Abstract

Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.

© 2002 Optical Society of America

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