Abstract
We have fabricated diamond-like silicon photonic crystals through a sequential silica/silicon chemical vapor deposition (CVD) process from the corresponding polymer templates photopatterned by holographic lithography. Core-shell morphology is revealed due to the partial backfilling of the interstitial pores. To model the shell formation and investigate its effect to the bandgap properties, we developed a two-parameter level-set approach that closely approximated the core-shell morphology, and compare the bandgap simulation with the measured optical properties of the 3D crystals at each processing step. Both experimental and calculation results suggest that a complete filling is necessary to maximize the photonic bandgap in the diamond-like structures.
©2006 Optical Society of America
Full Article | PDF ArticleMore Like This
Xuelian Zhu, Yongan Xu, and Shu Yang
Opt. Express 15(25) 16546-16560 (2007)
Yuankun Lin, Ahmad Harb, Karen Lozano, Di Xu, and K. P. Chen
Opt. Express 17(19) 16625-16631 (2009)
D.C. Benito, D.M. Carberry, S.H. Simpson, G.M. Gibson, M.J. Padgett, J.G. Rarity, M.J. Miles, and S. Hanna
Opt. Express 16(17) 13005-13015 (2008)