Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Photon-sieve lithography

Not Accessible

Your library or personal account may give you access

Abstract

We present the first lithography results that use high-numerical-aperture photon sieves as focusing elements in a scanning-optical-beam-lithography system [J. Vac. Sci. Technol. B 21, 2810 (2003)]. Photon sieves are novel optical elements that offer the advantages of higher resolution and improved image contrast compared with traditional diffractive optics such as zone plates [Nature 414, 184 (2001)]. We fabricated the highest-numerical-aperture photon sieves reported to date and experimentally verified their focusing characteristics. We propose two new designs of the photon sieve that have the potential to significantly increase focusing efficiency.

© 2005 Optical Society of America

Full Article  |  PDF Article
More Like This
Fabrication of photon sieves by laser ablation and optical properties

Matthew N. Julian, David G. MacDonnell, and Mool C. Gupta
Opt. Express 25(25) 31528-31538 (2017)

Direct femtosecond laser fabricated photon sieve

Vanessa R. M. Rodrigues, Jayashree A. Dharmadhikari, Aditya K. Dharmadhikari, Santhosh Chidangil, Deepak Mathur, and Hema Ramachandran
OSA Continuum 2(4) 1328-1341 (2019)

High-efficiency flexible multilevel photon sieves by single-step laser-based fabrication and optical analysis

Matthew N. Julian, David G. MacDonnell, and Mool C. Gupta
Appl. Opt. 58(1) 109-114 (2019)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved