Abstract
We developed a multichannel three-polarizer spectroscopic ellipsometer based on a
data acquisition algorithm for achieving optimized precision. This algorithm
measures unnormalized Fourier coefficients accurately and precisely. Offset
angles for optical elements were obtained as wavelength-independent values using
regression calibration. Derived subsets of data reduction functions were used to
calculate sample parameters. Correlation coefficients of Fourier coefficients
were used to calculate errors in the sample parameters. Mean standard deviations
of the sample parameters for each data reduction method were compared to
identify the best method. This approach could be used to identify suitable
precision optimization methods for other rotating-element ellipsometers.
© 2013 Optical Society of America
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