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Infrared rotating-analyzer ellipsometry: calibration and data processing

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Abstract

The necessary relationships and a calibration procedure are presented for a rotating-analyzer IR ellipsometer that uses wire grid polarizing optics. The wire grid polarizers contribute significant ellipticity because of relatively low extinction ratios. Jones matrices are used for a configuration consisting of a quarter-wave plate, a polarizer, a sample, and a rotating-analyzer ellipsometer. Results from a calibrated IR- and visible-light ellipsometer for silicon dioxide films on silicon are compared.

© 1993 Optical Society of America

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