Abstract
We introduce a coupled system of nonlinear partial differential equations (PDEs) to model a particular microelectromechanical systems (MEMS) deformable mirror consisting of a continuous facesheet coupled with electrostatic plate-driven actuators. To make the problem computationally tractable, we reduced the system to a single linear PDE for the facesheet coupled with nonlinear algebraic constraints for each of the actuators. We also introduce a nonlinearly constrained quadratic optimization problem for open-loop control of the MEMS mirror. Numerical simulation and control results are presented, and shortcomings of the model are discussed.
© 2006 Optical Society of America
Full Article | PDF ArticleMore Like This
Curtis Vogel, Glenn Tyler, Yang Lu, Thomas Bifano, Rodolphe Conan, and Celia Blain
J. Opt. Soc. Am. A 27(11) A56-A63 (2010)
Jason B. Stewart, Alioune Diouf, Yaopeng Zhou, and Thomas G. Bifano
J. Opt. Soc. Am. A 24(12) 3827-3833 (2007)
Alioune Diouf, Andrew P. Legendre, Jason B. Stewart, Thomas G. Bifano, and Yang Lu
Appl. Opt. 49(31) G148-G154 (2010)