Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Journal Home About Issues in Progress Current Issue All Issues Feature Issues

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica.

Yves Bellouard, Ali A. Said, and Philippe Bado

Open Access Open Access

Abstract

We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, micro-displacement sensor. Our displacement sensor is made out of a single piece of glass through a two-step process based on femtosecond laser illumination followed by chemical etching.

©2005 Optical Society of America

Full Article  |  PDF Article
More Like This
Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy.

Sheeba Rajesh and Yves Bellouard
Opt. Express 18(20) 21490-21497 (2010)

On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]

Yves Bellouard
Opt. Mater. Express 1(5) 816-831 (2011)

Femtosecond laser micromachining of fused silica molds

Frédéric Madani-Grasset and Yves Bellouard
Opt. Express 18(21) 21826-21840 (2010)

View More...

Supplementary Material (11)

Media 1: MOV (857 KB)     
Media 2: MOV (335 KB)     
Media 3: MOV (333 KB)     
Media 4: MOV (331 KB)     
Media 5: MOV (342 KB)     
Media 6: MOV (337 KB)     
Media 7: MOV (341 KB)     
Media 8: MOV (341 KB)     
Media 9: MOV (333 KB)     
Media 10: MOV (500 KB)     
Media 11: MOV (748 KB)     

Cited By

Optica participates in Crossref's Cited-By Linking service. Citing articles from Optica Publishing Group journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (10)
Fig. 1.
Fig. 1. Computer Assisted Drawing view of the full sensing device.

Download Full Size | PDF

Fig. 2.
Fig. 2. A micro-hinge (left) and a cylinder (right) manufactured using the hybrid femtosecond / chemical etching process.

Download Full Size | PDF

Fig. 3.
Fig. 3. Left: “Waveguides-based linear encoders principles”- Right: Losses due to radial offset between two waveguides with 10-microns core diameter.

Download Full Size | PDF

Fig. 4.
Fig. 4. Sensor kinematics: the circle represents ideal mechanical joints with one degree of freedom (rotation in the plane). Figure a) is a parallelogram four-bars mechanism, b) represents a single compound design and c) a double-compound design

Download Full Size | PDF

Fig. 5.
Fig. 5. Wave propagation in the ILE for various configurations as the array is moved from the right to the left. The horizontal line indicates the free space gaps (Movie: 858kb).

Download Full Size | PDF

Fig. 6.
Fig. 6. FEM analysis – Stress distribution in four hinges (left) and displacement distribution of the entire structure (right).

Download Full Size | PDF

Fig. 7.
Fig. 7. Flexure vibration mode analysis. [Media 2] [Media 3] [Media 4] [Media 5] [Media 6] [Media 7] [Media 8] [Media 9]

Download Full Size | PDF

Fig. 8.
Fig. 8. Experimental setup: (left) Partial view and (right) sketch.

Download Full Size | PDF

Fig. 9.
Fig. 9. (left) Sensor prototype: optical microscope view (movie: 500kb) / (middle) close-view of the ILE. The scale bar is 30 μm. / (right) waveguide turns on and off (movie: 748kb)

Download Full Size | PDF

Fig. 10.
Fig. 10. Experimental results (upper curve) compared with simulation results (lower curve). The figure shows the intensity seen for the last three waveguides (going from left to right). The lowest intensity peaks (on the right) corresponds to the last waveguide.

Download Full Size | PDF

Tables (1)

Tables Icon

Table 1. Main design parameters

View Table

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

L lat = − 10 log { 2 π [ cos − 1 ( δ D ) − δ D 1 − ( δ D ) 2 ] }
K x ≈ 8 Eb t 2.5 9 π l 2 r
α M ≈ 3 π α L r 4 E t
Δ y = 3 π L σ L r 2 E t
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use