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Effects of detector nonlinearity on calibration and data reduction of rotating-analyzer ellipsometers

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Abstract

Small nonlinearity (~2%) of the light-flux detection system is shown to have appreciable effects on the accuracy of calibration and data analysis in rotating-analyzer ellipsometers. Procedures for detecting and correcting these effects are presented.

© 1976 Optical Society of America

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Effects of component imperfections on ellipsometer calibration

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J. Opt. Soc. Am. 63(8) 951-957 (1973)

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