Abstract
We present a finite-difference modal method (FDMM) combined with higher-order
interface conditions to analyze the diffraction of grating structures. The
generalized Douglas (GD) scheme is also adopted to further enhance the convergence.
Numerical results show the FDMM generally results in faster convergence than
the commonly used coupled-wave analysis (RCWA) as higher-order formulation,
such as the GD with five points, is adopted in both TE and TM polarizations.
The FDMM is also relatively stable in a highly conductive lossless rectangular
grating, while the RCWA suffers instabilities in such a frequently studied
structure.
© 2012 IEEE
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