Abstract

The reflection properties of a uniaxial thin film on an isotropic substrate have been calculated. The optic axis of the film is assumed to be parallel to the film surface. The reflection properties are summarized in terms of a reflection matrix suitable for use in the Jones calculus. A method is given for relating the reflection properties of this film-covered surface to the null settings of the polarizer and analyzer of a conventional ellipsometer. Results of calculations for a few specific cases are discussed.

© 1974 Optical Society of America

Ellipsometry of anisotropic surfaces

D. J. De Smet
J. Opt. Soc. Am. 63(8) 958-964 (1973)

Application of generalized ellipsometry to anisotropic crystals*

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