Characterization of AlGaAs/AlAs waveguides for optical parametric interactions

Giuseppe Leo; Gaetano Assanto; Olivier Durand; Vincent Berger

doi:10.1364/JOSAB.19.000902

Journal of the Optical Society of America B
Vol. 19,
Issue 4,
pp. 902-910
(2002)
•https://doi.org/10.1364/JOSAB.19.000902

Characterization of AlGaAs/AlAs waveguides for optical parametric interactions

Giuseppe Leo, Gaetano Assanto, Olivier Durand, and Vincent Berger

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Giuseppe Leo, Gaetano Assanto, Olivier Durand, and Vincent Berger, "Characterization of AlGaAs/AlAs waveguides for optical parametric interactions," J. Opt. Soc. Am. B 19, 902-910 (2002)

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Abstract

We report on the use of several complementary techniques for the optical characterization of semiconductor waveguides for parametric generation. Grating-assisted distributed coupling, x-ray reflectometry, and surface-emitting second-harmonic generation allowed us to evaluate the effective indices of the guided modes, the thickness of each constituent layer, and the modal birefringences of a multilayer AlGaAs/AlAs waveguide, respectively. With the experimental accuracy afforded by these techniques we could precisely infer the bulk refractive indices of various films to comply with the strict requirements for phase-matched guided-wave devices.

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Equations (18)

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Mode	$λ = 1313.1 nm$	$λ = 1550.5 nm$
${TE}_{0}$	3.3324	3.2909
${TM}_{0}$	3.3146	3.2719
${TE}_{1}$	3.2696	3.2054
${TM}_{1}$	3.2444	3.1755
${TE}_{2}$	3.1643	3.0656
${TM}_{2}$	3.1293	3.0292

Interacting Modes	Measured $Δ N$	Calculated $Δ N$
${TE}_{00} - {TM}_{00}$	$0.0138 \pm 0.0008$	$0.014 \pm 0.001$
${TE}_{10} - {TM}_{00}$	$0.125 \pm 0.002$	$0.122 \pm 0.002$
${TE}_{00} - {TM}_{10}$	$0.160 \pm 0.002$	$0.158 \pm 0.002$
${TE}_{10} - {TM}_{10}$	$0.0220 \pm 0.0008$	$0.022 \pm 0.001$

Film	Our Experiment		Afromowitz’s Model		Adachi’s Model
Film	$λ = 1.31 µ m$	$λ = 1.55 µ m$	$λ = 1.31 µ m$	$λ = 1.55 µ m$	$λ = 1.31 µ m$	$λ = 1.55 µ m$
GaAS	$3.4058 \pm 0.0006$	$3.3742 \pm 0.0008$	3.411	3.377	3.449	3.431
${Al}_{0.75} {Ga}_{0.25} As$	$3.08 \pm 0.01$	$3.027 \pm 0.005$	3.026	3.008	3.061	3.045
AlAs	$2.924 \pm 0.004$	$2.893 \pm 0.003$	2.909	2.894	2.924	2.909

Mode	$λ = 1313.1 nm$	$λ = 1550.5 nm$
${TE}_{0}$	3.3324	3.2909
${TM}_{0}$	3.3146	3.2719
${TE}_{1}$	3.2696	3.2054
${TM}_{1}$	3.2444	3.1755
${TE}_{2}$	3.1643	3.0656
${TM}_{2}$	3.1293	3.0292

Interacting Modes	Measured $Δ N$	Calculated $Δ N$
${TE}_{00} - {TM}_{00}$	$0.0138 \pm 0.0008$	$0.014 \pm 0.001$
${TE}_{10} - {TM}_{00}$	$0.125 \pm 0.002$	$0.122 \pm 0.002$
${TE}_{00} - {TM}_{10}$	$0.160 \pm 0.002$	$0.158 \pm 0.002$
${TE}_{10} - {TM}_{10}$	$0.0220 \pm 0.0008$	$0.022 \pm 0.001$

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