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Further applications of a recursive modal method for calculating the efficiencies of X-UV multilayer gratings

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Abstract

We apply a recursive propagation method to the modal theory of diffraction by laminar amplitude multilayer gratings (LAMG’s). We compute the reflection efficiency in the X-UV domain of several LAMG’s and show the numerical stability of this method with respect to a nonrecursive one.

© 1996 Optical Society of America

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