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Single-element rotating-polarizer ellipsometer for film-substrate systems

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Abstract

A novel and very simple ellipsometer for the characterization of film-substrate systems that employs one rotating optical element (a polarizer) is proposed. The ellipsometer is based on detecting the angles of incidence at which a film-substrate system has equal amplitude attenuations for light polarized parallel (p) and perpendicular (s) to the plane of incidence. At a certain wavelength, the film thickness of the film-substrate system has to lie within permissible-thickness bands (PTB) for the technique to apply.

© 1977 Optical Society of America

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