. It is found that the resistivity of the a-IGZO under ${{SiN}}_{x}$ is low enough and thus can be good conduction path, leading to the high performance TFT. It is also found that the interface trap density $(N_{it})$ between a-IGZO TFT with ${{SiN}}_{x}$ passivation decreases from ${{3.0}}\times {{10}}^{11}$ to $1.54\times 10^{11}\ {{cm}}^{-2}\ {{eV}}^{-1}$ , and the stability of the a-IGZO TFT with ${{SiN}}_{x}$ passivation is significantly improved by long post-annealing.

© 2013 IEEE

PDF Article
More Like This
Optical and electrical properties of In2MgO4 thin film for transistors

Jian Ke Yao, Fan Ye, and Ping Fan
Opt. Mater. Express 8(11) 3438-3446 (2018)

Structural color switching with a doped indium-gallium-zinc-oxide semiconductor

Inki Kim, Juyoung Yun, Trevon Badloe, Hyuk Park, Taewon Seo, Younghwan Yang, Juhoon Kim, Yoonyoung Chung, and Junsuk Rho
Photon. Res. 8(9) 1409-1415 (2020)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription

Select as filters

Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.