Abstract

In this work, we present a modal analysis for a metallic slit, where closed-form expressions for the slotted micromirror electric field coupling coefficient and transmittance are derived for both TE and TM polarizations. This can be handy in the design of optical microelectromechanical systems devices and their applications, where the metallic slit is analyzed by solving the eigenfunction problem. The modes excited inside the metallized slotted micromirrors (slit inner structure) are approximated to be the same modes excited inside a parallel plate waveguide structure for TE and TM excitations. The parallel plate waveguide representing the inner walls of the slotted micromirror is assumed to be infinite in the vertical direction. The transmittance of the micromirror with a vertical slit has been calculated for both TE and TM polarizations based on Gaussian beam excitation. Finite-difference time-domain simulation is carried out for the slotted micromirror transmittance, and the results are compared to the modal analysis predictions. A noticeable conformity has been observed.

© 2019 Optical Society of America

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