Anti-external interference sensor based on cascaded side-coupled photonic crystal nanobeam cavities for simultaneous sensing of the refractive index and temperature

Yongqin Wu; Fujun Sun; Shuo Yang; Zhongyuan Fu; Chao Wang; Huiping Tian

doi:10.1364/JOSAB.405331

Journal of the Optical Society of America B
Vol. 37,
Issue 12,
pp. 3850-3856
(2020)
•https://doi.org/10.1364/JOSAB.405331

Anti-external interference sensor based on cascaded side-coupled photonic crystal nanobeam cavities for simultaneous sensing of the refractive index and temperature

Yongqin Wu, Fujun Sun, Shuo Yang, Zhongyuan Fu, Chao Wang, and Huiping Tian

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Yongqin Wu, Fujun Sun, Shuo Yang, Zhongyuan Fu, Chao Wang, and Huiping Tian, "Anti-external interference sensor based on cascaded side-coupled photonic crystal nanobeam cavities for simultaneous sensing of the refractive index and temperature," J. Opt. Soc. Am. B 37, 3850-3856 (2020)

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About this Article
History
- Original Manuscript: August 12, 2020
- Revised Manuscript: October 15, 2020
- Manuscript Accepted: October 15, 2020
- Published: November 23, 2020

Abstract

We present a cascaded side-coupled silicon-on-insulator (SOI) photonic crystal nanobeam cavities (PCNCs) sensor for simultaneous sensing of the refractive index (RI) and temperature. Two types of PCNCs are designed for increasing the demodulation coefficient: the low-index mode cavity exposed to water directly (${{\rm cav}_1}$) and the high-index mode cavity covered with SU-8 cladding (${{\rm cav}_2}$). Moreover, the cascaded side-coupled system is modeled, and the transmission expression is derived based on temporal coupled-mode theory. Furthermore, the correlations between the structural parameters, the transmission, quality factor are discussed. By using three-dimensional finite-difference time-domain simulations, we further prove the ability to detect RI and temperature simultaneously, obtaining a RI sensitivity of 210 nm/RI unit (RIU) and a temperature sensitivity of 53 pm/K for ${{\rm cav}_1}$, whereas there is a RI sensitivity of 0 nm/RIU and a temperature sensitivity of ${-}{90}\;{\rm pm/K}$ for ${{\rm cav}_2}$. Moreover, the maximum of external interference ranges of the proposed sensor are ${7.5} \times {{10}^{- 6}}$ and 0.01 for the RI and temperature, respectively, and the deviation ratios are approximately 0.56% and 3.33% for the RI and temperature, respectively. Therefore, the proposed sensor has strong anti-interference ability and accuracy, which is a promising platform for future applications of dual-parameter sensing.

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$a_{1}$ (nm)	$R_{c e n t e r}$ (nm)	$R_{e n d}$ (nm)	$N_{t 1}$	$W_{1}$ (nm)	$G_{1}$ (nm)	$W$ (nm)
400	85	130	18	560	545	350
$a_{2}$ (nm)	$R_{ycenter}$ (nm)	$R_{yend}$ (nm)	$N_{t 2}$	$W_{2}$ (nm)	$G_{2}$ (nm)	$R_{x}$ (nm)
400	310	490	18	1350	445	100

$Δ R I_{s e t}$	$Δ T_{s e t}$ (K)	$Δ λ_{1}$ (nm)	$Δ λ_{2}$ (nm)	$Δ R I_{d e c o u p l e d}$	$Δ T_{d e c o u p l e d}$ (K)	( $δ_{n}$ , $δ_{T}$ )/(%,%)
0.005	40.00	3.17	−3.59	0.005	39.89	(0.56, 0.27)
0.010	30.00	3.68	−2.68	0.010	29.78	(0.08, 0.74)
0.015	20.00	4.19	−1.76	0.015	19.56	(0.11, 2.22)
0.020	10.00	4.72	−0.87	0.020	9.45	(0.18, 3.33)

Structure	Environment	RI Sensitivity (nm/RIU)	Temperature Sensitivity (pm/K)	( $α_{n}$ , $α_{T}$ )
PCNCs [21]	air	0;345.6	−107.9;46.7	( $4.04 \times 10^{- 6}$ , $9 \times 10^{- 3}$ )
MZI [5]	water	−103.00; −78.94	73.07; 67.07	( $1.23 \times 10^{- 4}$ , 0.16)
MZI [7]	water	−23.188; −26.087	71; 77	( $2.22 \times 10^{- 3}$ , 0.74)
Microdisks [13]	water	25.1;110.6	75.2;51.3	( $1.80 \times 10^{- 5}$ , 0.02)
PCNCs [17]	water	105.5;254.6	56.4;30.1	( $7.73 \times 10^{- 6}$ , 0.03)
${P C N C}_{S}$ [26]	water	112.5;135	75;76.5	( $9.98 \times 10^{- 5}$ , 0.16)
PCNC [25]	air	390.9;413.6	60.7;62.9	( $2.39 \times 10^{- 4}$ , 1.55)
PCNC [27]	water	248.9;270	20.9;19.2	( $4.64 \times 10^{- 5}$ , 0.60)
Our work	water	210;0	53;−90	( $7.5 \times 10^{- 6}$ , 0.01)

$a_{1}$ (nm)	$R_{c e n t e r}$ (nm)	$R_{e n d}$ (nm)	$N_{t 1}$	$W_{1}$ (nm)	$G_{1}$ (nm)	$W$ (nm)
400	85	130	18	560	545	350
$a_{2}$ (nm)	$R_{ycenter}$ (nm)	$R_{yend}$ (nm)	$N_{t 2}$	$W_{2}$ (nm)	$G_{2}$ (nm)	$R_{x}$ (nm)
400	310	490	18	1350	445	100

$Δ R I_{s e t}$	$Δ T_{s e t}$ (K)	$Δ λ_{1}$ (nm)	$Δ λ_{2}$ (nm)	$Δ R I_{d e c o u p l e d}$	$Δ T_{d e c o u p l e d}$ (K)	( $δ_{n}$ , $δ_{T}$ )/(%,%)
0.005	40.00	3.17	−3.59	0.005	39.89	(0.56, 0.27)
0.010	30.00	3.68	−2.68	0.010	29.78	(0.08, 0.74)
0.015	20.00	4.19	−1.76	0.015	19.56	(0.11, 2.22)
0.020	10.00	4.72	−0.87	0.020	9.45	(0.18, 3.33)

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Journal of the Optical Society of America B