Abstract

Ultra-short pulsed laser processing is a potent tool for microstructuring of a lot of materials. At certain laser parameters, particular periodical and/or quasi-periodical µm-size surface structures evolve apparently during processing. With extended plasmonics theory, it is possible to predict the structure formation, and a systematic technology can be derived to alter the surface for laser processing. In this work, we have demonstrated the modification of the laser processing with applying tailored dynamic surface electro-magnetic fields. Possible improvement in applications is seen in the fields of process efficiency of laser ablation and a superior control of the surface topography.

© 2016 Optical Society of America

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References

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  1. D. Abramov, A. Galkin, M. Gerke, S. Zhirnova, and E. Shamanskaya, “Femtosecond laser-induced formation of surface structures on Silicon and glassy Carbon surfaces,” Phys. Procedia 12, 24–28 (2011).
    [Crossref]
  2. N. Bärsch, K. Körber, A. Ostendorf, and K. Tönshoff, “Ablation and cutting of planar silicon devices using femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 77-2, 237–242 (2003).
  3. J. Eichstädt, G. Römer, and A. J. H. Veld, “Towards friction control using laser-induced periodic Surface Structures,” Phys. Procedia 12, 7–15 (2011).
    [Crossref]
  4. P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
    [Crossref]
  5. S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
    [Crossref]
  6. C. Föhl and F. Dausinger, “High precision deep drilling with ultrashort pulses,” Proc. SPIE 5063, 346 (2003).
    [Crossref]
  7. A. Ostendorf and A. Schoonderbeek, “Lasers in energy device manufacturing,” Proc. SPIE 6880, 68800B (2008).
  8. J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
    [Crossref]
  9. L. Dobrzanski and A. Drygala, “Surface texturing of multicrystalline silicon solar cells,” J Achievements Mater. Manuf. Eng. 31-1, 77–82 (2008).
  10. A. Schoonderbeek, V. Schütz, O. Haupt, and U. Stute, “Laser processing of thin films for photovoltaic applications,” J. Laser Micro Nanoeng. 5(3), 248–255 (2010).
    [Crossref]
  11. L. Overmeyer, J. F. Duesing, O. Suttmann, and U. Stute, “Laser patterning of thin film sensors on 3-D surfaces,” CIRP Ann-Manuf. Technol. 61-1, 215–218 (2012).
  12. O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
    [Crossref]
  13. H. Räther, Surface Plasmons on Smooth Surfaces (Springer, 1988).
  14. J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” Appl. Phys. (Berl.) 106(10), 104910 (2009).
    [Crossref]
  15. L. Overmeyer, V. Schütz, A. Horn, and U. Stute, “Laser induced quasi-periodical microstructures with external field modulation for efficiency gain in photovoltaics,” CIRP Ann-Manuf. Technol. 62-1, 207–210 (2013).
  16. V. Schütz, Gesteuerte Laserinduzierte Mikrostrukturen zur Beeinflussung des Reflexionsgrades von Halbleitern (PZH-Verlag, 2015).
  17. A. Michalowski, Untersuchungen zur Mikrobearbeitung von Stahl mit ultrakurzen Laserpulsen (Herbert Utz Verlag, 2014).

2013 (1)

L. Overmeyer, V. Schütz, A. Horn, and U. Stute, “Laser induced quasi-periodical microstructures with external field modulation for efficiency gain in photovoltaics,” CIRP Ann-Manuf. Technol. 62-1, 207–210 (2013).

2012 (2)

L. Overmeyer, J. F. Duesing, O. Suttmann, and U. Stute, “Laser patterning of thin film sensors on 3-D surfaces,” CIRP Ann-Manuf. Technol. 61-1, 215–218 (2012).

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

2011 (2)

D. Abramov, A. Galkin, M. Gerke, S. Zhirnova, and E. Shamanskaya, “Femtosecond laser-induced formation of surface structures on Silicon and glassy Carbon surfaces,” Phys. Procedia 12, 24–28 (2011).
[Crossref]

J. Eichstädt, G. Römer, and A. J. H. Veld, “Towards friction control using laser-induced periodic Surface Structures,” Phys. Procedia 12, 7–15 (2011).
[Crossref]

2010 (1)

A. Schoonderbeek, V. Schütz, O. Haupt, and U. Stute, “Laser processing of thin films for photovoltaic applications,” J. Laser Micro Nanoeng. 5(3), 248–255 (2010).
[Crossref]

2009 (2)

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” Appl. Phys. (Berl.) 106(10), 104910 (2009).
[Crossref]

S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
[Crossref]

2008 (3)

L. Dobrzanski and A. Drygala, “Surface texturing of multicrystalline silicon solar cells,” J Achievements Mater. Manuf. Eng. 31-1, 77–82 (2008).

A. Ostendorf and A. Schoonderbeek, “Lasers in energy device manufacturing,” Proc. SPIE 6880, 68800B (2008).

O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
[Crossref]

2007 (1)

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

2003 (2)

N. Bärsch, K. Körber, A. Ostendorf, and K. Tönshoff, “Ablation and cutting of planar silicon devices using femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 77-2, 237–242 (2003).

C. Föhl and F. Dausinger, “High precision deep drilling with ultrashort pulses,” Proc. SPIE 5063, 346 (2003).
[Crossref]

Abramov, D.

D. Abramov, A. Galkin, M. Gerke, S. Zhirnova, and E. Shamanskaya, “Femtosecond laser-induced formation of surface structures on Silicon and glassy Carbon surfaces,” Phys. Procedia 12, 24–28 (2011).
[Crossref]

Bärsch, N.

N. Bärsch, K. Körber, A. Ostendorf, and K. Tönshoff, “Ablation and cutting of planar silicon devices using femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 77-2, 237–242 (2003).

Bonse, J.

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” Appl. Phys. (Berl.) 106(10), 104910 (2009).
[Crossref]

Brendel, R.

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Bruns, M.

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Chichkov, B. N.

S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
[Crossref]

Dausinger, F.

C. Föhl and F. Dausinger, “High precision deep drilling with ultrashort pulses,” Proc. SPIE 5063, 346 (2003).
[Crossref]

Dobrzanski, L.

L. Dobrzanski and A. Drygala, “Surface texturing of multicrystalline silicon solar cells,” J Achievements Mater. Manuf. Eng. 31-1, 77–82 (2008).

Drygala, A.

L. Dobrzanski and A. Drygala, “Surface texturing of multicrystalline silicon solar cells,” J Achievements Mater. Manuf. Eng. 31-1, 77–82 (2008).

Duesing, J. F.

L. Overmeyer, J. F. Duesing, O. Suttmann, and U. Stute, “Laser patterning of thin film sensors on 3-D surfaces,” CIRP Ann-Manuf. Technol. 61-1, 215–218 (2012).

Eichstädt, J.

J. Eichstädt, G. Römer, and A. J. H. Veld, “Towards friction control using laser-induced periodic Surface Structures,” Phys. Procedia 12, 7–15 (2011).
[Crossref]

Engelhart, P.

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Fadeeva, E.

S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
[Crossref]

Föhl, C.

C. Föhl and F. Dausinger, “High precision deep drilling with ultrashort pulses,” Proc. SPIE 5063, 346 (2003).
[Crossref]

Galkin, A.

D. Abramov, A. Galkin, M. Gerke, S. Zhirnova, and E. Shamanskaya, “Femtosecond laser-induced formation of surface structures on Silicon and glassy Carbon surfaces,” Phys. Procedia 12, 24–28 (2011).
[Crossref]

Gerke, M.

D. Abramov, A. Galkin, M. Gerke, S. Zhirnova, and E. Shamanskaya, “Femtosecond laser-induced formation of surface structures on Silicon and glassy Carbon surfaces,” Phys. Procedia 12, 24–28 (2011).
[Crossref]

Grischke, R.

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Guo, C.

S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
[Crossref]

Haupt, O.

A. Schoonderbeek, V. Schütz, O. Haupt, and U. Stute, “Laser processing of thin films for photovoltaic applications,” J. Laser Micro Nanoeng. 5(3), 248–255 (2010).
[Crossref]

O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
[Crossref]

Hermann, S.

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Horn, A.

L. Overmeyer, V. Schütz, A. Horn, and U. Stute, “Laser induced quasi-periodical microstructures with external field modulation for efficiency gain in photovoltaics,” CIRP Ann-Manuf. Technol. 62-1, 207–210 (2013).

Kling, R.

O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
[Crossref]

Klug, U.

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Koch, J.

S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
[Crossref]

Kohler, R.

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Körber, K.

N. Bärsch, K. Körber, A. Ostendorf, and K. Tönshoff, “Ablation and cutting of planar silicon devices using femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 77-2, 237–242 (2003).

Krüger, J.

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” Appl. Phys. (Berl.) 106(10), 104910 (2009).
[Crossref]

Meyer, R.

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Neubert, T.

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Ostendorf, A.

A. Ostendorf and A. Schoonderbeek, “Lasers in energy device manufacturing,” Proc. SPIE 6880, 68800B (2008).

O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
[Crossref]

N. Bärsch, K. Körber, A. Ostendorf, and K. Tönshoff, “Ablation and cutting of planar silicon devices using femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 77-2, 237–242 (2003).

Overmeyer, L.

L. Overmeyer, V. Schütz, A. Horn, and U. Stute, “Laser induced quasi-periodical microstructures with external field modulation for efficiency gain in photovoltaics,” CIRP Ann-Manuf. Technol. 62-1, 207–210 (2013).

L. Overmeyer, J. F. Duesing, O. Suttmann, and U. Stute, “Laser patterning of thin film sensors on 3-D surfaces,” CIRP Ann-Manuf. Technol. 61-1, 215–218 (2012).

Pfleging, W.

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Plagwitz, H.

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Pröll, J.

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Przybylski, M.

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Richter, L.

O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
[Crossref]

Römer, G.

J. Eichstädt, G. Römer, and A. J. H. Veld, “Towards friction control using laser-induced periodic Surface Structures,” Phys. Procedia 12, 7–15 (2011).
[Crossref]

Rosenfeld, A.

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” Appl. Phys. (Berl.) 106(10), 104910 (2009).
[Crossref]

Schlie, S.

S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
[Crossref]

Schoonderbeek, A.

A. Schoonderbeek, V. Schütz, O. Haupt, and U. Stute, “Laser processing of thin films for photovoltaic applications,” J. Laser Micro Nanoeng. 5(3), 248–255 (2010).
[Crossref]

O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
[Crossref]

A. Ostendorf and A. Schoonderbeek, “Lasers in energy device manufacturing,” Proc. SPIE 6880, 68800B (2008).

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Schütz, V.

L. Overmeyer, V. Schütz, A. Horn, and U. Stute, “Laser induced quasi-periodical microstructures with external field modulation for efficiency gain in photovoltaics,” CIRP Ann-Manuf. Technol. 62-1, 207–210 (2013).

A. Schoonderbeek, V. Schütz, O. Haupt, and U. Stute, “Laser processing of thin films for photovoltaic applications,” J. Laser Micro Nanoeng. 5(3), 248–255 (2010).
[Crossref]

Seifert, H.

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Shamanskaya, E.

D. Abramov, A. Galkin, M. Gerke, S. Zhirnova, and E. Shamanskaya, “Femtosecond laser-induced formation of surface structures on Silicon and glassy Carbon surfaces,” Phys. Procedia 12, 24–28 (2011).
[Crossref]

Siegel, F.

O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
[Crossref]

Stute, U.

L. Overmeyer, V. Schütz, A. Horn, and U. Stute, “Laser induced quasi-periodical microstructures with external field modulation for efficiency gain in photovoltaics,” CIRP Ann-Manuf. Technol. 62-1, 207–210 (2013).

L. Overmeyer, J. F. Duesing, O. Suttmann, and U. Stute, “Laser patterning of thin film sensors on 3-D surfaces,” CIRP Ann-Manuf. Technol. 61-1, 215–218 (2012).

A. Schoonderbeek, V. Schütz, O. Haupt, and U. Stute, “Laser processing of thin films for photovoltaic applications,” J. Laser Micro Nanoeng. 5(3), 248–255 (2010).
[Crossref]

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Suttmann, O.

L. Overmeyer, J. F. Duesing, O. Suttmann, and U. Stute, “Laser patterning of thin film sensors on 3-D surfaces,” CIRP Ann-Manuf. Technol. 61-1, 215–218 (2012).

Tönshoff, K.

N. Bärsch, K. Körber, A. Ostendorf, and K. Tönshoff, “Ablation and cutting of planar silicon devices using femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 77-2, 237–242 (2003).

Torge, M.

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Ulrich, S.

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Veld, A. J. H.

J. Eichstädt, G. Römer, and A. J. H. Veld, “Towards friction control using laser-induced periodic Surface Structures,” Phys. Procedia 12, 7–15 (2011).
[Crossref]

Vorobyev, A. Y.

S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
[Crossref]

Zhirnova, S.

D. Abramov, A. Galkin, M. Gerke, S. Zhirnova, and E. Shamanskaya, “Femtosecond laser-induced formation of surface structures on Silicon and glassy Carbon surfaces,” Phys. Procedia 12, 24–28 (2011).
[Crossref]

Appl. Phys. (Berl.) (1)

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” Appl. Phys. (Berl.) 106(10), 104910 (2009).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (1)

N. Bärsch, K. Körber, A. Ostendorf, and K. Tönshoff, “Ablation and cutting of planar silicon devices using femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 77-2, 237–242 (2003).

CIRP Ann-Manuf. Technol. (2)

L. Overmeyer, V. Schütz, A. Horn, and U. Stute, “Laser induced quasi-periodical microstructures with external field modulation for efficiency gain in photovoltaics,” CIRP Ann-Manuf. Technol. 62-1, 207–210 (2013).

L. Overmeyer, J. F. Duesing, O. Suttmann, and U. Stute, “Laser patterning of thin film sensors on 3-D surfaces,” CIRP Ann-Manuf. Technol. 61-1, 215–218 (2012).

Contact Angle Wettability Adhesion (1)

S. Schlie, A. Y. Vorobyev, B. N. Chichkov, E. Fadeeva, C. Guo, and J. Koch, “Femtosecond laser-induced surface structures on platinum and their effects on surface wettability and fibroblast cell proliferation,” Contact Angle Wettability Adhesion 6, 163–172 (2009).
[Crossref]

J Achievements Mater. Manuf. Eng. (1)

L. Dobrzanski and A. Drygala, “Surface texturing of multicrystalline silicon solar cells,” J Achievements Mater. Manuf. Eng. 31-1, 77–82 (2008).

J. Laser Micro Nanoeng. (2)

A. Schoonderbeek, V. Schütz, O. Haupt, and U. Stute, “Laser processing of thin films for photovoltaic applications,” J. Laser Micro Nanoeng. 5(3), 248–255 (2010).
[Crossref]

O. Haupt, F. Siegel, A. Schoonderbeek, L. Richter, R. Kling, and A. Ostendorf, “Laser dicing of silicon: comparison of ablation mechanisms with a novel technology of thermally induced stress,” J. Laser Micro Nanoeng. 3(3), 135–140 (2008).
[Crossref]

Phys. Procedia (2)

D. Abramov, A. Galkin, M. Gerke, S. Zhirnova, and E. Shamanskaya, “Femtosecond laser-induced formation of surface structures on Silicon and glassy Carbon surfaces,” Phys. Procedia 12, 24–28 (2011).
[Crossref]

J. Eichstädt, G. Römer, and A. J. H. Veld, “Towards friction control using laser-induced periodic Surface Structures,” Phys. Procedia 12, 7–15 (2011).
[Crossref]

Proc. SPIE (3)

C. Föhl and F. Dausinger, “High precision deep drilling with ultrashort pulses,” Proc. SPIE 5063, 346 (2003).
[Crossref]

A. Ostendorf and A. Schoonderbeek, “Lasers in energy device manufacturing,” Proc. SPIE 6880, 68800B (2008).

J. Pröll, R. Kohler, M. Torge, M. Bruns, M. Przybylski, S. Ulrich, H. Seifert, and W. Pfleging, “Laser adjusted three-dimensional Li-Mn-O cathode architectures for secondary lithium-ion cells,” Proc. SPIE 8244, 82440S (2012).
[Crossref]

Prog. Photovolt. Res. Appl. (1)

P. Engelhart, S. Hermann, T. Neubert, H. Plagwitz, R. Grischke, R. Meyer, U. Klug, A. Schoonderbeek, U. Stute, and R. Brendel, “Laser ablation of SiO2 for locally contacted Si solar cells with ultra-short pulses,” Prog. Photovolt. Res. Appl. 15(6), 521–527 (2007).
[Crossref]

Other (3)

H. Räther, Surface Plasmons on Smooth Surfaces (Springer, 1988).

V. Schütz, Gesteuerte Laserinduzierte Mikrostrukturen zur Beeinflussung des Reflexionsgrades von Halbleitern (PZH-Verlag, 2015).

A. Michalowski, Untersuchungen zur Mikrobearbeitung von Stahl mit ultrakurzen Laserpulsen (Herbert Utz Verlag, 2014).

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Figures (16)
Fig. 1
Fig. 1 Surface plasmon polariton at the boundary of a two layer system with the dielectric constants ε1 and ε2; schematic illustration of the electric charges ( + -); Hy y-component of the magnetic field; E and arrows direction of the electrical field of the p-polarized wave [13].

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Fig. 2
Fig. 2 Laser caustic and intensity distribution in focal position.

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Fig. 3
Fig. 3 Left: Complete magnetron setup with the magnetron (M), the waveguide (V), the process chamber (P), and the water load (W); the water load is used to absorb the transmitted microwave power; Right: Process chamber, the laser radiation is coupled into the top pipe and the ablation debris is vacuumed by an external suction unit.

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Fig. 4
Fig. 4 Additional electromagnetic field Eadd with respect to the laser processed sample at two different views; the laser polarization is oriented parallel with respect to the electric field of microwave electric field; the laser scanning direction is shown exemplary in x-direction, described further with vx, orthogonal scanning described further with vy.

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Fig. 5
Fig. 5 Additional microwave electromagnetic field in the process chamber (red rectangle); left: electric field Eadd; right: magnetic field Hadd.

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Fig. 6
Fig. 6 Analysis scheme of quasi-periodical surface structures.

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Fig. 7
Fig. 7 a) Laser processed steel sample with different laser parameters; different structures are formed, represented by the different macroscopic appearance by their colors; b) laser structured field at Φ = 883 mJ/cm2 at 400 number of pulses per point with scanning direction vy; SEM image.

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Fig. 8
Fig. 8 Average cone distance Λ as a function of the laser fluence Φ; blue dots: scanning direction vx at Nppp = 400; red dots: scanning direction vy at Nppp = 400; black dots: scanning direction vx at Nppp = 200; green dots: scanning direction vy at Nppp = 200; lines to guide the eye.

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Fig. 9
Fig. 9 Laser processed steel surface with Φ = 1000 mJ/cm2 at 100 number of pulses per point with scanning direction vx; a) without an additional field; b) with an additional electromagnetic field, average cone distance Λ ≈3.8 µm; field characteristics are shown in Fig. 4; SEM image.

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Fig. 10
Fig. 10 Average cone distance Λ as a function of the laser fluence Φ at Nppp = 200; blue dots: scanning direction vx with Eadd = 27 kV/m; red dots: scanning direction vy with Eadd = 27 kV/m; black dots: scanning direction vx with Eadd = 0 kV/m; green dots: scanning direction vy with Eadd = 0 kV/m; lines to guide the eye.

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Fig. 11
Fig. 11 Average cone distance Λ as a function of the laser fluence Φ at Nppp = 400; blue dots: scanning direction vy with Eadd = 27 kV/m; red dots: scanning direction vx with Eadd = 27 kV/m; black dots: scanning direction vx with Eadd = 0 kV/m; green dots: scanning direction vy with Eadd = 0 kV/m; lines to guide the eye.

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Fig. 12
Fig. 12 Laser processed steel surface with Φ = 880 mJ/cm2 at 400 number of pulses per point with scanning direction vy; a) without an additional field, average cone distance Λ ≈8.0 µm; b) with an additional electromagnetic field, average cone distance Λ ≈10.3 µm; field characteristics are shown in Fig. 4; SEM image.

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Fig. 13
Fig. 13 Laser processed iron surface with Φ = 1130 mJ/cm2 at 400 number of pulses per point; a) without an additional field with scanning direction vx, average cone distance Λ ≈7.4 µm; b) with an additional electromagnetic field; field characteristics are shown in Fig. 4; SEM image.

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Fig. 14
Fig. 14 Laser processed aluminum surface; a and c) without an additional field; b and d) with an additional electromagnetic field; a and b) with scanning direction vy; c and d) with scanning direction vx; field characteristics are shown in Fig. 4; SEM image.

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Fig. 15
Fig. 15 Laser processed copper surface at different laser parameters with scanning direction vx; average ripple distance Λ ≈380 nm; a and c) without an additional field; b and d) with an additional electromagnetic field; field characteristics are shown in Fig. 4; SEM image.

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Fig. 16
Fig. 16 Laser processed silicon surface at different laser fluences at 100 pulses per point; additional contact E-field; left groove of each doublet without an additional field, right with an additional contact E-field of Eadd = 16 kV/m; SEM image.

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Equations (3)

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L i = ( 1 a p n ( ε 1 ´ ) 2 ( ε 1 ´ ⋅ ε 2 ´ ε 1 ´ + ε 2 ´ ) ) − 1
∇ × H → = j → f r e e + ∂ D → ∂ t
∇ × H → = µ ε ∂ E → ∂ t

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