Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Light scattering from multilayer optics. I. Tools of investigation

Not Accessible

Your library or personal account may give you access

Abstract

We emphasize the role of correlated isotropy in the study of microroughness in high-quality optical coatings. First, cross correlation between surfaces and cross coherence between scattering sources are discussed and compared. An isotropy degree of roughness is then introduced as a quantitative value to describe the angular disorder of a surface connected with the polar dependence of scattering. We show how the frequency variations of this isotropy degree allow one to solve the inverse problem and obtain a unique solution for the scattering parameters that describe structural irregularities of the stacks. Light scattering can also be used to detect an oblique growth of the materials in thin-film form. Finally, we study the sensitivity of the investigation method to the stack parameters.

© 1994 Optical Society of America

Full Article  |  PDF Article
More Like This
Light scattering from multilayer optics. II. Application to experiment

C. Amra
J. Opt. Soc. Am. A 11(1) 211-226 (1994)

Ellipsometry of light scattering from multilayer coatings

C. Deumié, H. Giovannini, and C. Amra
Appl. Opt. 35(28) 5600-5608 (1996)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (104)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved