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Rigorous concept for the design of diffractive microlenses with high numerical apertures

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Abstract

Cylindrical dielectric diffractive microlenses are designed by the use of rigorous electromagnetic diffraction theory, and their performances are compared with microlenses based on a conventional scalar design concept. Microlenses with a relief of four depth levels are considered as well as binary microlenses with subwavelength structures. We show that the density of energy in the focus of high-numerical-aperture microlenses can be significantly increased if the phase distribution of the transmitted electrical field is optimized.

© 1997 Optical Society of America

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