Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography

Open Access Open Access

Abstract

We have fabricated diamond-like silicon photonic crystals through a sequential silica/silicon chemical vapor deposition (CVD) process from the corresponding polymer templates photopatterned by holographic lithography. Core-shell morphology is revealed due to the partial backfilling of the interstitial pores. To model the shell formation and investigate its effect to the bandgap properties, we developed a two-parameter level-set approach that closely approximated the core-shell morphology, and compare the bandgap simulation with the measured optical properties of the 3D crystals at each processing step. Both experimental and calculation results suggest that a complete filling is necessary to maximize the photonic bandgap in the diamond-like structures.

©2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Distortion of 3D SU8 Photonic Structures Fabricated by Four-beam Holographic Lithography with Umbrella Configuration

Xuelian Zhu, Yongan Xu, and Shu Yang
Opt. Express 15(25) 16546-16560 (2007)

Constructing 3D crystal templates for photonic band gap materials using holographic optical tweezers

D.C. Benito, D.M. Carberry, S.H. Simpson, G.M. Gibson, M.J. Padgett, J.G. Rarity, M.J. Miles, and S. Hanna
Opt. Express 16(17) 13005-13015 (2008)

Cited By

Optica participates in Crossref's Cited-By Linking service. Citing articles from Optica Publishing Group journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1.
Fig. 1. SEM images of (a) diamond-like SU-8 structures, inverse silica replica before (b) and after (c) the removal of the template, and (d) silicon diamond-like photonic crystals. Insets in (a), (c), and (d) show the (111) plane. Scale bar: 1µm. The arrows in (b) and (c) indicate the unfilled air voids.
Scheme 1.
Scheme 1. Deposition of silica on the polymer template. (a) The pores into the internal voids are closed during the deposition before filling the voids completely.
Fig. 2.
Fig. 2. Photonic band structure and normalized reflectance spectra for (a) SU-8, (b) silica, and (c) silicon photonic crystals. Insets show the level surface of (a) polymer, and level surfaces of (b) polymer (grey) and silica (white) and (c) silicon (grey) and air voids (black): (a) 0.1<I, (b) -1.0<I<0.1, and (c) 0.1<I<1.4.
Fig. 3.
Fig. 3. Gap/mid-gap width of core-shell diamond-like photonic crystals as a function of a threshold value t2. Two level surfaces are defined by two threshold values of t1=0.4 and t2, and the shell structure are defined by 0.4<I<t2. Inset: 3D structures defined by t1=0.4 (grey) and the corresponding t2 (black).
Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved