Abstract
Roll-to-roll (R2R) flexible electronics manufacturing techniques may
eventually provide a solution for continuous production of high quality
flexible display devices at a significant cost reduction. The new display
applications that can be enabled by using R2R technologies include
inexpensive display, large area display, and etc. In this work, the R2R
photolithography system and dependent materials and processes are used to
establish baseline data for fabrication, registration and overlay of micron
sized patterns on unsupported plastic in pieces and carried by a web.
Enabling the use of unsupported plastic film is the first step in
understanding the R2R overlay registration process for fabrication of high
quality flexible displays. Test verniers with up to 0.1 micron measurement
precision were used to read the overlay offsets. Micro-sized features with
one micron overlay accuracy have been achieved on photoresist coated free
standing 5 mil thick Dupont Melinex® ST507 polyethylene
terephthalate (PET) substrate. Rohm & Haas LC-100 photoresist was
used in this work. Soda lime glass substrates (Telic) were also used to
establish the tool and process fundamental limits.
© 2010 IEEE
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