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Ellipsometry of surface films on a uniform layer

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Abstract

A perturbation theory is used to construct general expressions for the s and p reflection amplitudes off a uniform layer with adsorbed thin films on one or both sides. In a special case (identical media on both sides of the sample, and at the Brewster angle for the uniform layer), calculations indicate a stable ellipsometric signal, provided that the thickness of the uniform layer is within a broadly defined range. (Uniform here means homogeneous and of constant thickness.)

© 1988 Optical Society of America

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