Abstract

An advanced CMOS-compatible 300- $\text{mm}$ -wafer silicon-photonics platform is introduced that consists of a silicon layer with eight doping masks, two silicon-nitride layers, three metal and via layers, a dicing trench for smooth edge-coupled facets, and a gain-film trench that enables interaction between the gain material and waveguide layers. The platform was used to demonstrate an electrically-steerable integrated optical phased array powered by an on-chip erbium-doped laser. Lasing with a single-mode output, $30\,\text{dB}$ side-mode-suppression ratio, and $\text{40 mW}$ lasing threshold was shown, and one-dimensional beam steering with a $\text{0.85}^\circ \times \text{0.20}^\circ$ full-width at half-maximum and $\text{30}^\circ /\text{W}$ electrical steering efficiency was demonstrated. This system represents the first demonstration of a rare-earth-doped laser monolithically-integrated with an active CMOS-compatible silicon-on-insulator photonics system.

Monolithically integrated erbium-doped tunable laser on a CMOS-compatible silicon photonics platform

Nanxi Li, Diedrik Vermeulen, Zhan Su, Emir Salih Magden, Ming Xin, Neetesh Singh, Alfonso Ruocco, Jelena Notaros, Christopher V. Poulton, Erman Timurdogan, Christopher Baiocco, and Michael R. Watts
Opt. Express 26(13) 16200-16211 (2018)

Monolithically-integrated distributed feedback laser compatible with CMOS processing

Emir Salih Magden, Nanxi Li, Purnawirman, Jonathan D. B. Bradley, Neetesh Singh, Alfonso Ruocco, Gale S. Petrich, Gerald Leake, Douglas D. Coolbaugh, Erich P. Ippen, Michael R. Watts, and Leslie A. Kolodziejski
Opt. Express 25(15) 18058-18065 (2017)

CMOS-compatible 75  mW erbium-doped distributed feedback laser

Ehsan Shah Hosseini, Purnawirman, Jonathan D. B. Bradley, Jie Sun, Gerald Leake, Thomas N. Adam, Douglas D. Coolbaugh, and Michael R. Watts
Opt. Lett. 39(11) 3106-3109 (2014)

Monolithic optical phased-array transceiver in a standard SOI CMOS process

Hooman Abediasl and Hossein Hashemi
Opt. Express 23(5) 6509-6519 (2015)

Monolithic CMOS-compatible zero-index metamaterials

Daryl I. Vulis, Yang Li, Orad Reshef, Philip Camayd-Muñoz, Mei Yin, Shota Kita, Marko Lončar, and Eric Mazur
Opt. Express 25(11) 12381-12399 (2017)