Abstract

The equations of ellipsometry are derived relating the specimen properties, ρ=tanψe^iΔ, to the instrument settings P, A, and Q. The treatment differs from previous works in that both of the important parameters of the retardation plate are considered, namely, the retardation δ and the transmission ratio T, of the slow to the fast axis. Equations are developed which determine δ and T from the instrument readings. Conventional averaging procedures to obtain ψ from readings of A are shown to be valid; however, it is demonstrated that the usual procedures for obtaining Δ from readings of P are invalid and a correction is derived. Furthermore, an unsuspected source of error, namely, orientation of the retardation plate oblique to the light beam, is shown to produce large errors in some measurements.

© 1967 Optical Society of America

Ellipsometry with Non-Ideal Compensators

R. J. Archer and C. V. Shank
J. Opt. Soc. Am. 57(2) 191-194 (1967)

Formulas for Using Wave Plates in Ellipsometry*

D. A. Holmes and D. L. Feucht
J. Opt. Soc. Am. 57(4) 466-472 (1967)

Analyses and Corrections of Instrumental Errors in Ellipsometry

FRANK L. MCCRACKIN
J. Opt. Soc. Am. 60(1) 57-63 (1970)

Ellipsometry with Imperfect Components Including Incoherent Effects*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 61(10) 1380-1391 (1971)

Ellipsometric Errors Due to Multiple Reflections in Mica Quarter-Wave Plates

H. Thomas Yolken, Roy M. Waxler, and Jerome Kruger
J. Opt. Soc. Am. 57(2) 283-284 (1967)