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One-step integration of metal nanoparticle in photonic crystal nanobeam cavity

Ishita Mukherjee, Ghazal Hajisalem, and Reuven Gordon

Open Access Open Access

Abstract

A single step process of integrating a resonantly tuned silver nanoparticle into photonic crystal nanobeam cavities fabricated by focused ion beam milling is presented. Even though the quality factor of the cavities is reduced by a factor of 20, the emission peak at the cavity resonance is enhanced by 5-fold with respect to the cavities without the metal nanoparticle. The fluorescence is also compared before and after etching away the nanoparticle. Experimental quality factors and wavelength shifts are found to agree reasonably well with simulation values. These results are promising for future single photon emission studies involving the incorporation of quantum dot or NV center emitters into hybrid plasmonic/photonic crystal cavities for enhanced emission rates while retaining reasonably high quality factors.

©2011 Optical Society of America

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Figures (7)
Fig. 1
Fig. 1 Schematic showing the arrangement of the hole radii and periodicities for a four-hole taper beam photonic cavity with the desired location of the metal nanoparticle.

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Fig. 2
Fig. 2 (a) Electric field distribution 5 nm above the nanobeam without the Ag nanoparticle at 602.24 nm (logscale). (b) Electric field distribution inside the cavity with the nanoparticle at 611.14 nm (logscale).

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Fig. 3
Fig. 3 (a) Silver particle after 24 hours of irradiation showed on Si3N4 (b) silver prism after 72 hours of irradiation showed on gold (c) Extinction spectrum of aqueous suspension of silver nanoparticles synthesized in our lab, showing a peak at 610 nm.

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Fig. 4
Fig. 4 SEM image of a FIB fabricated photonic crystal nanobeam cavity on Si3N4. (Inset) Photonic crystal nanobeam cavity showing an ellipsoid nanoparticle at the center.

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Fig. 5
Fig. 5 Schematic showing the fluorescence microscopy setup and the actual laser spot focused at the center of one of the characterized nanobeams.(Inset) Schematic of the laser spot focused off-center on the nanobeam.

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Fig. 6
Fig. 6 (a)Fluorescence emission spectrum and (b) Lorentzian fit on cavities without nanoparticle (blue). (c) Fluorescence emission spectrum and (d) Lorentzian fit on cavities with nanoparticle (red). Data points are shown in black. (e) Linewidth and wavelength of the fabricated cavities without (blue) and with (red) the nanoparticle. (f) Net intensity counts (peak count-average background count) achieved from the cavities at various resonance wavelengths.

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Fig. 7
Fig. 7 Measurements taken from the same cavity before (red) and after (blue) the removal of the nanoparticle. (Inset) Zoom in on the blue curve showing the decreased intensity counts and linewidth compared to the red.

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