Abstract

III-nitride-based microdisk lasers on Si offer the potential in large-scale monolithic Si-based photonic integrated circuits. Here, we demonstrate a new approach to fabricating III-nitride microdisk lasers on Si, which can avoid the problem of low crystal quality and large thickness in traditional Si-based photonic devices. The III-nitride membrane was grown on a sapphire substrate and then transferred to Si to fabricate the microdisk lasers; and an airgap undercut structure was realized by simply wet etching of a SiO₂ sacrificial layer. Devices fabricated by this method are free from the defect-rich layers that are unavoidable when grown directly on Si, resulting in a high quality (Q) value of 12543 at 412.9 nm. Room temperature lasing was demonstrated with a threshold energy density as low as 33.6 μJ/cm². The whispering gallery mode oscillation was clearly observed and the model behavior was systematically investigated.

Whispering-gallery mode InGaN microdisks on GaN substrates

H. Zi, W. Y. Fu, F. Tabataba-Vakili, H. Kim-Chauveau, E. Frayssinet, P. De Mierry, B. Damilano, J- Y. Duboz, Ph. Boucaud, F. Semond, and H. W. Choi
Opt. Express 29(14) 21280-21289 (2021)

Room-temperature electrically pumped InGaN-based microdisk laser grown on Si

Meixin Feng, Junlei He, Qian Sun, Hongwei Gao, Zengcheng Li, Yu Zhou, Jianping Liu, Shuming Zhang, Deyao Li, Liqun Zhang, Xiaojuan Sun, Dabing Li, Huaibing Wang, Masao Ikeda, Rongxin Wang, and Hui Yang
Opt. Express 26(4) 5043-5051 (2018)

High quality factor nitride-based optical cavities: microdisks with embedded GaN/Al(Ga)N quantum dots

M. Mexis, S. Sergent, T. Guillet, C. Brimont, T. Bretagnon, B. Gil, F. Semond, M. Leroux, D. Néel, S. David, X. Chécoury, and P. Boucaud
Opt. Lett. 36(12) 2203-2205 (2011)

Unidirectional emission of GaN-based eccentric microring laser with low threshold

Shengnan Zhang, Yufeng Li, Peng Hu, Aixing Li, Ye Zhang, Wei Du, Mengqi Du, Qiang Li, and Feng Yun
Opt. Express 28(5) 6443-6451 (2020)

Electrically injected GaN-based microdisk towards an efficient whispering gallery mode laser

Yang Mei, MinChao Xie, Huan Xu, Hao Long, LeiYing Ying, and BaoPing Zhang
Opt. Express 29(4) 5598-5606 (2021)