J. T. Robinson, K. Preston, O. Painter, and M. Lipson, “First-principle derivation of gain in high-index-contrast waveguides,” Opt. Express 16, 16659–16669 (2008).
[Crossref] [PubMed]

L. D. Negro, R. Li, J. Warga, and S. N. Basu, “Sensitized erbium emission from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 92, 181105 (2008).
[Crossref]

Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low loss (~6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler,” Opt. Express 16, 6425–6432 (2008).
[Crossref] [PubMed]

A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16, 11930–11936 (2008).
[Crossref] [PubMed]

F. Dell’Olio and V. M. Passaro, “Optical sensing by optimized silicon slot waveguides,” Opt. Express 15, 4977–4993 (2007).
[Crossref] [PubMed]

K. Preston, B. Schmidt, and M. Lipson, “Polysilicon photonic resonators for large-scale 3D integration of optical networks,” Opt. Express 15, 17283–17290 (2007).
[Crossref] [PubMed]

R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15, 17967–17972 (2007).
[Crossref] [PubMed]

P. Koonath, T. Indukuri, and B. Jalali, “Monolithic 3-D Silicon Photonics,” J. Lightwave Technol. 24, 1796 (2006).
[Crossref]

R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, and P. Mur, “Ultra compact optical link made in amorphous silicon waveguide,” Proc. SPIE 6183, 618304–618310 (2006).
[Crossref]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14, 9203–9210 (2006).
[Crossref] [PubMed]

P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
[Crossref]

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

C. A. Barrios and M. Lipson, “Electrically driven silicon resonant light emitting device based on slot-waveguide,” Opt. Express 13, 10092–10101 (2005).
[Crossref] [PubMed]

M. Borselli, T. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13, 1515–1530 (2005).
[Crossref] [PubMed]

D. K. Sparacin, S. J. Spector, and L. C. Kimerling, “Silicon waveguide sidewall smoothing by wet chemical oxidation,” J. Lightwave Technol. 23, 2455–2461 (2005).
[Crossref]

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold erbium-implanted toroidal microlaser on silicon,” Appl. Phys. Lett. 84, 1037–1039 (2004).
[Crossref]

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29, 1209–1211 (2004).
[Crossref] [PubMed]

Q. Xu, V. R. Almeida, R. R. Panepucci, and M. Lipson, “Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material,” Opt. Lett. 29, 1626–1628 (2004).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides,” J. Electron. Mater. 29, 1380–1386 (2000).
[Crossref]

P. Sangwoo, S. Taichi, J. P. Denton, and G. W. Neudeck, “Multiple layers of silicon-on-insulator islands fabrication by selective epitaxial growth,” IEEE Electron Device Lett. 20, 194–196 (1999).
[Crossref]

G. Cocorullo, F. G. Della Corte, R. de Rosa, I. Rendina, A. Rubino, and E. Terzini, “Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 997–1002 (1998).
[Crossref]

M. Fujii, M. Yoshida, Y. Kanzawa, S. Hayashi, and K. Yamamoto, “1.54 μm photoluminescence of Er3+ doped into SiO2 films containing Si nanocrystals: Evidence for energy transfer from Si nanocrystals to Er3+,” Appl. Phys. Lett. 71, 1198–1200 (1997).
[Crossref]

E. Snoeks, G. N. van den Hoven, and A. Polman, “Optimization of an Er-doped silica glass optical waveguide amplifier,” IEEE J. Quantum Electron. 32, 1680–1684 (1996).
[Crossref]

W. J. Miniscalco, “Erbium-doped glasses for fiber amplifiers at 1500 nm,” J. Lightwave Technol. 9, 234–250 (1991).
[Crossref]

T. Kitagawa, K. Hattori, M. Shimizu, Y. Ohmori, and M. Kobayashi, “Guided-wave laser based on erbium-doped silica planar lightwave circuit,” Electron. Lett. 27, 334–335 (1991).
[Crossref]

J. B. Lasky, “Wafer bonding for silicon-on-insulator technologies,” Appl. Phys. Lett. 48, 78–80 (1986).
[Crossref]

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides,” J. Electron. Mater. 29, 1380–1386 (2000).
[Crossref]

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29, 1209–1211 (2004).
[Crossref] [PubMed]

Q. Xu, V. R. Almeida, R. R. Panepucci, and M. Lipson, “Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material,” Opt. Lett. 29, 1626–1628 (2004).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
[Crossref]

C. A. Barrios and M. Lipson, “Electrically driven silicon resonant light emitting device based on slot-waveguide,” Opt. Express 13, 10092–10101 (2005).
[Crossref] [PubMed]

V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29, 1209–1211 (2004).
[Crossref] [PubMed]

L. D. Negro, R. Li, J. Warga, and S. N. Basu, “Sensitized erbium emission from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 92, 181105 (2008).
[Crossref]

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, and P. Mur, “Ultra compact optical link made in amorphous silicon waveguide,” Proc. SPIE 6183, 618304–618310 (2006).
[Crossref]

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

M. Borselli, T. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13, 1515–1530 (2005).
[Crossref] [PubMed]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14, 9203–9210 (2006).
[Crossref] [PubMed]

P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
[Crossref]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16, 11930–11936 (2008).
[Crossref] [PubMed]

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
[Crossref]

G. Cocorullo, F. G. Della Corte, R. de Rosa, I. Rendina, A. Rubino, and E. Terzini, “Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 997–1002 (1998).
[Crossref]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14, 9203–9210 (2006).
[Crossref] [PubMed]

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

G. Cocorullo, F. G. Della Corte, R. de Rosa, I. Rendina, A. Rubino, and E. Terzini, “Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 997–1002 (1998).
[Crossref]

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” in Group IV Photonics (IEEE, 2008), pp.215–217.

F. Dell’Olio and V. M. Passaro, “Optical sensing by optimized silicon slot waveguides,” Opt. Express 15, 4977–4993 (2007).
[Crossref] [PubMed]

P. Sangwoo, S. Taichi, J. P. Denton, and G. W. Neudeck, “Multiple layers of silicon-on-insulator islands fabrication by selective epitaxial growth,” IEEE Electron Device Lett. 20, 194–196 (1999).
[Crossref]

R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15, 17967–17972 (2007).
[Crossref] [PubMed]

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides,” J. Electron. Mater. 29, 1380–1386 (2000).
[Crossref]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14, 9203–9210 (2006).
[Crossref] [PubMed]

Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low loss (~6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler,” Opt. Express 16, 6425–6432 (2008).
[Crossref] [PubMed]

P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
[Crossref]

R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, and P. Mur, “Ultra compact optical link made in amorphous silicon waveguide,” Proc. SPIE 6183, 618304–618310 (2006).
[Crossref]

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” in Group IV Photonics (IEEE, 2008), pp.215–217.

R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15, 17967–17972 (2007).
[Crossref] [PubMed]

M. Fujii, M. Yoshida, Y. Kanzawa, S. Hayashi, and K. Yamamoto, “1.54 μm photoluminescence of Er3+ doped into SiO2 films containing Si nanocrystals: Evidence for energy transfer from Si nanocrystals to Er3+,” Appl. Phys. Lett. 71, 1198–1200 (1997).
[Crossref]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” in Group IV Photonics (IEEE, 2008), pp.215–217.

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” in Group IV Photonics (IEEE, 2008), pp.215–217.

R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, and P. Mur, “Ultra compact optical link made in amorphous silicon waveguide,” Proc. SPIE 6183, 618304–618310 (2006).
[Crossref]

T. Kitagawa, K. Hattori, M. Shimizu, Y. Ohmori, and M. Kobayashi, “Guided-wave laser based on erbium-doped silica planar lightwave circuit,” Electron. Lett. 27, 334–335 (1991).
[Crossref]

M. Fujii, M. Yoshida, Y. Kanzawa, S. Hayashi, and K. Yamamoto, “1.54 μm photoluminescence of Er3+ doped into SiO2 films containing Si nanocrystals: Evidence for energy transfer from Si nanocrystals to Er3+,” Appl. Phys. Lett. 71, 1198–1200 (1997).
[Crossref]

Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” in Group IV Photonics (IEEE, 2008), pp.215–217.

P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
[Crossref]

R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15, 17967–17972 (2007).
[Crossref] [PubMed]

E. Snoeks, G. N. van den Hoven, and A. Polman, “Optimization of an Er-doped silica glass optical waveguide amplifier,” IEEE J. Quantum Electron. 32, 1680–1684 (1996).
[Crossref]

P. Koonath, T. Indukuri, and B. Jalali, “Monolithic 3-D Silicon Photonics,” J. Lightwave Technol. 24, 1796 (2006).
[Crossref]

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

P. Koonath, T. Indukuri, and B. Jalali, “Monolithic 3-D Silicon Photonics,” J. Lightwave Technol. 24, 1796 (2006).
[Crossref]

R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, and P. Mur, “Ultra compact optical link made in amorphous silicon waveguide,” Proc. SPIE 6183, 618304–618310 (2006).
[Crossref]

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A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14, 9203–9210 (2006).
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E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” in Group IV Photonics (IEEE, 2008), pp.215–217.

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold erbium-implanted toroidal microlaser on silicon,” Appl. Phys. Lett. 84, 1037–1039 (2004).
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R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15, 17967–17972 (2007).
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L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides,” J. Electron. Mater. 29, 1380–1386 (2000).
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D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold erbium-implanted toroidal microlaser on silicon,” Appl. Phys. Lett. 84, 1037–1039 (2004).
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T. Kitagawa, K. Hattori, M. Shimizu, Y. Ohmori, and M. Kobayashi, “Guided-wave laser based on erbium-doped silica planar lightwave circuit,” Electron. Lett. 27, 334–335 (1991).
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T. Kitagawa, K. Hattori, M. Shimizu, Y. Ohmori, and M. Kobayashi, “Guided-wave laser based on erbium-doped silica planar lightwave circuit,” Electron. Lett. 27, 334–335 (1991).
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E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides,” J. Electron. Mater. 29, 1380–1386 (2000).
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P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
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R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8nm slot waveguides,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2008), paper CThT3.

L. D. Negro, R. Li, J. Warga, and S. N. Basu, “Sensitized erbium emission from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 92, 181105 (2008).
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L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides,” J. Electron. Mater. 29, 1380–1386 (2000).
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L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides,” J. Electron. Mater. 29, 1380–1386 (2000).
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R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15, 17967–17972 (2007).
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M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
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Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low loss (~6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler,” Opt. Express 16, 6425–6432 (2008).
[Crossref] [PubMed]

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15, 17967–17972 (2007).
[Crossref] [PubMed]

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold erbium-implanted toroidal microlaser on silicon,” Appl. Phys. Lett. 84, 1037–1039 (2004).
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M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
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M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
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R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, and P. Mur, “Ultra compact optical link made in amorphous silicon waveguide,” Proc. SPIE 6183, 618304–618310 (2006).
[Crossref]

L. D. Negro, R. Li, J. Warga, and S. N. Basu, “Sensitized erbium emission from silicon-rich nitride/silicon superlattice structures,” Appl. Phys. Lett. 92, 181105 (2008).
[Crossref]

P. Sangwoo, S. Taichi, J. P. Denton, and G. W. Neudeck, “Multiple layers of silicon-on-insulator islands fabrication by selective epitaxial growth,” IEEE Electron Device Lett. 20, 194–196 (1999).
[Crossref]

A. Nitkowski, L. Chen, and M. Lipson, “Cavity-enhanced on-chip absorption spectroscopy using microring resonators,” Opt. Express 16, 11930–11936 (2008).
[Crossref] [PubMed]

T. Kitagawa, K. Hattori, M. Shimizu, Y. Ohmori, and M. Kobayashi, “Guided-wave laser based on erbium-doped silica planar lightwave circuit,” Electron. Lett. 27, 334–335 (1991).
[Crossref]

R. Orobtchouk, S. Jeannot, B. Han, T. Benyattou, J. M. Fedeli, and P. Mur, “Ultra compact optical link made in amorphous silicon waveguide,” Proc. SPIE 6183, 618304–618310 (2006).
[Crossref]

R. M. Pafchek, J. Li, R. S. Tummidi, and T. L. Koch, “Low loss Si-SiO2-Si 8nm slot waveguides,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2008), paper CThT3.

J. T. Robinson, K. Preston, O. Painter, and M. Lipson, “First-principle derivation of gain in high-index-contrast waveguides,” Opt. Express 16, 16659–16669 (2008).
[Crossref] [PubMed]

M. Borselli, T. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13, 1515–1530 (2005).
[Crossref] [PubMed]

Q. Xu, V. R. Almeida, R. R. Panepucci, and M. Lipson, “Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material,” Opt. Lett. 29, 1626–1628 (2004).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14, 9203–9210 (2006).
[Crossref] [PubMed]

A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, “Electrically pumped hybrid AlGaInAs-silicon evanescent laser,” Opt. Express 14, 9203–9210 (2006).
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D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

L. Pavesi, “Silicon-Based Light Sources for Silicon Integrated Circuits,” Advances in Optical Technologies (2008).
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E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” in Group IV Photonics (IEEE, 2008), pp.215–217.

Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” in Group IV Photonics (IEEE, 2008), pp.215–217.

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

A. Polman, B. Min, J. Kalkman, T. J. Kippenberg, and K. J. Vahala, “Ultralow-threshold erbium-implanted toroidal microlaser on silicon,” Appl. Phys. Lett. 84, 1037–1039 (2004).
[Crossref]

E. Snoeks, G. N. van den Hoven, and A. Polman, “Optimization of an Er-doped silica glass optical waveguide amplifier,” IEEE J. Quantum Electron. 32, 1680–1684 (1996).
[Crossref]

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

J. T. Robinson, K. Preston, O. Painter, and M. Lipson, “First-principle derivation of gain in high-index-contrast waveguides,” Opt. Express 16, 16659–16669 (2008).
[Crossref] [PubMed]

K. Preston, B. Schmidt, and M. Lipson, “Polysilicon photonic resonators for large-scale 3D integration of optical networks,” Opt. Express 15, 17283–17290 (2007).
[Crossref] [PubMed]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

M. Galli, A. Politi, M. Belotti, D. Gerace, M. Liscidini, M. Patrini, L. C. Andreani, M. Miritello, A. Irrera, F. Priolo, and Y. Chen, “Strong enhancement of Er3+ emission at room temperature in silicon-on-insulator photonic crystal waveguides,” Appl. Phys. Lett. 88, 251114 (2006).
[Crossref]

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
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G. Cocorullo, F. G. Della Corte, R. de Rosa, I. Rendina, A. Rubino, and E. Terzini, “Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 997–1002 (1998).
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J. T. Robinson, K. Preston, O. Painter, and M. Lipson, “First-principle derivation of gain in high-index-contrast waveguides,” Opt. Express 16, 16659–16669 (2008).
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P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
[Crossref]

G. Cocorullo, F. G. Della Corte, R. de Rosa, I. Rendina, A. Rubino, and E. Terzini, “Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 997–1002 (1998).
[Crossref]

G. Cocorullo, F. G. Della Corte, R. de Rosa, I. Rendina, A. Rubino, and E. Terzini, “Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 997–1002 (1998).
[Crossref]

E. Jordana, J. M. Fedeli, P. Lyan, J. P. Colonna, P. E. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” in Group IV Photonics (IEEE, 2007), pp.222–224.

P. Sangwoo, S. Taichi, J. P. Denton, and G. W. Neudeck, “Multiple layers of silicon-on-insulator islands fabrication by selective epitaxial growth,” IEEE Electron Device Lett. 20, 194–196 (1999).
[Crossref]

M. Galli, D. Gerace, A. Politi, M. Liscidini, M. Patrini, L. C. Andreani, A. Canino, M. Miritello, R. L. Savio, A. Irrera, and F. Priolo, “Direct evidence of light confinement and emission enhancement in active silicon-on-insulator slot waveguides,” Appl. Phys. Lett. 89, 241114 (2006).
[Crossref]

K. Preston, B. Schmidt, and M. Lipson, “Polysilicon photonic resonators for large-scale 3D integration of optical networks,” Opt. Express 15, 17283–17290 (2007).
[Crossref] [PubMed]

P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J. M. Fedeli, and L. Di Cioccio, “Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs,” Opt. Express 14, 3864–3871 (2006).
[Crossref]

T. Kitagawa, K. Hattori, M. Shimizu, Y. Ohmori, and M. Kobayashi, “Guided-wave laser based on erbium-doped silica planar lightwave circuit,” Electron. Lett. 27, 334–335 (1991).
[Crossref]

E. Snoeks, G. N. van den Hoven, and A. Polman, “Optimization of an Er-doped silica glass optical waveguide amplifier,” IEEE J. Quantum Electron. 32, 1680–1684 (1996).
[Crossref]

Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low loss (~6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler,” Opt. Express 16, 6425–6432 (2008).
[Crossref] [PubMed]

D. K. Sparacin, S. J. Spector, and L. C. Kimerling, “Silicon waveguide sidewall smoothing by wet chemical oxidation,” J. Lightwave Technol. 23, 2455–2461 (2005).
[Crossref]

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, and A. E. White, “Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics,” in Group IV Photonics (IEEE, 2006), pp.255–257.

D. K. Sparacin, S. J. Spector, and L. C. Kimerling, “Silicon waveguide sidewall smoothing by wet chemical oxidation,” J. Lightwave Technol. 23, 2455–2461 (2005).
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