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Determination of interface roughness cross-correlation properties of an optical coating from measurements of the angular scattering

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Abstract

Measurements have been made of angular scattering from smooth glass substrates before and after the deposition of an optical coating. The experimental results are compared with theory. In the particular case of a single layer, we derive information on the relation between the degree of roughness of the substrate and the correlation between layer interfaces.

© 1984 Optical Society of America

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