Abstract

We optimize the performance of optical metasurfaces based on periodically corrugated silicon layers by adjusting the Fourier coefficients of their surface profiles. For smooth corrugations, we demonstrate the excellent quantitative accuracy of a semi-analytical approach based on the Rayleigh hypothesis. We employ this approach to design metasurfaces with anomalous refraction due to dominant first-order diffraction. Unlike conventional Huygens’ dielectric metasurfaces, corrugated silicon layers are capable of efficient anomalous refraction in near-grazing directions: we obtain corrugation shapes allowing us to deflect 70%–80% of the energy of normally incident green light into the range of 68°–85° of angles with respect to the normal.

© 2019 Optical Society of America

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