Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Laser-written depressed-cladding waveguides deep inside bulk silicon

Not Accessible

Your library or personal account may give you access

Abstract

Laser-written waveguides created inside transparent materials are important components for integrated optics. Here, we demonstrate that subsurface modifications induced by nanosecond pulses can be used to fabricate tubular-shaped “in-chip” or buried waveguides inside silicon. We first demonstrate single-line modifications, which are characterized to yield a refractive index depression of 2×104 compared to that of the unmodified crystal. Combining these in a circular geometry, we realized 2.9-mm-long, 30-μm core-diameter waveguides inside the wafer. The waveguides operate in a single-mode regime at a wavelength of 1300 nm. We use near- and far-field imaging to confirm waveguiding and for optical index characterization. The waveguide loss is estimated from scattering experiments as 2.2 dB/cm.

© 2019 Optical Society of America

Full Article  |  PDF Article
More Like This
High slope efficiency and high refractive index change in direct-written Yb-doped waveguide lasers with depressed claddings

Guido Palmer, Simon Gross, Alexander Fuerbach, David G. Lancaster, and Michael J. Withford
Opt. Express 21(14) 17413-17420 (2013)

Double line and tubular depressed cladding waveguides written by femtosecond laser irradiation in PTR glass

Y. J. Zhang, G. D. Zhang, J. Bai, C. L. Chen, R. Stoian, and G. H. Cheng
Opt. Mater. Express 7(7) 2626-2635 (2017)

Second harmonic generation of femtosecond laser written depressed cladding waveguides in periodically poled MgO:LiTaO3 crystal

Lei Wang, Xintong Zhang, Lingqi Li, Qingming Lu, Carolina Romero, Javier R. Vázquez de Aldana, and Feng Chen
Opt. Express 27(3) 2101-2111 (2019)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved