Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

P. S. Salter and M. J. Booth, “Addressable microlens array for parallel laser microfabrication,” Opt. Lett. 36(12), 2302–2304 (2011).
[Crossref] [PubMed]

S. H. Kim, I. B. Sohn, and S. Jeong, “Parallel ripple formation during femtosecond laser grooving of ceramic,” Appl. Phys., A Mater. Sci. Process. 103(4), 1053–1057 (2011).
[Crossref]

Y. H. Han and S. L. Qu, “Controllable fabrication of periodic hexagon lattice on glass by interference of three replicas split from single femtosecond laser pulse,” Laser Phys. 19(5), 1067–1071 (2009).
[Crossref]

J. de Boor, N. Geyer, U. Gösele, and V. Schmidt, “Three-beam interference lithography: upgrading a Lloyd’s interferometer for single-exposure hexagonal patterning,” Opt. Lett. 34(12), 1783–1785 (2009).
[Crossref] [PubMed]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16(20), 15942–15948 (2008).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

M. Lei, B. L. Yao, and R. A. Rupp, “Structuring by multi-beam interference using symmetric pyramids,” Opt. Express 14(12), 5803–5811 (2006).
[Crossref] [PubMed]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, “Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8,” Opt. Express 14(17), 7943–7953 (2006).
[Crossref] [PubMed]

N. D. Lai, J. H. Lin, Y. Y. Huang, and C. C. Hsu, “Fabrication of two- and three-dimensional quasi-periodic structures with 12-fold symmetry by interference technique,” Opt. Express 14(22), 10746–10752 (2006).
[Crossref] [PubMed]

A. Lasagni, F. Mücklich, M. R. Nejati, and R. Clasen, “Periodical surface structuring of metals by laser interference metallurgy as a new fabrication method of textured solar selective absorbers,” Adv. Eng. Mater. 8(6), 580–584 (2006).
[Crossref]

S. Yang, J. Ford, C. Ruengruglikit, Q. Huang, and J. Aizenberg, “Synthesis of photoacid crosslinkable hydrogels for the fabrication of soft biomimetic microlens arrays,” J. Mater. Chem. 15(39), 4200–4202 (2005).
[Crossref]

R. C. Gauthier and A. Ivanov, “Production of quasi-crystal template patterns using a dual beam multiple exposure technique,” Opt. Express 12(6), 990–1003 (2004).
[Crossref] [PubMed]

M. J. Escuti and G. P. Crawford, “Holographic photonic crystals,” Opt. Eng. 43(9), 1973–1987 (2004).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

J. H. Klein-Wiele and P. Simon, “Fabrication of periodic nanostructures by phase-controlled multiple-beam interference,” Appl. Phys. Lett. 83(23), 4707–4709 (2003).
[Crossref]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, “Photoinduced permanent gratings inside bulk azodye-doped polymers by the coherent field of a femtosecond laser,” Appl. Phys. Lett. 80(3), 359–361 (2002).
[Crossref]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, “Antireflection microstructures fabricated upon fluorine-doped SiO2 films,” Opt. Lett. 26(21), 1642–1644 (2001).
[Crossref] [PubMed]

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404(6773), 53–56 (2000).
[Crossref] [PubMed]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, “Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses,” Appl. Phys. B 71(1), 119–121 (2000).
[Crossref]

S. Yang, J. Ford, C. Ruengruglikit, Q. Huang, and J. Aizenberg, “Synthesis of photoacid crosslinkable hydrogels for the fabrication of soft biomimetic microlens arrays,” J. Mater. Chem. 15(39), 4200–4202 (2005).
[Crossref]

P. S. Salter and M. J. Booth, “Addressable microlens array for parallel laser microfabrication,” Opt. Lett. 36(12), 2302–2304 (2011).
[Crossref] [PubMed]

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404(6773), 53–56 (2000).
[Crossref] [PubMed]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16(20), 15942–15948 (2008).
[Crossref] [PubMed]

A. Lasagni, F. Mücklich, M. R. Nejati, and R. Clasen, “Periodical surface structuring of metals by laser interference metallurgy as a new fabrication method of textured solar selective absorbers,” Adv. Eng. Mater. 8(6), 580–584 (2006).
[Crossref]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16(20), 15942–15948 (2008).
[Crossref] [PubMed]

M. J. Escuti and G. P. Crawford, “Holographic photonic crystals,” Opt. Eng. 43(9), 1973–1987 (2004).
[Crossref]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

J. de Boor, N. Geyer, U. Gösele, and V. Schmidt, “Three-beam interference lithography: upgrading a Lloyd’s interferometer for single-exposure hexagonal patterning,” Opt. Lett. 34(12), 1783–1785 (2009).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404(6773), 53–56 (2000).
[Crossref] [PubMed]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

M. J. Escuti and G. P. Crawford, “Holographic photonic crystals,” Opt. Eng. 43(9), 1973–1987 (2004).
[Crossref]

S. Yang, J. Ford, C. Ruengruglikit, Q. Huang, and J. Aizenberg, “Synthesis of photoacid crosslinkable hydrogels for the fabrication of soft biomimetic microlens arrays,” J. Mater. Chem. 15(39), 4200–4202 (2005).
[Crossref]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

R. C. Gauthier and A. Ivanov, “Production of quasi-crystal template patterns using a dual beam multiple exposure technique,” Opt. Express 12(6), 990–1003 (2004).
[Crossref] [PubMed]

J. de Boor, N. Geyer, U. Gösele, and V. Schmidt, “Three-beam interference lithography: upgrading a Lloyd’s interferometer for single-exposure hexagonal patterning,” Opt. Lett. 34(12), 1783–1785 (2009).
[Crossref] [PubMed]

J. de Boor, N. Geyer, U. Gösele, and V. Schmidt, “Three-beam interference lithography: upgrading a Lloyd’s interferometer for single-exposure hexagonal patterning,” Opt. Lett. 34(12), 1783–1785 (2009).
[Crossref] [PubMed]

Y. H. Han and S. L. Qu, “Controllable fabrication of periodic hexagon lattice on glass by interference of three replicas split from single femtosecond laser pulse,” Laser Phys. 19(5), 1067–1071 (2009).
[Crossref]

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404(6773), 53–56 (2000).
[Crossref] [PubMed]

Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, “Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses,” Appl. Phys. B 71(1), 119–121 (2000).
[Crossref]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, “Photoinduced permanent gratings inside bulk azodye-doped polymers by the coherent field of a femtosecond laser,” Appl. Phys. Lett. 80(3), 359–361 (2002).
[Crossref]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, “Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses,” Appl. Phys. B 71(1), 119–121 (2000).
[Crossref]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

N. D. Lai, J. H. Lin, Y. Y. Huang, and C. C. Hsu, “Fabrication of two- and three-dimensional quasi-periodic structures with 12-fold symmetry by interference technique,” Opt. Express 14(22), 10746–10752 (2006).
[Crossref] [PubMed]

S. Yang, J. Ford, C. Ruengruglikit, Q. Huang, and J. Aizenberg, “Synthesis of photoacid crosslinkable hydrogels for the fabrication of soft biomimetic microlens arrays,” J. Mater. Chem. 15(39), 4200–4202 (2005).
[Crossref]

N. D. Lai, J. H. Lin, Y. Y. Huang, and C. C. Hsu, “Fabrication of two- and three-dimensional quasi-periodic structures with 12-fold symmetry by interference technique,” Opt. Express 14(22), 10746–10752 (2006).
[Crossref] [PubMed]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

R. C. Gauthier and A. Ivanov, “Production of quasi-crystal template patterns using a dual beam multiple exposure technique,” Opt. Express 12(6), 990–1003 (2004).
[Crossref] [PubMed]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16(20), 15942–15948 (2008).
[Crossref] [PubMed]

S. H. Kim, I. B. Sohn, and S. Jeong, “Parallel ripple formation during femtosecond laser grooving of ceramic,” Appl. Phys., A Mater. Sci. Process. 103(4), 1053–1057 (2011).
[Crossref]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16(20), 15942–15948 (2008).
[Crossref] [PubMed]

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, “Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8,” Opt. Express 14(17), 7943–7953 (2006).
[Crossref] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, “Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses,” Appl. Phys. B 71(1), 119–121 (2000).
[Crossref]

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, “Antireflection microstructures fabricated upon fluorine-doped SiO2 films,” Opt. Lett. 26(21), 1642–1644 (2001).
[Crossref] [PubMed]

S. H. Kim, I. B. Sohn, and S. Jeong, “Parallel ripple formation during femtosecond laser grooving of ceramic,” Appl. Phys., A Mater. Sci. Process. 103(4), 1053–1057 (2011).
[Crossref]

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, “Antireflection microstructures fabricated upon fluorine-doped SiO2 films,” Opt. Lett. 26(21), 1642–1644 (2001).
[Crossref] [PubMed]

J. H. Klein-Wiele and P. Simon, “Fabrication of periodic nanostructures by phase-controlled multiple-beam interference,” Appl. Phys. Lett. 83(23), 4707–4709 (2003).
[Crossref]

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, “Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8,” Opt. Express 14(17), 7943–7953 (2006).
[Crossref] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

N. D. Lai, J. H. Lin, Y. Y. Huang, and C. C. Hsu, “Fabrication of two- and three-dimensional quasi-periodic structures with 12-fold symmetry by interference technique,” Opt. Express 14(22), 10746–10752 (2006).
[Crossref] [PubMed]

A. Lasagni, F. Mücklich, M. R. Nejati, and R. Clasen, “Periodical surface structuring of metals by laser interference metallurgy as a new fabrication method of textured solar selective absorbers,” Adv. Eng. Mater. 8(6), 580–584 (2006).
[Crossref]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

M. Lei, B. L. Yao, and R. A. Rupp, “Structuring by multi-beam interference using symmetric pyramids,” Opt. Express 14(12), 5803–5811 (2006).
[Crossref] [PubMed]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

N. D. Lai, J. H. Lin, Y. Y. Huang, and C. C. Hsu, “Fabrication of two- and three-dimensional quasi-periodic structures with 12-fold symmetry by interference technique,” Opt. Express 14(22), 10746–10752 (2006).
[Crossref] [PubMed]

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, “Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8,” Opt. Express 14(17), 7943–7953 (2006).
[Crossref] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, “Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8,” Opt. Express 14(17), 7943–7953 (2006).
[Crossref] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, “Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8,” Opt. Express 14(17), 7943–7953 (2006).
[Crossref] [PubMed]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, “Antireflection microstructures fabricated upon fluorine-doped SiO2 films,” Opt. Lett. 26(21), 1642–1644 (2001).
[Crossref] [PubMed]

A. Lasagni, F. Mücklich, M. R. Nejati, and R. Clasen, “Periodical surface structuring of metals by laser interference metallurgy as a new fabrication method of textured solar selective absorbers,” Adv. Eng. Mater. 8(6), 580–584 (2006).
[Crossref]

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, “Antireflection microstructures fabricated upon fluorine-doped SiO2 films,” Opt. Lett. 26(21), 1642–1644 (2001).
[Crossref] [PubMed]

A. Lasagni, F. Mücklich, M. R. Nejati, and R. Clasen, “Periodical surface structuring of metals by laser interference metallurgy as a new fabrication method of textured solar selective absorbers,” Adv. Eng. Mater. 8(6), 580–584 (2006).
[Crossref]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, “Antireflection microstructures fabricated upon fluorine-doped SiO2 films,” Opt. Lett. 26(21), 1642–1644 (2001).
[Crossref] [PubMed]

Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, “Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses,” Appl. Phys. B 71(1), 119–121 (2000).
[Crossref]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16(20), 15942–15948 (2008).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, “Photoinduced permanent gratings inside bulk azodye-doped polymers by the coherent field of a femtosecond laser,” Appl. Phys. Lett. 80(3), 359–361 (2002).
[Crossref]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

Y. H. Han and S. L. Qu, “Controllable fabrication of periodic hexagon lattice on glass by interference of three replicas split from single femtosecond laser pulse,” Laser Phys. 19(5), 1067–1071 (2009).
[Crossref]

S. Yang, J. Ford, C. Ruengruglikit, Q. Huang, and J. Aizenberg, “Synthesis of photoacid crosslinkable hydrogels for the fabrication of soft biomimetic microlens arrays,” J. Mater. Chem. 15(39), 4200–4202 (2005).
[Crossref]

M. Lei, B. L. Yao, and R. A. Rupp, “Structuring by multi-beam interference using symmetric pyramids,” Opt. Express 14(12), 5803–5811 (2006).
[Crossref] [PubMed]

P. S. Salter and M. J. Booth, “Addressable microlens array for parallel laser microfabrication,” Opt. Lett. 36(12), 2302–2304 (2011).
[Crossref] [PubMed]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, “Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses,” Appl. Phys. B 71(1), 119–121 (2000).
[Crossref]

J. de Boor, N. Geyer, U. Gösele, and V. Schmidt, “Three-beam interference lithography: upgrading a Lloyd’s interferometer for single-exposure hexagonal patterning,” Opt. Lett. 34(12), 1783–1785 (2009).
[Crossref] [PubMed]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404(6773), 53–56 (2000).
[Crossref] [PubMed]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, “Photoinduced permanent gratings inside bulk azodye-doped polymers by the coherent field of a femtosecond laser,” Appl. Phys. Lett. 80(3), 359–361 (2002).
[Crossref]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, “Photoinduced permanent gratings inside bulk azodye-doped polymers by the coherent field of a femtosecond laser,” Appl. Phys. Lett. 80(3), 359–361 (2002).
[Crossref]

J. H. Klein-Wiele and P. Simon, “Fabrication of periodic nanostructures by phase-controlled multiple-beam interference,” Appl. Phys. Lett. 83(23), 4707–4709 (2003).
[Crossref]

S. H. Kim, I. B. Sohn, and S. Jeong, “Parallel ripple formation during femtosecond laser grooving of ceramic,” Appl. Phys., A Mater. Sci. Process. 103(4), 1053–1057 (2011).
[Crossref]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404(6773), 53–56 (2000).
[Crossref] [PubMed]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16(20), 15942–15948 (2008).
[Crossref] [PubMed]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

S. Yang, J. Ford, C. Ruengruglikit, Q. Huang, and J. Aizenberg, “Synthesis of photoacid crosslinkable hydrogels for the fabrication of soft biomimetic microlens arrays,” J. Mater. Chem. 15(39), 4200–4202 (2005).
[Crossref]

M. Lei, B. L. Yao, and R. A. Rupp, “Structuring by multi-beam interference using symmetric pyramids,” Opt. Express 14(12), 5803–5811 (2006).
[Crossref] [PubMed]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, “Photoinduced permanent gratings inside bulk azodye-doped polymers by the coherent field of a femtosecond laser,” Appl. Phys. Lett. 80(3), 359–361 (2002).
[Crossref]

A. Lasagni, F. Mücklich, M. R. Nejati, and R. Clasen, “Periodical surface structuring of metals by laser interference metallurgy as a new fabrication method of textured solar selective absorbers,” Adv. Eng. Mater. 8(6), 580–584 (2006).
[Crossref]

K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, “Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses,” Appl. Phys. B 71(1), 119–121 (2000).
[Crossref]

J. H. Klein-Wiele and P. Simon, “Fabrication of periodic nanostructures by phase-controlled multiple-beam interference,” Appl. Phys. Lett. 83(23), 4707–4709 (2003).
[Crossref]

J. Si, J. Qiu, J. Zhai, Y. Shen, and K. Hirao, “Photoinduced permanent gratings inside bulk azodye-doped polymers by the coherent field of a femtosecond laser,” Appl. Phys. Lett. 80(3), 359–361 (2002).
[Crossref]

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside soda–lime glass with femtosecond laser pulses,” Appl. Phys. Lett. 80(9), 1508–1510 (2002).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals,” Appl. Phys. Lett. 79(6), 725–727 (2001).
[Crossref]

T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, “Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses,” Appl. Phys. Lett. 82(17), 2758–2760 (2003).
[Crossref]

Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, D. Suzuki, and S. Hasegawa, “Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing,” Appl. Phys., A Mater. Sci. Process. 107(2), 357–362 (2012).
[Crossref]

S. H. Kim, I. B. Sohn, and S. Jeong, “Parallel ripple formation during femtosecond laser grooving of ceramic,” Appl. Phys., A Mater. Sci. Process. 103(4), 1053–1057 (2011).
[Crossref]

Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. P. Edwardson, M. Padgett, G. Dearden, and K. G. Watkins, “High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator,” Appl. Surf. Sci. 255(5), 2284–2289 (2008).
[Crossref]

S. Yang, J. Ford, C. Ruengruglikit, Q. Huang, and J. Aizenberg, “Synthesis of photoacid crosslinkable hydrogels for the fabrication of soft biomimetic microlens arrays,” J. Mater. Chem. 15(39), 4200–4202 (2005).
[Crossref]

Y. H. Han and S. L. Qu, “Controllable fabrication of periodic hexagon lattice on glass by interference of three replicas split from single femtosecond laser pulse,” Laser Phys. 19(5), 1067–1071 (2009).
[Crossref]

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404(6773), 53–56 (2000).
[Crossref] [PubMed]

M. J. Escuti and G. P. Crawford, “Holographic photonic crystals,” Opt. Eng. 43(9), 1973–1987 (2004).
[Crossref]

H. Misawa, T. Kondo, S. Juodkazis, V. Mizeikis, and S. Matsuo, “Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8,” Opt. Express 14(17), 7943–7953 (2006).
[Crossref] [PubMed]

M. Lei, B. L. Yao, and R. A. Rupp, “Structuring by multi-beam interference using symmetric pyramids,” Opt. Express 14(12), 5803–5811 (2006).
[Crossref] [PubMed]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16(20), 15942–15948 (2008).
[Crossref] [PubMed]

R. C. Gauthier and A. Ivanov, “Production of quasi-crystal template patterns using a dual beam multiple exposure technique,” Opt. Express 12(6), 990–1003 (2004).
[Crossref] [PubMed]

N. D. Lai, J. H. Lin, Y. Y. Huang, and C. C. Hsu, “Fabrication of two- and three-dimensional quasi-periodic structures with 12-fold symmetry by interference technique,” Opt. Express 14(22), 10746–10752 (2006).
[Crossref] [PubMed]

S. Hasegawa, Y. Hayasaki, and N. Nishida, “Holographic femtosecond laser processing with multiplexed phase Fresnel lenses,” Opt. Lett. 31(11), 1705–1707 (2006).
[Crossref] [PubMed]

P. S. Salter and M. J. Booth, “Addressable microlens array for parallel laser microfabrication,” Opt. Lett. 36(12), 2302–2304 (2011).
[Crossref] [PubMed]

K. Kintaka, J. Nishii, A. Mizutani, H. Kikuta, and H. Nakano, “Antireflection microstructures fabricated upon fluorine-doped SiO2 films,” Opt. Lett. 26(21), 1642–1644 (2001).
[Crossref] [PubMed]

X. Jia, T. Q. Jia, L. E. Ding, P. X. Xiong, L. Deng, Z. R. Sun, Z. G. Wang, J. R. Qiu, and Z. Z. Xu, “Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams,” Opt. Lett. 34(6), 788–790 (2009).
[Crossref] [PubMed]

J. de Boor, N. Geyer, U. Gösele, and V. Schmidt, “Three-beam interference lithography: upgrading a Lloyd’s interferometer for single-exposure hexagonal patterning,” Opt. Lett. 34(12), 1783–1785 (2009).
[Crossref] [PubMed]

J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Domann, J. Schulz, C. Cronauer, L. Fröhlich, and M. Popall, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” Opt. Lett. 28(5), 301–303 (2003).
[Crossref] [PubMed]