Abstract

We examine various reflection ellipsometry arrangements to see what they measure when the reflecting stratification is anisotropic. We find that the simplest polarizer–sample–analyzer ellipsometer can determine the absolute squares and the real parts of ρ_p = (r_pp + r_sptan p)/(r_ps + r_ss tan P) or ρ_A = (r_pp + r_ps tan A)/(r_sp + r_ss tan A), depending on whether the polarizer angle P or the analyzer angle A is varied, the other being held constant. For ellipsometer arrangements that use a compensator or a polarization modulator, the real and the imaginary parts of ρ_A are measured when the compensator or the modulator is placed between the polarizer and the reflecting specimen, while the real and the imaginary parts of ρ_p are determined when the compensator or the modulator is placed between the sample and the analyzer.

© 1993 Optical Society of America

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