Leanne J. Henry,*
Bridget V. McGrath,
Thomas G. Alley,
and John J. Kester
Frank J. Seiler Research Laboratory, Suite 1J19, 2354 Vandenberg Drive, U.S. Air Force Academy, Colorado 80840
*Current address, Rome Laboratory, Electromagnetics, Reliability, and Optical Components Directorate, 80 Scott Drive, Hanscom Air Force Base, Massachusetts 01731.
Leanne J. Henry, Bridget V. McGrath, Thomas G. Alley, and John J. Kester, "Optical nonlinearity in fused silica by proton implantation," J. Opt. Soc. Am. B 13, 827-836 (1996)
Optical nonlinearity was induced in fused silica through proton implantation. Average χ(2) of the order of 1.0 pm/V were induced in low-water fused silica, with isolated regions exhibiting χ(2) as high as 1.6 pm/V. A minimum dosage of 0.25–0.5 mC was found to be effective in generating the second harmonic in fused silica. A minimum irradiation time of 10–15 s was found to be necessary to set up the space-charge region adequately. Finally, the predominant type of microscopic lattice damage associated with proton-bombarded fused silicas was found to be the silicon E′ defect site.
Arnaud Royon, Clara Rivero-Baleine, Arnaud Zoubir, Lionel Canioni, Michel Couzi, Thierry Cardinal, Evelyne Fargin, Martin Richardson, and Kathleen Richardson J. Opt. Soc. Am. B 26(11) 2077-2083 (2009)
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Minimum Time Required to Accumulate a Total Dosage of 2 mC
Energy (keV)
Current (μA)
Time (s)
300
2.5
800
525
10
200
625
17
118
778
26
77
Table 2
Range and Path-Length Straggling Parameters for Protons Having Energies between 200 and 750 keV2
Proton Energy (keV)
Proton Range (μm)
Percent Error
Path-Length Straggling μm)
Percent Error
200
1.4574
6.5
0.05240
13.0
225
1.6588
6.1
0.05770
13.0
250
1.8703
5.8
0.06313
12.0
275
2.0921
5.5
0.06887
12.0
300
2.3243
5.2
0.07479
11.0
350
2.8198
4.8
0.08739
11.0
400
3.3566
4.4
0.10090
10.0
450
3.9346
4.1
0.11528
9.9
500
4.5534
3.9
0.13049
9.6
550
5.2124
3.7
0.14652
9.3
600
5.9110
3.5
0.16335
9.1
650
6.6484
3.3
0.18094
8.9
700
7.4240
3.2
0.19920
8.7
750
8.2368
3.1
0.21806
8.5
Table 3
Comparison of SHG from Proton-Implanted High-Purity S1-UV Fused Silica to Lower-Purity G1 Fused Silica
Material Type
Bombardment Energy (keV)
Dosage (mC)
d33(pm/V)
S1-UV
560
1.5
0.016 ± 0.005
S1-UV
560
2.0
0.043 ± 0.011
S1-UV
560
2.5
0.031 ± 0.014
S1-UV
400
2.0
0.019 ± 0.003
S1-UV
700
2.0
0.051 ± 0.004
G1
560
2.0
0.280 ± 0.214
G1
400
2.0
0.206 ± 0.024
G1
700
2.0
0.121 ± 0.019
Table 4
Number of E′ Defects/cm3 for a Series of Samples of Both Wet and Dry Fused Silica That Had Been Irradiated with Protons Ranging in Energy from 300 to 750 keVa
Proton Energy (keV)
Number of E′ Defects/cm2
Wet Fused Silica
Dry Fused Silica
300
1.148 × 1016
6.802 × 1015
400
8.464 × 1015
1.1668 × 1016
500
3.858 × 1014
1.7781 × 1015
650
1.206 × 1015
3.426 × 1015
750
4.795 × 1014
5.236 × 1014
The total dosage implanted into each sample was 2.0 mC.
Table 5
Number of E′ Defects/cm3 for a Series of Samples of Both Wet and Dry Fused Silica That Had Been Implanted with 526-keV Protons in Dosages Ranging from 0.5 to 3.0 mC
Proton Dosage (mC)
Number of E′ Defects/cm3
Wet Fused Silica
Dry Fused Silica
0.5
1.279 × 1015
2.243 × 1015
1.0
2.351 × 1015
4.991 × 1015
1.5
8.666 × 1014
6.237 × 1014
2.0
1.511 × 1014
1.7781 × 1015
2.5
5.237 × 1015
9.727 × 1014
3.0
1.531 × 1015
1.580 × 1016
Table 6
Number of E′ Defects/cm3 for a Series of Parallel Stripsa
Strip Number
Number of E′ Defect Sites/cm3
Percent Decline with Respect to Strip 1
1
8.825 × 1015
–
2
3.5196 × 1015
60.12
3
9.58 × 1014
89.14
4
1.069 × 1015
87.89
5
7.95 × 1014
90.99
Strip 1 contained the portion of the fused-silica surface that had been irradiated with the beam center, strip 2 contained the damaged annular region, and strip 5 contained the edge. CO-IR fused silica was used.
Tables (6)
Table 1
Minimum Time Required to Accumulate a Total Dosage of 2 mC
Energy (keV)
Current (μA)
Time (s)
300
2.5
800
525
10
200
625
17
118
778
26
77
Table 2
Range and Path-Length Straggling Parameters for Protons Having Energies between 200 and 750 keV2
Proton Energy (keV)
Proton Range (μm)
Percent Error
Path-Length Straggling μm)
Percent Error
200
1.4574
6.5
0.05240
13.0
225
1.6588
6.1
0.05770
13.0
250
1.8703
5.8
0.06313
12.0
275
2.0921
5.5
0.06887
12.0
300
2.3243
5.2
0.07479
11.0
350
2.8198
4.8
0.08739
11.0
400
3.3566
4.4
0.10090
10.0
450
3.9346
4.1
0.11528
9.9
500
4.5534
3.9
0.13049
9.6
550
5.2124
3.7
0.14652
9.3
600
5.9110
3.5
0.16335
9.1
650
6.6484
3.3
0.18094
8.9
700
7.4240
3.2
0.19920
8.7
750
8.2368
3.1
0.21806
8.5
Table 3
Comparison of SHG from Proton-Implanted High-Purity S1-UV Fused Silica to Lower-Purity G1 Fused Silica
Material Type
Bombardment Energy (keV)
Dosage (mC)
d33(pm/V)
S1-UV
560
1.5
0.016 ± 0.005
S1-UV
560
2.0
0.043 ± 0.011
S1-UV
560
2.5
0.031 ± 0.014
S1-UV
400
2.0
0.019 ± 0.003
S1-UV
700
2.0
0.051 ± 0.004
G1
560
2.0
0.280 ± 0.214
G1
400
2.0
0.206 ± 0.024
G1
700
2.0
0.121 ± 0.019
Table 4
Number of E′ Defects/cm3 for a Series of Samples of Both Wet and Dry Fused Silica That Had Been Irradiated with Protons Ranging in Energy from 300 to 750 keVa
Proton Energy (keV)
Number of E′ Defects/cm2
Wet Fused Silica
Dry Fused Silica
300
1.148 × 1016
6.802 × 1015
400
8.464 × 1015
1.1668 × 1016
500
3.858 × 1014
1.7781 × 1015
650
1.206 × 1015
3.426 × 1015
750
4.795 × 1014
5.236 × 1014
The total dosage implanted into each sample was 2.0 mC.
Table 5
Number of E′ Defects/cm3 for a Series of Samples of Both Wet and Dry Fused Silica That Had Been Implanted with 526-keV Protons in Dosages Ranging from 0.5 to 3.0 mC
Proton Dosage (mC)
Number of E′ Defects/cm3
Wet Fused Silica
Dry Fused Silica
0.5
1.279 × 1015
2.243 × 1015
1.0
2.351 × 1015
4.991 × 1015
1.5
8.666 × 1014
6.237 × 1014
2.0
1.511 × 1014
1.7781 × 1015
2.5
5.237 × 1015
9.727 × 1014
3.0
1.531 × 1015
1.580 × 1016
Table 6
Number of E′ Defects/cm3 for a Series of Parallel Stripsa
Strip Number
Number of E′ Defect Sites/cm3
Percent Decline with Respect to Strip 1
1
8.825 × 1015
–
2
3.5196 × 1015
60.12
3
9.58 × 1014
89.14
4
1.069 × 1015
87.89
5
7.95 × 1014
90.99
Strip 1 contained the portion of the fused-silica surface that had been irradiated with the beam center, strip 2 contained the damaged annular region, and strip 5 contained the edge. CO-IR fused silica was used.