Abstract

The dispersive refractive index n(λ) and thickness d of thin films are usually determined from measurements of both transmission and wavelength values. Many factors can influence transmission values, leading to large errors in the calculated values of n(λ) and d. A method is presented to determine n(λ) and d in the region where k² ≪ n² from wavelength values only. This entails obtaining two spectra, one at normal incidence and another at oblique incidence. The method yields values of n(λ) and d to an accuracy better than 1%.

© 1985 Optical Society of America

Determining the refractive index and average thickness of AsSe semiconducting glass films from wavelength measurements only

C. Corrales, J. B. Ramírez-Malo, J. Fernández-Peña, P. Villares, R. Swanepoel, and E. Márquez
Appl. Opt. 34(34) 7907-7913 (1995)

Determining the refractive index and thickness of thin films from prism coupler measurements

Steven T. Kirsch
Appl. Opt. 20(12) 2085-2089 (1981)

Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry

Denis Pristinski, Veronika Kozlovskaya, and Svetlana A. Sukhishvili
J. Opt. Soc. Am. A 23(10) 2639-2644 (2006)

Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements

Julien Cardin and Dominique Leduc
Appl. Opt. 47(7) 894-900 (2008)

Determination of thickness and optical constants of thin films from photometric and ellipsometric measurements

Eduardo Elizalde, Jean Marc Frigerio, and Josette Rivory
Appl. Opt. 25(24) 4557-4561 (1986)