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Self-aligned silicon ring resonator optical modulator with focused ion beam error correction

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Abstract

Ring-resonator-based silicon optical modulators have tremendous potential for forming compact and power-efficient optical transmitters. In this paper we demonstrate high-speed modulation from a device based upon carrier depletion in a self-aligned pn junction. Furthermore, the role that focused ion beams can play in the error correction of silicon photonic devices is also demonstrated.

© 2013 Optical Society of America

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