M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, “Parallel Drawing of Multiple Bent Optical Waveguides Using a Spatial Light Modulator,” Jpn. J. Appl. Phys. 48(12), 126507 (2009).
[Crossref]

H. Takahashi, S. Hasegawa, A. Takita, and Y. Hayasaki, “Sparse-exposure technique in holographic two-photon polymerization,” Opt. Express 16(21), 16592–16599 (2008).
[PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. A. Kolb, H. Haferkamp, and B. N. Chichkov, “Three-dimensional cell growth on structures fabricated from ORMOCER by two-photon polymerization technique,” J. Biomater. Appl. 22(3), 275–287 (2007).
[Crossref] [PubMed]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref]

X. Dong, Z. Zhao, and X. Duan, “Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing,” Appl. Phys. Lett. 91(12), 124103 (2007).
[Crossref]

L. Kelemen, S. Valkai, and P. Ormos, “Parallel photopolymerisation with complex light patterns generated by diffractive optical elements,” Opt. Express 15(22), 14488–14497 (2007).
[Crossref] [PubMed]

H. Takahashi, S. Hasegawa, and Y. Hayasaki, “Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator,” Appl. Opt. 46(23), 5917–5923 (2007).
[Crossref] [PubMed]

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15(6), 3426–3436 (2007).
[Crossref] [PubMed]

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14(2), 810–816 (2006).
[Crossref] [PubMed]

C. Reinhardt, S. Passinger, B. N. Chichkov, C. Marquart, I. P. Radko, and S. I. Bozhevolnyi, “Laser-fabricated dielectric optical components for surface plasmon polaritons,” Opt. Lett. 31(9), 1307–1309 (2006).
[Crossref] [PubMed]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

K. K. Seet, S. Juodkazis, V. Jarutis, and H. Misawa, “Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8,” Appl. Phys. Lett. 89(2), 024106–024108 (2006).
[Crossref]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett. 87(3), 031101–031103 (2005).
[Crossref]

K. Takada, H.-B. Sun, and S. Kawata, “Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting,” Appl. Phys. Lett. 86(7), 071122–071124 (2005).
[Crossref]

J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, “Multiple-spot parallel processing for laser micronanofabrication,” Appl. Phys. Lett. 86(4), 044102–044104 (2005).
[Crossref]

J. Serbin, A. Ovsianikov, and B. Chichkov, “Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties,” Opt. Express 12(21), 5221–5228 (2004).
[Crossref] [PubMed]

Y. Nakata, T. Okada, and M. Maeda, “Nano-Sized Hollow Bump Array Generated by Single Femtosecond Laser Pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

M. Will, S. Nolte, B. N. Chichkov, and A. Tünnermann, “Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses,” Appl. Opt. 41(21), 4360–4364 (2002).
[Crossref] [PubMed]

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

H.-B. Sun, S. Matsuo, and H. Misawa, “Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin,” Appl. Phys. Lett. 74(6), 786–788 (1999).
[Crossref]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[Crossref]

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21(24), 2023–2025 (1996).
[Crossref] [PubMed]

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[Crossref]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, “Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm,” Appl. Phys. Lett. 65(14), 1850–1852 (1994).
[Crossref]

J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, “Multiple-spot parallel processing for laser micronanofabrication,” Appl. Phys. Lett. 86(4), 044102–044104 (2005).
[Crossref]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15(6), 3426–3436 (2007).
[Crossref] [PubMed]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

C. Reinhardt, S. Passinger, B. N. Chichkov, C. Marquart, I. P. Radko, and S. I. Bozhevolnyi, “Laser-fabricated dielectric optical components for surface plasmon polaritons,” Opt. Lett. 31(9), 1307–1309 (2006).
[Crossref] [PubMed]

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21(24), 2023–2025 (1996).
[Crossref] [PubMed]

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15(6), 3426–3436 (2007).
[Crossref] [PubMed]

J. Serbin, A. Ovsianikov, and B. Chichkov, “Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties,” Opt. Express 12(21), 5221–5228 (2004).
[Crossref] [PubMed]

S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. A. Kolb, H. Haferkamp, and B. N. Chichkov, “Three-dimensional cell growth on structures fabricated from ORMOCER by two-photon polymerization technique,” J. Biomater. Appl. 22(3), 275–287 (2007).
[Crossref] [PubMed]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref]

C. Reinhardt, S. Passinger, B. N. Chichkov, C. Marquart, I. P. Radko, and S. I. Bozhevolnyi, “Laser-fabricated dielectric optical components for surface plasmon polaritons,” Opt. Lett. 31(9), 1307–1309 (2006).
[Crossref] [PubMed]

M. Will, S. Nolte, B. N. Chichkov, and A. Tünnermann, “Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses,” Appl. Opt. 41(21), 4360–4364 (2002).
[Crossref] [PubMed]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[Crossref]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15(6), 3426–3436 (2007).
[Crossref] [PubMed]

X. Dong, Z. Zhao, and X. Duan, “Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing,” Appl. Phys. Lett. 91(12), 124103 (2007).
[Crossref]

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[Crossref]

X. Dong, Z. Zhao, and X. Duan, “Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing,” Appl. Phys. Lett. 91(12), 124103 (2007).
[Crossref]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. A. Kolb, H. Haferkamp, and B. N. Chichkov, “Three-dimensional cell growth on structures fabricated from ORMOCER by two-photon polymerization technique,” J. Biomater. Appl. 22(3), 275–287 (2007).
[Crossref] [PubMed]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21(24), 2023–2025 (1996).
[Crossref] [PubMed]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21(24), 2023–2025 (1996).
[Crossref] [PubMed]

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14(2), 810–816 (2006).
[Crossref] [PubMed]

S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. A. Kolb, H. Haferkamp, and B. N. Chichkov, “Three-dimensional cell growth on structures fabricated from ORMOCER by two-photon polymerization technique,” J. Biomater. Appl. 22(3), 275–287 (2007).
[Crossref] [PubMed]

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15(6), 3426–3436 (2007).
[Crossref] [PubMed]

H. Takahashi, S. Hasegawa, A. Takita, and Y. Hayasaki, “Sparse-exposure technique in holographic two-photon polymerization,” Opt. Express 16(21), 16592–16599 (2008).
[PubMed]

H. Takahashi, S. Hasegawa, and Y. Hayasaki, “Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator,” Appl. Opt. 46(23), 5917–5923 (2007).
[Crossref] [PubMed]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15(6), 3426–3436 (2007).
[Crossref] [PubMed]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref]

H. Takahashi, S. Hasegawa, A. Takita, and Y. Hayasaki, “Sparse-exposure technique in holographic two-photon polymerization,” Opt. Express 16(21), 16592–16599 (2008).
[PubMed]

H. Takahashi, S. Hasegawa, and Y. Hayasaki, “Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator,” Appl. Opt. 46(23), 5917–5923 (2007).
[Crossref] [PubMed]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett. 87(3), 031101–031103 (2005).
[Crossref]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21(24), 2023–2025 (1996).
[Crossref] [PubMed]

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, “Parallel Drawing of Multiple Bent Optical Waveguides Using a Spatial Light Modulator,” Jpn. J. Appl. Phys. 48(12), 126507 (2009).
[Crossref]

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21(24), 2023–2025 (1996).
[Crossref] [PubMed]

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14(2), 810–816 (2006).
[Crossref] [PubMed]

K. K. Seet, S. Juodkazis, V. Jarutis, and H. Misawa, “Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8,” Appl. Phys. Lett. 89(2), 024106–024108 (2006).
[Crossref]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

K. K. Seet, S. Juodkazis, V. Jarutis, and H. Misawa, “Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8,” Appl. Phys. Lett. 89(2), 024106–024108 (2006).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, “Multiple-spot parallel processing for laser micronanofabrication,” Appl. Phys. Lett. 86(4), 044102–044104 (2005).
[Crossref]

J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, “Multiple-spot parallel processing for laser micronanofabrication,” Appl. Phys. Lett. 86(4), 044102–044104 (2005).
[Crossref]

K. Takada, H.-B. Sun, and S. Kawata, “Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting,” Appl. Phys. Lett. 86(7), 071122–071124 (2005).
[Crossref]

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

L. Kelemen, S. Valkai, and P. Ormos, “Parallel photopolymerisation with complex light patterns generated by diffractive optical elements,” Opt. Express 15(22), 14488–14497 (2007).
[Crossref] [PubMed]

S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. A. Kolb, H. Haferkamp, and B. N. Chichkov, “Three-dimensional cell growth on structures fabricated from ORMOCER by two-photon polymerization technique,” J. Biomater. Appl. 22(3), 275–287 (2007).
[Crossref] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[Crossref]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, “Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm,” Appl. Phys. Lett. 65(14), 1850–1852 (1994).
[Crossref]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14(2), 810–816 (2006).
[Crossref] [PubMed]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[Crossref]

Y. Nakata, T. Okada, and M. Maeda, “Nano-Sized Hollow Bump Array Generated by Single Femtosecond Laser Pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15(6), 3426–3436 (2007).
[Crossref] [PubMed]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

C. Reinhardt, S. Passinger, B. N. Chichkov, C. Marquart, I. P. Radko, and S. I. Bozhevolnyi, “Laser-fabricated dielectric optical components for surface plasmon polaritons,” Opt. Lett. 31(9), 1307–1309 (2006).
[Crossref] [PubMed]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

H.-B. Sun, S. Matsuo, and H. Misawa, “Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin,” Appl. Phys. Lett. 74(6), 786–788 (1999).
[Crossref]

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21(24), 2023–2025 (1996).
[Crossref] [PubMed]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, “Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm,” Appl. Phys. Lett. 65(14), 1850–1852 (1994).
[Crossref]

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21(24), 2023–2025 (1996).
[Crossref] [PubMed]

K. K. Seet, S. Juodkazis, V. Jarutis, and H. Misawa, “Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8,” Appl. Phys. Lett. 89(2), 024106–024108 (2006).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

H.-B. Sun, S. Matsuo, and H. Misawa, “Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin,” Appl. Phys. Lett. 74(6), 786–788 (1999).
[Crossref]

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, “Parallel Drawing of Multiple Bent Optical Waveguides Using a Spatial Light Modulator,” Jpn. J. Appl. Phys. 48(12), 126507 (2009).
[Crossref]

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[Crossref]

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[Crossref]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, “Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm,” Appl. Phys. Lett. 65(14), 1850–1852 (1994).
[Crossref]

Y. Nakata, T. Okada, and M. Maeda, “Nano-Sized Hollow Bump Array Generated by Single Femtosecond Laser Pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref]

S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. A. Kolb, H. Haferkamp, and B. N. Chichkov, “Three-dimensional cell growth on structures fabricated from ORMOCER by two-photon polymerization technique,” J. Biomater. Appl. 22(3), 275–287 (2007).
[Crossref] [PubMed]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett. 87(3), 031101–031103 (2005).
[Crossref]

M. Will, S. Nolte, B. N. Chichkov, and A. Tünnermann, “Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses,” Appl. Opt. 41(21), 4360–4364 (2002).
[Crossref] [PubMed]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[Crossref]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, “Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm,” Appl. Phys. Lett. 65(14), 1850–1852 (1994).
[Crossref]

Y. Nakata, T. Okada, and M. Maeda, “Nano-Sized Hollow Bump Array Generated by Single Femtosecond Laser Pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, “Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm,” Appl. Phys. Lett. 65(14), 1850–1852 (1994).
[Crossref]

L. Kelemen, S. Valkai, and P. Ormos, “Parallel photopolymerisation with complex light patterns generated by diffractive optical elements,” Opt. Express 15(22), 14488–14497 (2007).
[Crossref] [PubMed]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref]

S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. A. Kolb, H. Haferkamp, and B. N. Chichkov, “Three-dimensional cell growth on structures fabricated from ORMOCER by two-photon polymerization technique,” J. Biomater. Appl. 22(3), 275–287 (2007).
[Crossref] [PubMed]

J. Serbin, A. Ovsianikov, and B. Chichkov, “Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties,” Opt. Express 12(21), 5221–5228 (2004).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

C. Reinhardt, S. Passinger, B. N. Chichkov, C. Marquart, I. P. Radko, and S. I. Bozhevolnyi, “Laser-fabricated dielectric optical components for surface plasmon polaritons,” Opt. Lett. 31(9), 1307–1309 (2006).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

W. Haske, V. W. Chen, J. M. Hales, W. Dong, S. Barlow, S. R. Marder, and J. W. Perry, “65 nm feature sizes using visible wavelength 3-D multiphoton lithography,” Opt. Express 15(6), 3426–3436 (2007).
[Crossref] [PubMed]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

C. Reinhardt, S. Passinger, B. N. Chichkov, C. Marquart, I. P. Radko, and S. I. Bozhevolnyi, “Laser-fabricated dielectric optical components for surface plasmon polaritons,” Opt. Lett. 31(9), 1307–1309 (2006).
[Crossref] [PubMed]

C. Reinhardt, S. Passinger, B. N. Chichkov, C. Marquart, I. P. Radko, and S. I. Bozhevolnyi, “Laser-fabricated dielectric optical components for surface plasmon polaritons,” Opt. Lett. 31(9), 1307–1309 (2006).
[Crossref] [PubMed]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, “Parallel Drawing of Multiple Bent Optical Waveguides Using a Spatial Light Modulator,” Jpn. J. Appl. Phys. 48(12), 126507 (2009).
[Crossref]

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, “Parallel Drawing of Multiple Bent Optical Waveguides Using a Spatial Light Modulator,” Jpn. J. Appl. Phys. 48(12), 126507 (2009).
[Crossref]

S. Schlie, A. Ngezahayo, A. Ovsianikov, T. Fabian, H. A. Kolb, H. Haferkamp, and B. N. Chichkov, “Three-dimensional cell growth on structures fabricated from ORMOCER by two-photon polymerization technique,” J. Biomater. Appl. 22(3), 275–287 (2007).
[Crossref] [PubMed]

A. Ovsianikov, S. Schlie, A. Ngezahayo, A. Haverich, and B. N. Chichkov, “Two-photon polymerization technique for microfabrication of CAD-designed 3D scaffolds from commercially available photosensitive materials,” J. Tissue Eng. Regen. Med. 1(6), 443–449 (2007).
[Crossref]

K. K. Seet, S. Juodkazis, V. Jarutis, and H. Misawa, “Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8,” Appl. Phys. Lett. 89(2), 024106–024108 (2006).
[Crossref]

J. Serbin, A. Ovsianikov, and B. Chichkov, “Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties,” Opt. Express 12(21), 5221–5228 (2004).
[Crossref] [PubMed]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, “Parallel Drawing of Multiple Bent Optical Waveguides Using a Spatial Light Modulator,” Jpn. J. Appl. Phys. 48(12), 126507 (2009).
[Crossref]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett. 64(23), 3071–3073 (1994).
[Crossref]

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996).
[Crossref] [PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett. 87(3), 031101–031103 (2005).
[Crossref]

K. Takada, H.-B. Sun, and S. Kawata, “Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting,” Appl. Phys. Lett. 86(7), 071122–071124 (2005).
[Crossref]

J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, “Multiple-spot parallel processing for laser micronanofabrication,” Appl. Phys. Lett. 86(4), 044102–044104 (2005).
[Crossref]

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

H.-B. Sun, S. Matsuo, and H. Misawa, “Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin,” Appl. Phys. Lett. 74(6), 786–788 (1999).
[Crossref]

K. Takada, H.-B. Sun, and S. Kawata, “Improved spatial resolution and surface roughness in photopolymerizationbased laser nanowriting,” Appl. Phys. Lett. 86(7), 071122–071124 (2005).
[Crossref]

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

H. Takahashi, S. Hasegawa, A. Takita, and Y. Hayasaki, “Sparse-exposure technique in holographic two-photon polymerization,” Opt. Express 16(21), 16592–16599 (2008).
[PubMed]

H. Takahashi, S. Hasegawa, and Y. Hayasaki, “Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator,” Appl. Opt. 46(23), 5917–5923 (2007).
[Crossref] [PubMed]

J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun, and S. Kawata, “Multiple-spot parallel processing for laser micronanofabrication,” Appl. Phys. Lett. 86(4), 044102–044104 (2005).
[Crossref]

H. Takahashi, S. Hasegawa, A. Takita, and Y. Hayasaki, “Sparse-exposure technique in holographic two-photon polymerization,” Opt. Express 16(21), 16592–16599 (2008).
[PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett. 87(3), 031101–031103 (2005).
[Crossref]

S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, “Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm,” Appl. Phys. Lett. 65(14), 1850–1852 (1994).
[Crossref]

M. Will, S. Nolte, B. N. Chichkov, and A. Tünnermann, “Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses,” Appl. Opt. 41(21), 4360–4364 (2002).
[Crossref] [PubMed]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[Crossref]

L. Kelemen, S. Valkai, and P. Ormos, “Parallel photopolymerisation with complex light patterns generated by diffractive optical elements,” Opt. Express 15(22), 14488–14497 (2007).
[Crossref] [PubMed]

B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys., A Mater. Sci. Process. 63(2), 109–115 (1996).
[Crossref]

Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, E. Fearon, G. Dearden, and K. G. Watkins, “Fast parallel diffractive multi-beam femtosecond laser surface micro-structuring,” Appl. Surf. Sci. 225, 6582–6588 (2008).

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

M. Will, S. Nolte, B. N. Chichkov, and A. Tünnermann, “Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses,” Appl. Opt. 41(21), 4360–4364 (2002).
[Crossref] [PubMed]

B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikai, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, “Two-photon polymerization initiators for threedimensional optical data storage and microfabrication,” Nature 398(6722), 51–54 (1999).
[Crossref]

J. Leach, K. Wulff, G. Sinclair, P. Jordan, J. Courtial, L. Thomson, G. Gibson, K. Karunwi, J. Cooper, Z. J. Laczik, and M. Padgett, “Interactive approach to optical tweezers control,” Appl. Opt. 45(5), 897–903 (2006).
[Crossref] [PubMed]

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