Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Journal Home About Issues in Progress Current Issue All Issues Feature Issues

Lithographic fabrication of large curved hologram by laser writer

Yongjun Xie, Zhenwu Lu, and Fengyou Li

Open Access Open Access

Abstract

We fabricated a large curved computer-generated hologram pattern on the concave substrate with diameter of 110mm and radius of curvature of 504mm. The line width of the hologram varied form 39um to 810um. We adopt the single pass and the screw-lines to fabricate this curved hologram precisely and efficiently. 80% of the fabrication time is saved by this method. This work will be useful to the measurement of large convex secondary mirrors that is also hardness at present.

©2004 Optical Society of America

Full Article  |  PDF Article
More Like This
Lithographic fabrication of large diffractive optical elements on a concave lens surface

Yongjun Xie, Zhenwu Lu, Fengyou Li, Jingli Zhao, and Zhicheng Weng
Opt. Express 10(20) 1043-1047 (2002)

Fabrication of large diffractive optical elements in thick film on a concave lens surface

Yongjun Xie, Zhenwu Lu, and Fengyou Li
Opt. Express 11(9) 992-995 (2003)

Using curved hologram to test large-aperture convex surface

Hua Liu, Zhenwu Lu, Fengyou Li, Yongjun Xie, Shanshan Kan, and Shurong Wang
Opt. Express 12(14) 3251-3256 (2004)

View More...

References

  • View by:
  • Article Order
  • Year
  • Author
  • Publication
  1. J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, “Measurement of a convex secondary mirror using a holographic test plat,” in Advanced Technology Optical Telescopes V, L. M. Stepp, ed., Proc. SPIE,  2199, 193–198 (1994).
    [Crossref]
  2. T. Harada, S. Moriyama, and T. Kita, “Mechanically ruled stigmatic concave gratings,” Jpn. J. Appl. Phys. 14, 175–179 (1974).
  3. M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33, 3556–3566 (1994).
    [Crossref]
  4. R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science 280, 2091–2098 (1998).
    [Crossref]
  5. C. L. Vernold and T. D. Milster, “Non-photolithographic fabrication of large computer-generated diffractive optical elements,” in Current Developments in Optical Design and Optical Engineering IV, R. E. Fischer and W. J. Smith, eds., Proc. SPIE 2263, 125–133 (1994).
    [Crossref]
  6. Y. Xie, Z. Lu, F. Li, J. Zhao, and Z. Weng, “Lithographic fabrication of large diffractive optical elements on a concave lens surface,” Opt. Express 10, 1043–1047 (2002), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-10-20-1043.
    [Crossref] [PubMed]
  7. Y. Xie, Z. Lu, and F. Li, “Fabrication of large diffractive optical elements in thick film on a concave lens surface,” Opt. Express 11, 992–995 (2003), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-9-992.
    [Crossref] [PubMed]
  8. Y. Xie, Z. Lu, and F. Li, “Method for correcting the joint error of a laser writer,” Opt. Express 11, 975–979 (2003), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-11-9-975
    [Crossref] [PubMed]
  9. Z. Lu and Z. Weng, “Lens centering by using binary phase grating,” in Current Developments in Lens Design and Optical Systems Engineering, R. E. Fischer, R. B. Johnson, W. J. Smith, and W. H. Swantner, eds., Proc. SPIE. 4093, 176–180 (2000).
    [Crossref]
  10. T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2844 (1995).
    [Crossref]

2003 (2)

2002 (1)

2000 (1)

Z. Lu and Z. Weng, “Lens centering by using binary phase grating,” in Current Developments in Lens Design and Optical Systems Engineering, R. E. Fischer, R. B. Johnson, W. J. Smith, and W. H. Swantner, eds., Proc. SPIE. 4093, 176–180 (2000).
[Crossref]

1998 (1)

R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science 280, 2091–2098 (1998).
[Crossref]

1995 (1)

T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2844 (1995).
[Crossref]

1994 (3)

C. L. Vernold and T. D. Milster, “Non-photolithographic fabrication of large computer-generated diffractive optical elements,” in Current Developments in Optical Design and Optical Engineering IV, R. E. Fischer and W. J. Smith, eds., Proc. SPIE 2263, 125–133 (1994).
[Crossref]

J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, “Measurement of a convex secondary mirror using a holographic test plat,” in Advanced Technology Optical Telescopes V, L. M. Stepp, ed., Proc. SPIE,  2199, 193–198 (1994).
[Crossref]

M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33, 3556–3566 (1994).
[Crossref]

1974 (1)

T. Harada, S. Moriyama, and T. Kita, “Mechanically ruled stigmatic concave gratings,” Jpn. J. Appl. Phys. 14, 175–179 (1974).

Adams, A.

R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science 280, 2091–2098 (1998).
[Crossref]

Anderson, D. S.

J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, “Measurement of a convex secondary mirror using a holographic test plat,” in Advanced Technology Optical Telescopes V, L. M. Stepp, ed., Proc. SPIE,  2199, 193–198 (1994).
[Crossref]

Brittain, S. T.

R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science 280, 2091–2098 (1998).
[Crossref]

Burge, J. H.

J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, “Measurement of a convex secondary mirror using a holographic test plat,” in Advanced Technology Optical Telescopes V, L. M. Stepp, ed., Proc. SPIE,  2199, 193–198 (1994).
[Crossref]

Gale, M. T.

M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33, 3556–3566 (1994).
[Crossref]

Harada, T.

T. Harada, S. Moriyama, and T. Kita, “Mechanically ruled stigmatic concave gratings,” Jpn. J. Appl. Phys. 14, 175–179 (1974).

Jackman, R. J.

R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science 280, 2091–2098 (1998).
[Crossref]

Kita, T.

T. Harada, S. Moriyama, and T. Kita, “Mechanically ruled stigmatic concave gratings,” Jpn. J. Appl. Phys. 14, 175–179 (1974).

Li, F.

Lu, Z.

Milster, T. D.

T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2844 (1995).
[Crossref]

J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, “Measurement of a convex secondary mirror using a holographic test plat,” in Advanced Technology Optical Telescopes V, L. M. Stepp, ed., Proc. SPIE,  2199, 193–198 (1994).
[Crossref]

C. L. Vernold and T. D. Milster, “Non-photolithographic fabrication of large computer-generated diffractive optical elements,” in Current Developments in Optical Design and Optical Engineering IV, R. E. Fischer and W. J. Smith, eds., Proc. SPIE 2263, 125–133 (1994).
[Crossref]

Moriyama, S.

T. Harada, S. Moriyama, and T. Kita, “Mechanically ruled stigmatic concave gratings,” Jpn. J. Appl. Phys. 14, 175–179 (1974).

Pedersen, J.

M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33, 3556–3566 (1994).
[Crossref]

Prentiss, M. G.

R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science 280, 2091–2098 (1998).
[Crossref]

Rossi, M.

M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33, 3556–3566 (1994).
[Crossref]

Schutz, H.

M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33, 3556–3566 (1994).
[Crossref]

Vernold, C. L.

T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2844 (1995).
[Crossref]

C. L. Vernold and T. D. Milster, “Non-photolithographic fabrication of large computer-generated diffractive optical elements,” in Current Developments in Optical Design and Optical Engineering IV, R. E. Fischer and W. J. Smith, eds., Proc. SPIE 2263, 125–133 (1994).
[Crossref]

J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, “Measurement of a convex secondary mirror using a holographic test plat,” in Advanced Technology Optical Telescopes V, L. M. Stepp, ed., Proc. SPIE,  2199, 193–198 (1994).
[Crossref]

Weng, Z.

Y. Xie, Z. Lu, F. Li, J. Zhao, and Z. Weng, “Lithographic fabrication of large diffractive optical elements on a concave lens surface,” Opt. Express 10, 1043–1047 (2002), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-10-20-1043.
[Crossref] [PubMed]

Z. Lu and Z. Weng, “Lens centering by using binary phase grating,” in Current Developments in Lens Design and Optical Systems Engineering, R. E. Fischer, R. B. Johnson, W. J. Smith, and W. H. Swantner, eds., Proc. SPIE. 4093, 176–180 (2000).
[Crossref]

Whitesides, G. M.

R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science 280, 2091–2098 (1998).
[Crossref]

Xie, Y.

Zhao, J.

Jpn. J. Appl. Phys. (1)

T. Harada, S. Moriyama, and T. Kita, “Mechanically ruled stigmatic concave gratings,” Jpn. J. Appl. Phys. 14, 175–179 (1974).

Opt. Eng. (2)

M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists,” Opt. Eng. 33, 3556–3566 (1994).
[Crossref]

T. D. Milster and C. L. Vernold, “Technique for aligning optical and mechanical axes based on a rotating linear grating,” Opt. Eng. 34, 2840–2844 (1995).
[Crossref]

Opt. Express (3)

Proc. SPIE (2)

J. H. Burge, D. S. Anderson, T. D. Milster, and C. L. Vernold, “Measurement of a convex secondary mirror using a holographic test plat,” in Advanced Technology Optical Telescopes V, L. M. Stepp, ed., Proc. SPIE,  2199, 193–198 (1994).
[Crossref]

C. L. Vernold and T. D. Milster, “Non-photolithographic fabrication of large computer-generated diffractive optical elements,” in Current Developments in Optical Design and Optical Engineering IV, R. E. Fischer and W. J. Smith, eds., Proc. SPIE 2263, 125–133 (1994).
[Crossref]

Proc. SPIE. (1)

Z. Lu and Z. Weng, “Lens centering by using binary phase grating,” in Current Developments in Lens Design and Optical Systems Engineering, R. E. Fischer, R. B. Johnson, W. J. Smith, and W. H. Swantner, eds., Proc. SPIE. 4093, 176–180 (2000).
[Crossref]

Science (1)

R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, “Design and fabrication of topologically complex, three-dimensional microstructures,” Science 280, 2091–2098 (1998).
[Crossref]

Cited By

Optica participates in Crossref's Cited-By Linking service. Citing articles from Optica Publishing Group journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)
Fig. 1.
Fig. 1. The overlap writing method of laser writer.

Download Full Size | PPT Slide | PDF

Fig. 2
Fig. 2 The combination of single pass and screw line to precisely write large zone.

Download Full Size | PPT Slide | PDF

Fig. 3.
Fig. 3. Schematic of the laser writer system.

Download Full Size | PPT Slide | PDF

Fig. 4
Fig. 4 Part three-dimensional plot of the large curved hologram.

Download Full Size | PPT Slide | PDF

Metrics

Select as filters
Select Topics Cancel
Top
       
© Copyright 2022 | Optica Publishing Group. All Rights Reserved
Privacy | Terms of Use