Losses in single-mode silicon-on-insulator strip waveguides and bends

Yurii A. Vlasov; Sharee J. McNab

doi:10.1364/OPEX.12.001622

Optics Express
Vol. 12,
Issue 8,
pp. 1622-1631
(2004)
•https://doi.org/10.1364/OPEX.12.001622

Losses in single-mode silicon-on-insulator strip waveguides and bends

Yurii A. Vlasov and Sharee J. McNab

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Yurii A. Vlasov and Sharee J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004)

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- Focus Issue: Photonic crystals and holey fibers
Optics & Photonics Topics
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The topics in this list come from the Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Waveguides (230.7370)
- Photonic integrated circuits (250.5300)

About this Article
History
- Original Manuscript: February 3, 2004
- Revised Manuscript: April 12, 2004
- Manuscript Accepted: April 12, 2004
- Published: April 19, 2004

Abstract

We report the fabrication and accurate measurement of propagation and bending losses in single-mode silicon waveguides with submicron dimensions fabricated on silicon-on-insulator wafers. Owing to the small sidewall surface roughness achieved by processing on a standard 200mm CMOS fabrication line, minimal propagation losses of 3.6±0.1dB/cm for the TE polarization were measured at the telecommunications wavelength of 1.5µm. Losses per 90° bend are measured to be 0.086±0.005dB for a bending radius of 1µm and as low as 0.013±0.005dB for a bend radius of 2µm. These record low numbers can be used as a benchmark for further development of silicon microphotonic components and circuits.

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References

View by:
Article Order
Year
Author
Publication

Y. Hibino, “Silica-Based Planar Lightwave Circuits and Their Applications,” MRS Bulletin May 2003, p.365 (2003)
T. Shibata, M. Okuno, T. Goh, T. Watanabe, M. Yasu, M. Itoh, M. Ishii, Y. Hibino, A. Sugita, and A. Himeno,“Silica-Based Waveguide-Type 16×16 Optical Switch Module Incorporating Driving Circuits,” IEEE Phot. Techn. Lett. 15, 1300 (2003).
[Crossref]
G.-L. Bona, R. Germann, and B. J. Offrein, “SiON high refractive-index waveguide and planar lightwave circuits,” IBM J. Res.Develop. 47, 239 (2003).
[Crossref]
S. J. McNab, N. Moll, and Yu. A. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11, 2927 (2003). http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-22-2927
[Crossref] [PubMed]
K. K. Lee, D. R. Lim, H.-C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling “Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model,” Appl. Phys. Lett., 77, 1617 (2000).
[Crossref]
K. K. Lee, D. R. Lim, and L. C. Kimerling, “Fabrication of ultralow-loss Si/SiO waveguides by roughness reduction,” Opt. Lett., 26, 1888 (2001).
[Crossref]
K.K. Lee, “Transmission and routing of optical signals in on-chip waveguides for silicon microphotonics,” PhD thesis, MIT (2001).
D.R. Lim, “Device integration for silicon microphotonics platforms,” PhD thesis, MIT (2000);
A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh -Δ optical waveguide on silicon-on-insulator substrate,” Jpn. J. Appl. Phys. Part 2, 4B, L383 (2001).
[Crossref]
P. Dumon, W. Bogaerts, J. Van Campenhout, V. Wiaux, J. Wouters, S. Beckx, and R. Baets, “Low-loss photonic wires and compact ring resonators in silicon-on-insulator,” LEOS Benelux Annual Symposium 2003, Netherlands, (2003)
T. Tsuchizawa, T. Watanabe, E. Tamechika, T. Shoji, K. Yamada, J. Takahashi, S. Uchiyama, S. Itabashi, and H. Morita, “Fabrication and evaluation of submicron-square Si wire waveguides with spot-size converters”, Paper TuU2 presented at LEOS Annual Meeting, p.287, Glasgow, UK (2002).
R. U. Ahmad, F. Pizzuto, G. S. Camarda, R. L. Espinola, H. Rao, and R. M. Osgood, “Ultracompact Corner-Mirrors and T-Branches in Silicon-on-Insulator”, IEEE Photon. Techn. Lett., 14, 65 (2002).
[Crossref]
V. Almeida, R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302 (2002).
[Crossref]
T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 µm square Si wire waveguides to singlemode fibers,” Electron. Lett., 38, 1669 (2002).
[Crossref]
P. K. Tien, “Light waves in thin films and integrated optics,” Appl. Opt., 10, 2395 (1971)
[Crossref] [PubMed]
D. Marcuse,“Mode conversion caused by surface imperfections of a dielectric slab waveguide,” Bell Syst. Tech. J. 48, 3187 (1969).
F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26, 977 (1994).
[Crossref]
E. A. Marcatili, “Bends in optical dielectric guides,”Bell Syst. Tech. J. 48, 2103 (1969).

2003 (3)

T. Shibata, M. Okuno, T. Goh, T. Watanabe, M. Yasu, M. Itoh, M. Ishii, Y. Hibino, A. Sugita, and A. Himeno,“Silica-Based Waveguide-Type 16×16 Optical Switch Module Incorporating Driving Circuits,” IEEE Phot. Techn. Lett. 15, 1300 (2003).
[Crossref]

G.-L. Bona, R. Germann, and B. J. Offrein, “SiON high refractive-index waveguide and planar lightwave circuits,” IBM J. Res.Develop. 47, 239 (2003).
[Crossref]

S. J. McNab, N. Moll, and Yu. A. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11, 2927 (2003). http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-22-2927
[Crossref] [PubMed]

2002 (3)

R. U. Ahmad, F. Pizzuto, G. S. Camarda, R. L. Espinola, H. Rao, and R. M. Osgood, “Ultracompact Corner-Mirrors and T-Branches in Silicon-on-Insulator”, IEEE Photon. Techn. Lett., 14, 65 (2002).
[Crossref]

V. Almeida, R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302 (2002).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 µm square Si wire waveguides to singlemode fibers,” Electron. Lett., 38, 1669 (2002).
[Crossref]

2001 (2)

K. K. Lee, D. R. Lim, and L. C. Kimerling, “Fabrication of ultralow-loss Si/SiO waveguides by roughness reduction,” Opt. Lett., 26, 1888 (2001).
[Crossref]

A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh -Δ optical waveguide on silicon-on-insulator substrate,” Jpn. J. Appl. Phys. Part 2, 4B, L383 (2001).
[Crossref]

2000 (1)

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agarwal, J. Foresi, and L. C. Kimerling “Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model,” Appl. Phys. Lett., 77, 1617 (2000).
[Crossref]

1994 (1)

F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26, 977 (1994).
[Crossref]

1971 (1)

P. K. Tien, “Light waves in thin films and integrated optics,” Appl. Opt., 10, 2395 (1971)
[Crossref] [PubMed]

1969 (2)

D. Marcuse,“Mode conversion caused by surface imperfections of a dielectric slab waveguide,” Bell Syst. Tech. J. 48, 3187 (1969).

E. A. Marcatili, “Bends in optical dielectric guides,”Bell Syst. Tech. J. 48, 2103 (1969).

Agarwal, A.

Ahmad, R. U.

Almeida, V.

V. Almeida, R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302 (2002).
[Crossref]

Baba, T.

A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh -Δ optical waveguide on silicon-on-insulator substrate,” Jpn. J. Appl. Phys. Part 2, 4B, L383 (2001).
[Crossref]

Baets, R.

P. Dumon, W. Bogaerts, J. Van Campenhout, V. Wiaux, J. Wouters, S. Beckx, and R. Baets, “Low-loss photonic wires and compact ring resonators in silicon-on-insulator,” LEOS Benelux Annual Symposium 2003, Netherlands, (2003)

Beckx, S.

Bogaerts, W.

Bona, G.-L.

G.-L. Bona, R. Germann, and B. J. Offrein, “SiON high refractive-index waveguide and planar lightwave circuits,” IBM J. Res.Develop. 47, 239 (2003).
[Crossref]

Camarda, G. S.

Dumon, P.

Espinola, R. L.

Foresi, J.

Germann, R.

G.-L. Bona, R. Germann, and B. J. Offrein, “SiON high refractive-index waveguide and planar lightwave circuits,” IBM J. Res.Develop. 47, 239 (2003).
[Crossref]

Goh, T.

Hara, G.

A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh -Δ optical waveguide on silicon-on-insulator substrate,” Jpn. J. Appl. Phys. Part 2, 4B, L383 (2001).
[Crossref]

Hibino, Y.

Y. Hibino, “Silica-Based Planar Lightwave Circuits and Their Applications,” MRS Bulletin May 2003, p.365 (2003)

Himeno, A.

Ishii, M.

Itabashi, S.

T. Tsuchizawa, T. Watanabe, E. Tamechika, T. Shoji, K. Yamada, J. Takahashi, S. Uchiyama, S. Itabashi, and H. Morita, “Fabrication and evaluation of submicron-square Si wire waveguides with spot-size converters”, Paper TuU2 presented at LEOS Annual Meeting, p.287, Glasgow, UK (2002).

Itoh, M.

Kimerling, L. C.

K. K. Lee, D. R. Lim, and L. C. Kimerling, “Fabrication of ultralow-loss Si/SiO waveguides by roughness reduction,” Opt. Lett., 26, 1888 (2001).
[Crossref]

Lacey, J. P. R.

F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26, 977 (1994).
[Crossref]

Lee, K. K.

K. K. Lee, D. R. Lim, and L. C. Kimerling, “Fabrication of ultralow-loss Si/SiO waveguides by roughness reduction,” Opt. Lett., 26, 1888 (2001).
[Crossref]

Lee, K.K.

K.K. Lee, “Transmission and routing of optical signals in on-chip waveguides for silicon microphotonics,” PhD thesis, MIT (2001).

Lim, D. R.

K. K. Lee, D. R. Lim, and L. C. Kimerling, “Fabrication of ultralow-loss Si/SiO waveguides by roughness reduction,” Opt. Lett., 26, 1888 (2001).
[Crossref]

Lim, D.R.

D.R. Lim, “Device integration for silicon microphotonics platforms,” PhD thesis, MIT (2000);

Lipson, M.

V. Almeida, R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302 (2002).
[Crossref]

Luan, H.-C.

Marcatili, E. A.

E. A. Marcatili, “Bends in optical dielectric guides,”Bell Syst. Tech. J. 48, 2103 (1969).

Marcuse, D.

D. Marcuse,“Mode conversion caused by surface imperfections of a dielectric slab waveguide,” Bell Syst. Tech. J. 48, 3187 (1969).

McNab, S. J.

Moll, N.

Morita, H.

Offrein, B. J.

G.-L. Bona, R. Germann, and B. J. Offrein, “SiON high refractive-index waveguide and planar lightwave circuits,” IBM J. Res.Develop. 47, 239 (2003).
[Crossref]

Okuno, M.

Osgood, R. M.

Panepucci, R.

V. Almeida, R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302 (2002).
[Crossref]

Payne, F. P.

F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26, 977 (1994).
[Crossref]

Pizzuto, F.

Rao, H.

Sakai, A.

A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh -Δ optical waveguide on silicon-on-insulator substrate,” Jpn. J. Appl. Phys. Part 2, 4B, L383 (2001).
[Crossref]

Shibata, T.

Shoji, T.

Sugita, A.

Takahashi, J.

Tamechika, E.

Tien, P. K.

P. K. Tien, “Light waves in thin films and integrated optics,” Appl. Opt., 10, 2395 (1971)
[Crossref] [PubMed]

Tsuchizawa, T.

Uchiyama, S.

Van Campenhout, J.

Vlasov, Yu. A.

Watanabe, T.

Wiaux, V.

Wouters, J.

Yamada, K.

Yasu, M.

Appl. Opt. (1)

P. K. Tien, “Light waves in thin films and integrated optics,” Appl. Opt., 10, 2395 (1971)
[Crossref] [PubMed]

Appl. Phys. Lett. (1)

Bell Syst. Tech. J. (2)

D. Marcuse,“Mode conversion caused by surface imperfections of a dielectric slab waveguide,” Bell Syst. Tech. J. 48, 3187 (1969).

E. A. Marcatili, “Bends in optical dielectric guides,”Bell Syst. Tech. J. 48, 2103 (1969).

Electron. Lett. (1)

IBM J. Res.Develop. (1)

G.-L. Bona, R. Germann, and B. J. Offrein, “SiON high refractive-index waveguide and planar lightwave circuits,” IBM J. Res.Develop. 47, 239 (2003).
[Crossref]

IEEE Phot. Techn. Lett. (1)

IEEE Photon. Techn. Lett. (1)

Jpn. J. Appl. Phys. (1)

A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh -Δ optical waveguide on silicon-on-insulator substrate,” Jpn. J. Appl. Phys. Part 2, 4B, L383 (2001).
[Crossref]

Opt. Express (1)

Opt. Lett. (2)

K. K. Lee, D. R. Lim, and L. C. Kimerling, “Fabrication of ultralow-loss Si/SiO waveguides by roughness reduction,” Opt. Lett., 26, 1888 (2001).
[Crossref]

V. Almeida, R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302 (2002).
[Crossref]

Opt. Quantum Electron. (1)

F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26, 977 (1994).
[Crossref]

Other (5)

K.K. Lee, “Transmission and routing of optical signals in on-chip waveguides for silicon microphotonics,” PhD thesis, MIT (2001).

D.R. Lim, “Device integration for silicon microphotonics platforms,” PhD thesis, MIT (2000);

Y. Hibino, “Silica-Based Planar Lightwave Circuits and Their Applications,” MRS Bulletin May 2003, p.365 (2003)

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Fig. 1. SEM images of a single-mode strip waveguide with 445×220nm core cross-section at different orientations to show the sidewall quality.

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Fig. 2. Transmission spectra of a set of 445×220nm SOI strip waveguides of different lengths measured for TE-polarized light. Spectra are normalized on transmission through a straight 4.2mm long strip waveguide without bends. Inset: schematic of the serpentine waveguide layout to obtain different waveguide lengths with aligned input and output ports.

Download Full Size | PPT Slide | PDF

Fig. 3. Loss spectrum derived from the results of Fig. 2 for 445x220nm SOI strip waveguide. Blue (red) line corresponds to TE (TM) polarizations. Circles represent results from the loss measurements obtained by fitting the slope as shown in the inset. Inset: TE transmission as a function of the waveguide length for two different wavelengths of 1300 and 1500nm. Top panel shows the mode profile for TE- and TM-like modes of the waveguide at 1300nm wavelengths.

Download Full Size | PPT Slide | PDF

Fig. 4. Spectra of bending losses for TE (a) and TM (b) polarizations. Red, green and blue curves correspond to measurements of bends with radii R=1, 2, and 5 microns.

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Tables (2)

Table 1. Comparison of propagation losses of the TE mode measured in single-mode SOI strip waveguides.

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Table 2. Comparison of bending losses of the TE mode measured in single-mode SOI strip waveguides.

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Equations (2)

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α = \frac{4 σ^{2} h^{2}}{β (r + 2 ⁄ p)} = \frac{σ^{2} k_{0}^{2} h}{β} \cdot \frac{E_{s}^{2}}{\int E^{2} d x} \cdot Δ n^{2}

α = K \cdot \exp (- c R), where c = β {(2 Δ n_{eff} ⁄ n_{eff})}^{\frac{3}{2}}

Reference	Height (nm)	Width (nm)	Loss (dB/cm)	Wavelength (nm)	Method	Note
This work	220	445	3.6±0.1	1500	cut-back	21mm long
[4]	220	465	3.5±2	1500	IR capture	4mm long
[13]	270	470	5±2	1550	Fabry-Perot	13mm long
[10]	220	400	33.8±1.7	1550	Fabry-Perot	1mm long
	220	450	7.4±0.9	1550
	220	500	2.4±1.6	1550
[11]	300	300	6	1550	cut-back	oxidation smoothing,
	300	300	13	1550		16mm long
[9]	320	400	25±10	1550	Fabry-Perot	0.18mm long
[5–8]	200	500	32	1540	cut-back	silica cladding

Reference	Height (nm)	Width (nm)	Radius (µm)	Loss (dB/turn)	Wavelength (nm)	Note
This work	220	445	1	0.086±0.005	1500	20 bends
			2	0.013±0.005	1500
			5	±0.005	1500
[11]	300	300	2	0.46	1550	24 bends
			3	0.17	1550
[9]	320	400	1	±3	1550
[8]	200	500	1	0.5	1540	12 bends,
			Resonant	0.3	1540	poly-Si
[10]	220	400	Resonant	1	1550	2 bends
[12]	340	400	Resonant	1	1550	2 bends

Reference	Height (nm)	Width (nm)	Loss (dB/cm)	Wavelength (nm)	Method	Note
This work	220	445	3.6±0.1	1500	cut-back	21mm long
[4]	220	465	3.5±2	1500	IR capture	4mm long
[13]	270	470	5±2	1550	Fabry-Perot	13mm long
[10]	220	400	33.8±1.7	1550	Fabry-Perot	1mm long
	220	450	7.4±0.9	1550
	220	500	2.4±1.6	1550
[11]	300	300	6	1550	cut-back	oxidation smoothing,
	300	300	13	1550		16mm long
[9]	320	400	25±10	1550	Fabry-Perot	0.18mm long
[5–8]	200	500	32	1540	cut-back	silica cladding

Reference	Height (nm)	Width (nm)	Radius (µm)	Loss (dB/turn)	Wavelength (nm)	Note
This work	220	445	1	0.086±0.005	1500	20 bends
			2	0.013±0.005	1500
			5	±0.005	1500
[11]	300	300	2	0.46	1550	24 bends
			3	0.17	1550
[9]	320	400	1	±3	1550
[8]	200	500	1	0.5	1540	12 bends,
			Resonant	0.3	1540	poly-Si
[10]	220	400	Resonant	1	1550	2 bends
[12]	340	400	Resonant	1	1550	2 bends