Abstract

The coupled-wave method formulated by Moharam and Gaylord [ J. Opt. Soc. Am. 73, 451 ( 1983)] is known to be slowly converging, especially for TM polarization of metallic lamellar gratings. The slow convergence rate has been analyzed in detail by Li and Haggans [ J. Opt. Soc. Am. A 10, 1184 ( 1993)], who made clear that special care must be taken when coupled-wave methods are used for TM polarization. By reformulating the eigenproblem of the coupled-wave method, we provide numerical evidence and argue that highly improved convergence rates similar to the TE polarization case can be obtained. The discussion includes both nonconical and conical mountings.

© 1996 Optical Society of America

Convergence performance of the coupled-wave and the differential methods for thin gratings

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