Abstract

We present an intensity-ratio error-compensation method to decrease the measurement error caused by projector gamma nonlinearity and image defocus in triangular-pattern phase-shifting profilometry. The intensity-ratio measurement error is first determined by simulating the measurement with the triangular-pattern phase-shifting method with ideal and real captured triangular-pattern images based on the ideal and real gamma nonlinearity functions. A lookup table that stores the intensity-ratio measurement error corresponding to the measured intensity ratio is constructed and used for intensity-ratio error compensation. Experiments demonstrated that the intensity-ratio error compensation method significantly reduced the measurement error in the triangular-pattern phase-shifting method by 28.5%.

© 2007 Optical Society of America

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