Abstract

Fizeau interferometers with an additional diffractive optical element are frequently used for measuring spherical and aspherical surfaces. We present a new (to our knowledge) optical test method, in which the Fizeau principle is now perfectly fulfilled by generating reference and measuring wavefront on the last optical surface, which carries a diffractive optical element. This method has been examined experimentally by testing a reference $f∕0.68$ spherical mirror and can be applied identically for testing aspheres. Several advantages of this method are discussed and proved experimentally.

© 2006 Optical Society of America

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