Abstract

Since Dennis Gabor introduced holography in 1948, it has been of interest to apply it to atomic scales. Electrons with high kinetic energies may indeed be used for electron holography. We describe the holographic process with electron backscatter diffraction (EBSD) as a non-invasive surface structure analysis. We show that typical parameters of current experiments already provide the requirements to collect sufficient data for a successful holographic reconstruction. As a first example, we describe how holography may be applied to planar EBSD patterns. Furthermore, we discuss the influence of experimental parameters to improve the quality of the reconstruction.

© 2021 Optical Society of America

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