Abstract
Design, fabrication, and experimental testing of an integrated microoptical
module for interconnection are reported. The systems integration is based
on the concept of planar-integrated free-space optics. The module combines
diffractive-reflective and refractive microoptics. The diffractive elements
were fabricated by binary lithography and reactive ion etching. The refractive
elements were made by analog lithography using a high-energy beam sensitive
mask and replication in Ormocer. The fabricated module implemented a simple
one-dimensional optical interconnect. Two versions were implemented for which
insertion losses of approximately 8 and 4.5 dB were measured, respectively.
© 2008 IEEE
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