Abstract
Stitching interferometry is a common method for measuring the figure error of high numerical aperture optics. However, subaperture measurement usually requires a fringe-nulling routine, thus making the stitching procedure complex and time-consuming. The challenge when measuring a surface without a fringe-nulling routine is that the rays no longer perpendicularly hit the surface. This violation of the null-test condition can lead to high fringe density and introduce high-order misalignment aberrations into the measurement result. This paper demonstrates that the high-order misalignment aberrations can be characterized by low-order misalignment aberrations; then, an efficient method is proposed to separate the high-order misalignment aberrations from subaperture data. With the proposed method, the fringe-nulling routine is not required. Instead, the subaperture data is measured under a nonzero fringe pattern. Then, all possible misalignment aberrations are removed with the proposed method. Finally, the full aperture map is acquired by connecting all subaperture data together. Experimental results showing the feasibility of the proposed procedure are presented.
© 2015 Optical Society of America
Full Article | PDF ArticleMore Like This
Junzheng Peng, Yingjie Yu, and Haifeng Xu
Appl. Opt. 53(22) 4947-4956 (2014)
Lei Zhang, Dong Liu, Tu Shi, Yongying Yang, Shiyao Chong, Baoliang Ge, Yibing Shen, and Jian Bai
Opt. Express 23(15) 19176-19188 (2015)
Junzheng Peng, Dingfu Chen, Hongwei Guo, Jingang Zhong, and Yingjie Yu
Opt. Express 26(16) 20306-20318 (2018)