Abstract

We have found that the thickness and refractive indices for the film–substrate problem in ellipsometry can frequently be calculated with a least-squares technique. It is shown that one algorithm can be used with a variety of data to solve problems that were formerly solved with step-by-step searches through parameter space. Moreover, the least-squares technique leads to a statistically meaningful estimate of the variances of the parameters. It is shown that the variances obtained from a correct error analysis can be at least one hundred times as large as those obtained from a naive analysis. It is also shown how the error analysis can provide information that is helpful in deciding if a given experiment is worthwhile.

© 1971 Optical Society of America

Parameter-Correlation and Computational Considerations in Multiple-Angle Ellipsometry*

M. M. Ibrahim and N. M. Bashara
J. Opt. Soc. Am. 61(12) 1622-1629 (1971)

Multiple-Angle-of-Incidence Ellipsometry of Very Thin Films*

J. A. Johnson and N. M. Bashara
J. Opt. Soc. Am. 61(4) 457-462 (1971)

Ellipsometry of Anisotropic Films

D. den Engelsen
J. Opt. Soc. Am. 61(11) 1460-1466 (1971)

Unified Analysis of Ellipsometry Errors Due to Imperfect Components, Cell-Window Birefringence, and Incorrect Azimuth Angles*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 61(5) 600-607 (1971)

Measurement and Correction of First-Order Errors in Ellipsometry

D. E. Aspnes
J. Opt. Soc. Am. 61(8) 1077-1085 (1971)