Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

W.-C. Chen, T.-J. Wu, W.-J. Wu, and G.-D. J. Su, “Fabrication of inkjet-printed SU-8 photoresist microlenses using hydrophilic confinement,” J. Micromech. Microeng. 23(6), 065008 (2013).
[Crossref]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

B. Jiri Cech, H. Pranov, G. Kofod, M. Matschuk, S. Murthy, and R. Taboryski, “Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow,” Appl. Surf. Sci. 280, 424–430 (2013).
[Crossref]

B. McCall and T. S. Tkaczyk, “Rapid fabrication of miniature lens arrays by four-axis single point diamond machining,” Opt. Express 21(3), 3557–3572 (2013).
[Crossref] [PubMed]

Y. Zhao, W. M. Huang, and C. C. Wang, “Thermo/chemo-responsive shape memory effect for micro/nano patterning atop polymers,” Nanosci. Nanotechnol. Lett. 4(9), 862–878 (2012).
[Crossref]

R. K. Jena, C. Y. Yue, Y. C. Lam, P. S. Tang, and A. Gupta, “Comparison of different molds (epoxy, polymer and silicon) for microfabrication by hot embossing technique,” Sens. Actuators B Chem. 163(1), 233–241 (2012).
[Crossref]

V. N. Goral, Y.-C. Hsieh, O. N. Petzold, R. A. Faris, and P. K. Yuen, “Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds,” J. Micromech. Microeng. 21(1), 017002 (2011).
[Crossref]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

Y. Zhao, C. C. Wang, W. M. Huang, H. Purnawali, and L. An, “Formation of micro protrusive lens arrays atop poly(methyl methacrylate),” Opt. Express 19(27), 26000–26005 (2011).
[Crossref] [PubMed]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

B. McCall and T. S. Tkaczyk, “Fabrication of plastic microlens array for array microscopy by three-dimensional diamond micromilling,” Opt. Eng. 49(10), 103401 (2010).
[Crossref] [PubMed]

H. M. Leung, G. Zhou, H. Yu, F. S. Chau, and A. S. Kumar, “Diamond turning and soft lithography processes for liquid tunable lenses,” J. Micromech. Microeng. 20(2), 025021 (2010).
[Crossref]

E. Roy, B. Voisin, J. F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, “Microlens array fabrication by enhanced thermal reflow process: towards efficient collection of fluorescence light from microarrays,” Microelectron. Eng. 86(11), 2255–2261 (2009).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3–4), 339–342 (2007).

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi, “Fabrication of three-dimensional microstructure using maskless gray-scale lithography,” Sens. Actuators A Phys. 130–131, 387–392 (2006).
[Crossref]

A. Y. Yi and L. Li, “Design and fabrication of a microlens array by use of a slow tool servo,” Opt. Lett. 30(13), 1707–1709 (2005).
[Crossref] [PubMed]

P. Schreiber, S. Kudaev, P. Dannberg, and U. D. Zeitner, “Homogeneous LED-illumination using microlens arrays,” Proc. SPIE 5942, 59420K (2005).
[Crossref]

T. J. Suleski and R. D. Te Kolste, “Fabrication trends for free-space microoptics,” J. Lightwave Technol. 23(2), 633–646 (2005).
[Crossref]

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

J. Rogers, A. Kärkkäinen, T. Tkaczyk, J. Rantala, and M. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004).
[Crossref] [PubMed]

B. K. Lee, D. S. Kim, and T. H. Kwon, “Replication of microlens arrays by injection molding,” Microsyst. Technol. 10(6–7), 531–535 (2004).
[Crossref]

S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D Appl. Phys. 36(20), 2451–2456 (2003).
[Crossref]

K. Naessens, H. Ottevaere, R. Baets, P. Van Daele, and H. Thienpont, “Direct writing of microlenses in polycarbonate with excimer laser ablation,” Appl. Opt. 42(31), 6349–6359 (2003).
[Crossref] [PubMed]

S. Möller and S. R. Forrest, “Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays,” J. Appl. Phys. 91(5), 3324–3327 (2002).
[Crossref]

D. Meister and O. World, “Methods for estimating lens thickness,” Opt. World 26(201), 1–5 (1997).

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1(8), 759–766 (1990).
[Crossref]

Y. Zhao, C. C. Wang, W. M. Huang, H. Purnawali, and L. An, “Formation of micro protrusive lens arrays atop poly(methyl methacrylate),” Opt. Express 19(27), 26000–26005 (2011).
[Crossref] [PubMed]

K. Naessens, H. Ottevaere, R. Baets, P. Van Daele, and H. Thienpont, “Direct writing of microlenses in polycarbonate with excimer laser ablation,” Appl. Opt. 42(31), 6349–6359 (2003).
[Crossref] [PubMed]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

E. Roy, B. Voisin, J. F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, “Microlens array fabrication by enhanced thermal reflow process: towards efficient collection of fluorescence light from microarrays,” Microelectron. Eng. 86(11), 2255–2261 (2009).
[Crossref]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

M. Chakrabarti, A. Thorseth, J. Jepsen, D. D. Corell, and C. Dam-Hansen, “Color control for tunable white LED lighting system,” Opt. Eng.in press.

M. Chakrabarti, H. C. Pedersen, P. B. Poulsen, and C. Dam-Hansen, “C., “Focusable, color tunable white and efficient LED stage lighting,” Opt. Eng.in press.

H. M. Leung, G. Zhou, H. Yu, F. S. Chau, and A. S. Kumar, “Diamond turning and soft lithography processes for liquid tunable lenses,” J. Micromech. Microeng. 20(2), 025021 (2010).
[Crossref]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

W.-C. Chen, T.-J. Wu, W.-J. Wu, and G.-D. J. Su, “Fabrication of inkjet-printed SU-8 photoresist microlenses using hydrophilic confinement,” J. Micromech. Microeng. 23(6), 065008 (2013).
[Crossref]

Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3–4), 339–342 (2007).

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

M. Chakrabarti, A. Thorseth, J. Jepsen, D. D. Corell, and C. Dam-Hansen, “Color control for tunable white LED lighting system,” Opt. Eng.in press.

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1(8), 759–766 (1990).
[Crossref]

M. Chakrabarti, H. C. Pedersen, P. B. Poulsen, and C. Dam-Hansen, “C., “Focusable, color tunable white and efficient LED stage lighting,” Opt. Eng.in press.

M. Chakrabarti, A. Thorseth, J. Jepsen, D. D. Corell, and C. Dam-Hansen, “Color control for tunable white LED lighting system,” Opt. Eng.in press.

P. Schreiber, S. Kudaev, P. Dannberg, and U. D. Zeitner, “Homogeneous LED-illumination using microlens arrays,” Proc. SPIE 5942, 59420K (2005).
[Crossref]

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1(8), 759–766 (1990).
[Crossref]

Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

J. Rogers, A. Kärkkäinen, T. Tkaczyk, J. Rantala, and M. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004).
[Crossref] [PubMed]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi, “Fabrication of three-dimensional microstructure using maskless gray-scale lithography,” Sens. Actuators A Phys. 130–131, 387–392 (2006).
[Crossref]

Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

V. N. Goral, Y.-C. Hsieh, O. N. Petzold, R. A. Faris, and P. K. Yuen, “Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds,” J. Micromech. Microeng. 21(1), 017002 (2011).
[Crossref]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

S. Möller and S. R. Forrest, “Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays,” J. Appl. Phys. 91(5), 3324–3327 (2002).
[Crossref]

K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi, “Fabrication of three-dimensional microstructure using maskless gray-scale lithography,” Sens. Actuators A Phys. 130–131, 387–392 (2006).
[Crossref]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

V. N. Goral, Y.-C. Hsieh, O. N. Petzold, R. A. Faris, and P. K. Yuen, “Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds,” J. Micromech. Microeng. 21(1), 017002 (2011).
[Crossref]

E. Roy, B. Voisin, J. F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, “Microlens array fabrication by enhanced thermal reflow process: towards efficient collection of fluorescence light from microarrays,” Microelectron. Eng. 86(11), 2255–2261 (2009).
[Crossref]

R. K. Jena, C. Y. Yue, Y. C. Lam, P. S. Tang, and A. Gupta, “Comparison of different molds (epoxy, polymer and silicon) for microfabrication by hot embossing technique,” Sens. Actuators B Chem. 163(1), 233–241 (2012).
[Crossref]

Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

V. N. Goral, Y.-C. Hsieh, O. N. Petzold, R. A. Faris, and P. K. Yuen, “Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds,” J. Micromech. Microeng. 21(1), 017002 (2011).
[Crossref]

Y. Zhao, W. M. Huang, and C. C. Wang, “Thermo/chemo-responsive shape memory effect for micro/nano patterning atop polymers,” Nanosci. Nanotechnol. Lett. 4(9), 862–878 (2012).
[Crossref]

Y. Zhao, C. C. Wang, W. M. Huang, H. Purnawali, and L. An, “Formation of micro protrusive lens arrays atop poly(methyl methacrylate),” Opt. Express 19(27), 26000–26005 (2011).
[Crossref] [PubMed]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1(8), 759–766 (1990).
[Crossref]

R. K. Jena, C. Y. Yue, Y. C. Lam, P. S. Tang, and A. Gupta, “Comparison of different molds (epoxy, polymer and silicon) for microfabrication by hot embossing technique,” Sens. Actuators B Chem. 163(1), 233–241 (2012).
[Crossref]

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

M. Chakrabarti, A. Thorseth, J. Jepsen, D. D. Corell, and C. Dam-Hansen, “Color control for tunable white LED lighting system,” Opt. Eng.in press.

B. Jiri Cech, H. Pranov, G. Kofod, M. Matschuk, S. Murthy, and R. Taboryski, “Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow,” Appl. Surf. Sci. 280, 424–430 (2013).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3–4), 339–342 (2007).

S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D Appl. Phys. 36(20), 2451–2456 (2003).
[Crossref]

J. Rogers, A. Kärkkäinen, T. Tkaczyk, J. Rantala, and M. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004).
[Crossref] [PubMed]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

B. K. Lee, D. S. Kim, and T. H. Kwon, “Replication of microlens arrays by injection molding,” Microsyst. Technol. 10(6–7), 531–535 (2004).
[Crossref]

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D Appl. Phys. 36(20), 2451–2456 (2003).
[Crossref]

B. Jiri Cech, H. Pranov, G. Kofod, M. Matschuk, S. Murthy, and R. Taboryski, “Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow,” Appl. Surf. Sci. 280, 424–430 (2013).
[Crossref]

P. Schreiber, S. Kudaev, P. Dannberg, and U. D. Zeitner, “Homogeneous LED-illumination using microlens arrays,” Proc. SPIE 5942, 59420K (2005).
[Crossref]

H. M. Leung, G. Zhou, H. Yu, F. S. Chau, and A. S. Kumar, “Diamond turning and soft lithography processes for liquid tunable lenses,” J. Micromech. Microeng. 20(2), 025021 (2010).
[Crossref]

B. K. Lee, D. S. Kim, and T. H. Kwon, “Replication of microlens arrays by injection molding,” Microsyst. Technol. 10(6–7), 531–535 (2004).
[Crossref]

R. K. Jena, C. Y. Yue, Y. C. Lam, P. S. Tang, and A. Gupta, “Comparison of different molds (epoxy, polymer and silicon) for microfabrication by hot embossing technique,” Sens. Actuators B Chem. 163(1), 233–241 (2012).
[Crossref]

B. K. Lee, D. S. Kim, and T. H. Kwon, “Replication of microlens arrays by injection molding,” Microsyst. Technol. 10(6–7), 531–535 (2004).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3–4), 339–342 (2007).

H. M. Leung, G. Zhou, H. Yu, F. S. Chau, and A. S. Kumar, “Diamond turning and soft lithography processes for liquid tunable lenses,” J. Micromech. Microeng. 20(2), 025021 (2010).
[Crossref]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

A. Y. Yi and L. Li, “Design and fabrication of a microlens array by use of a slow tool servo,” Opt. Lett. 30(13), 1707–1709 (2005).
[Crossref] [PubMed]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3–4), 339–342 (2007).

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

B. Jiri Cech, H. Pranov, G. Kofod, M. Matschuk, S. Murthy, and R. Taboryski, “Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow,” Appl. Surf. Sci. 280, 424–430 (2013).
[Crossref]

B. McCall and T. S. Tkaczyk, “Rapid fabrication of miniature lens arrays by four-axis single point diamond machining,” Opt. Express 21(3), 3557–3572 (2013).
[Crossref] [PubMed]

B. McCall and T. S. Tkaczyk, “Fabrication of plastic microlens array for array microscopy by three-dimensional diamond micromilling,” Opt. Eng. 49(10), 103401 (2010).
[Crossref] [PubMed]

D. Meister and O. World, “Methods for estimating lens thickness,” Opt. World 26(201), 1–5 (1997).

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

S. Möller and S. R. Forrest, “Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays,” J. Appl. Phys. 91(5), 3324–3327 (2002).
[Crossref]

B. Jiri Cech, H. Pranov, G. Kofod, M. Matschuk, S. Murthy, and R. Taboryski, “Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow,” Appl. Surf. Sci. 280, 424–430 (2013).
[Crossref]

K. Naessens, H. Ottevaere, R. Baets, P. Van Daele, and H. Thienpont, “Direct writing of microlenses in polycarbonate with excimer laser ablation,” Appl. Opt. 42(31), 6349–6359 (2003).
[Crossref] [PubMed]

K. Naessens, H. Ottevaere, R. Baets, P. Van Daele, and H. Thienpont, “Direct writing of microlenses in polycarbonate with excimer laser ablation,” Appl. Opt. 42(31), 6349–6359 (2003).
[Crossref] [PubMed]

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

M. Chakrabarti, H. C. Pedersen, P. B. Poulsen, and C. Dam-Hansen, “C., “Focusable, color tunable white and efficient LED stage lighting,” Opt. Eng.in press.

V. N. Goral, Y.-C. Hsieh, O. N. Petzold, R. A. Faris, and P. K. Yuen, “Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds,” J. Micromech. Microeng. 21(1), 017002 (2011).
[Crossref]

E. Roy, B. Voisin, J. F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, “Microlens array fabrication by enhanced thermal reflow process: towards efficient collection of fluorescence light from microarrays,” Microelectron. Eng. 86(11), 2255–2261 (2009).
[Crossref]

M. Chakrabarti, H. C. Pedersen, P. B. Poulsen, and C. Dam-Hansen, “C., “Focusable, color tunable white and efficient LED stage lighting,” Opt. Eng.in press.

B. Jiri Cech, H. Pranov, G. Kofod, M. Matschuk, S. Murthy, and R. Taboryski, “Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow,” Appl. Surf. Sci. 280, 424–430 (2013).
[Crossref]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

Y. Zhao, C. C. Wang, W. M. Huang, H. Purnawali, and L. An, “Formation of micro protrusive lens arrays atop poly(methyl methacrylate),” Opt. Express 19(27), 26000–26005 (2011).
[Crossref] [PubMed]

J. Rogers, A. Kärkkäinen, T. Tkaczyk, J. Rantala, and M. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004).
[Crossref] [PubMed]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

J. Rogers, A. Kärkkäinen, T. Tkaczyk, J. Rantala, and M. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004).
[Crossref] [PubMed]

E. Roy, B. Voisin, J. F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, “Microlens array fabrication by enhanced thermal reflow process: towards efficient collection of fluorescence light from microarrays,” Microelectron. Eng. 86(11), 2255–2261 (2009).
[Crossref]

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

P. Schreiber, S. Kudaev, P. Dannberg, and U. D. Zeitner, “Homogeneous LED-illumination using microlens arrays,” Proc. SPIE 5942, 59420K (2005).
[Crossref]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1(8), 759–766 (1990).
[Crossref]

W.-C. Chen, T.-J. Wu, W.-J. Wu, and G.-D. J. Su, “Fabrication of inkjet-printed SU-8 photoresist microlenses using hydrophilic confinement,” J. Micromech. Microeng. 23(6), 065008 (2013).
[Crossref]

T. J. Suleski and R. D. Te Kolste, “Fabrication trends for free-space microoptics,” J. Lightwave Technol. 23(2), 633–646 (2005).
[Crossref]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3–4), 339–342 (2007).

B. Jiri Cech, H. Pranov, G. Kofod, M. Matschuk, S. Murthy, and R. Taboryski, “Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow,” Appl. Surf. Sci. 280, 424–430 (2013).
[Crossref]

K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi, “Fabrication of three-dimensional microstructure using maskless gray-scale lithography,” Sens. Actuators A Phys. 130–131, 387–392 (2006).
[Crossref]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

R. K. Jena, C. Y. Yue, Y. C. Lam, P. S. Tang, and A. Gupta, “Comparison of different molds (epoxy, polymer and silicon) for microfabrication by hot embossing technique,” Sens. Actuators B Chem. 163(1), 233–241 (2012).
[Crossref]

T. J. Suleski and R. D. Te Kolste, “Fabrication trends for free-space microoptics,” J. Lightwave Technol. 23(2), 633–646 (2005).
[Crossref]

K. Naessens, H. Ottevaere, R. Baets, P. Van Daele, and H. Thienpont, “Direct writing of microlenses in polycarbonate with excimer laser ablation,” Appl. Opt. 42(31), 6349–6359 (2003).
[Crossref] [PubMed]

M. Chakrabarti, A. Thorseth, J. Jepsen, D. D. Corell, and C. Dam-Hansen, “Color control for tunable white LED lighting system,” Opt. Eng.in press.

J. Rogers, A. Kärkkäinen, T. Tkaczyk, J. Rantala, and M. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004).
[Crossref] [PubMed]

B. McCall and T. S. Tkaczyk, “Rapid fabrication of miniature lens arrays by four-axis single point diamond machining,” Opt. Express 21(3), 3557–3572 (2013).
[Crossref] [PubMed]

B. McCall and T. S. Tkaczyk, “Fabrication of plastic microlens array for array microscopy by three-dimensional diamond micromilling,” Opt. Eng. 49(10), 103401 (2010).
[Crossref] [PubMed]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi, “Fabrication of three-dimensional microstructure using maskless gray-scale lithography,” Sens. Actuators A Phys. 130–131, 387–392 (2006).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

K. Naessens, H. Ottevaere, R. Baets, P. Van Daele, and H. Thienpont, “Direct writing of microlenses in polycarbonate with excimer laser ablation,” Appl. Opt. 42(31), 6349–6359 (2003).
[Crossref] [PubMed]

E. Roy, B. Voisin, J. F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, “Microlens array fabrication by enhanced thermal reflow process: towards efficient collection of fluorescence light from microarrays,” Microelectron. Eng. 86(11), 2255–2261 (2009).
[Crossref]

E. Roy, B. Voisin, J. F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, “Microlens array fabrication by enhanced thermal reflow process: towards efficient collection of fluorescence light from microarrays,” Microelectron. Eng. 86(11), 2255–2261 (2009).
[Crossref]

Y. Zhao, W. M. Huang, and C. C. Wang, “Thermo/chemo-responsive shape memory effect for micro/nano patterning atop polymers,” Nanosci. Nanotechnol. Lett. 4(9), 862–878 (2012).
[Crossref]

Y. Zhao, C. C. Wang, W. M. Huang, H. Purnawali, and L. An, “Formation of micro protrusive lens arrays atop poly(methyl methacrylate),” Opt. Express 19(27), 26000–26005 (2011).
[Crossref] [PubMed]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

D. Meister and O. World, “Methods for estimating lens thickness,” Opt. World 26(201), 1–5 (1997).

W.-C. Chen, T.-J. Wu, W.-J. Wu, and G.-D. J. Su, “Fabrication of inkjet-printed SU-8 photoresist microlenses using hydrophilic confinement,” J. Micromech. Microeng. 23(6), 065008 (2013).
[Crossref]

W.-C. Chen, T.-J. Wu, W.-J. Wu, and G.-D. J. Su, “Fabrication of inkjet-printed SU-8 photoresist microlenses using hydrophilic confinement,” J. Micromech. Microeng. 23(6), 065008 (2013).
[Crossref]

Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

A. Y. Yi and L. Li, “Design and fabrication of a microlens array by use of a slow tool servo,” Opt. Lett. 30(13), 1707–1709 (2005).
[Crossref] [PubMed]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

H. M. Leung, G. Zhou, H. Yu, F. S. Chau, and A. S. Kumar, “Diamond turning and soft lithography processes for liquid tunable lenses,” J. Micromech. Microeng. 20(2), 025021 (2010).
[Crossref]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

R. K. Jena, C. Y. Yue, Y. C. Lam, P. S. Tang, and A. Gupta, “Comparison of different molds (epoxy, polymer and silicon) for microfabrication by hot embossing technique,” Sens. Actuators B Chem. 163(1), 233–241 (2012).
[Crossref]

V. N. Goral, Y.-C. Hsieh, O. N. Petzold, R. A. Faris, and P. K. Yuen, “Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds,” J. Micromech. Microeng. 21(1), 017002 (2011).
[Crossref]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

P. Schreiber, S. Kudaev, P. Dannberg, and U. D. Zeitner, “Homogeneous LED-illumination using microlens arrays,” Proc. SPIE 5942, 59420K (2005).
[Crossref]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3–4), 339–342 (2007).

Y. Zhao, W. M. Huang, and C. C. Wang, “Thermo/chemo-responsive shape memory effect for micro/nano patterning atop polymers,” Nanosci. Nanotechnol. Lett. 4(9), 862–878 (2012).
[Crossref]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

Y. Zhao, C. C. Wang, W. M. Huang, H. Purnawali, and L. An, “Formation of micro protrusive lens arrays atop poly(methyl methacrylate),” Opt. Express 19(27), 26000–26005 (2011).
[Crossref] [PubMed]

H. M. Leung, G. Zhou, H. Yu, F. S. Chau, and A. S. Kumar, “Diamond turning and soft lithography processes for liquid tunable lenses,” J. Micromech. Microeng. 20(2), 025021 (2010).
[Crossref]

J. Yong, F. Chen, Q. Yang, G. Du, H. Bian, D. Zhang, J. Si, F. Yun, and X. Hou, “Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser,” ACS Appl. Mater. Interfaces 5(19), 9382–9385 (2013).
[Crossref] [PubMed]

K. Naessens, H. Ottevaere, R. Baets, P. Van Daele, and H. Thienpont, “Direct writing of microlenses in polycarbonate with excimer laser ablation,” Appl. Opt. 42(31), 6349–6359 (2003).
[Crossref] [PubMed]

B. Jiri Cech, H. Pranov, G. Kofod, M. Matschuk, S. Murthy, and R. Taboryski, “Surface roughness reduction using spray-coated hydrogen silsesquioxane reflow,” Appl. Surf. Sci. 280, 424–430 (2013).
[Crossref]

S. Möller and S. R. Forrest, “Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays,” J. Appl. Phys. 91(5), 3324–3327 (2002).
[Crossref]

T. J. Suleski and R. D. Te Kolste, “Fabrication trends for free-space microoptics,” J. Lightwave Technol. 23(2), 633–646 (2005).
[Crossref]

V. N. Goral, Y.-C. Hsieh, O. N. Petzold, R. A. Faris, and P. K. Yuen, “Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds,” J. Micromech. Microeng. 21(1), 017002 (2011).
[Crossref]

W.-C. Chen, T.-J. Wu, W.-J. Wu, and G.-D. J. Su, “Fabrication of inkjet-printed SU-8 photoresist microlenses using hydrophilic confinement,” J. Micromech. Microeng. 23(6), 065008 (2013).
[Crossref]

G. Liu, W. Yu, H. Li, J. Gao, D. Flynn, R. W. Kay, S. Cargill, C. Tonry, M. K. Patel, C. Bailey, and M. P. Y. Desmulliez, “Microstructure formation in a thick polymer by electrostatic-induced lithography,” J. Micromech. Microeng. 23(3), 035018 (2013).
[Crossref]

H. M. Leung, G. Zhou, H. Yu, F. S. Chau, and A. S. Kumar, “Diamond turning and soft lithography processes for liquid tunable lenses,” J. Micromech. Microeng. 20(2), 025021 (2010).
[Crossref]

Y. Liu, P. Zhang, Y. Deng, P. Hao, J. Fan, M. Chi, and Y. Wu, “Polymeric microlens array fabricated with PDMS mold-based hot embossing,” J. Micromechanics Microengineering 24, 095028 (2014).

S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D Appl. Phys. 36(20), 2451–2456 (2003).
[Crossref]

S. Park, Y. Jeong, J. Kim, K. Choi, H. C. Kim, D. S. Chung, and K. Chun, “Fabricaton of poly(dimethylsiloxane) microlens for laser-induced fluorescence detection,” Jpn. J. Appl. Phys. 45(6B), 5614–5617 (2006).
[Crossref]

L. Sun, W. M. Huang, Z. Ding, Y. Zhao, C. C. Wang, H. Purnawali, and C. Tang, “Stimulus-responsive shape memory materials,” Mater. Des. 33(2012), 578–640 (2011).

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1(8), 759–766 (1990).
[Crossref]

E. Roy, B. Voisin, J. F. Gravel, R. Peytavi, D. Boudreau, and T. Veres, “Microlens array fabrication by enhanced thermal reflow process: towards efficient collection of fluorescence light from microarrays,” Microelectron. Eng. 86(11), 2255–2261 (2009).
[Crossref]

P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho, “Microlens fabrication using an etched glass master,” Microsyst. Technol. 13(3–4), 339–342 (2007).

B. K. Lee, D. S. Kim, and T. H. Kwon, “Replication of microlens arrays by injection molding,” Microsyst. Technol. 10(6–7), 531–535 (2004).
[Crossref]

Y. Zhao, W. M. Huang, and C. C. Wang, “Thermo/chemo-responsive shape memory effect for micro/nano patterning atop polymers,” Nanosci. Nanotechnol. Lett. 4(9), 862–878 (2012).
[Crossref]

B. McCall and T. S. Tkaczyk, “Fabrication of plastic microlens array for array microscopy by three-dimensional diamond micromilling,” Opt. Eng. 49(10), 103401 (2010).
[Crossref] [PubMed]

S. Scheiding, A. Y. Yi, A. Gebhardt, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo,” Opt. Express 19(24), 23938–23951 (2011).
[Crossref] [PubMed]

B. McCall and T. S. Tkaczyk, “Rapid fabrication of miniature lens arrays by four-axis single point diamond machining,” Opt. Express 21(3), 3557–3572 (2013).
[Crossref] [PubMed]

Y. Zhao, C. C. Wang, W. M. Huang, H. Purnawali, and L. An, “Formation of micro protrusive lens arrays atop poly(methyl methacrylate),” Opt. Express 19(27), 26000–26005 (2011).
[Crossref] [PubMed]

J. Rogers, A. Kärkkäinen, T. Tkaczyk, J. Rantala, and M. Descour, “Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass,” Opt. Express 12(7), 1294–1303 (2004).
[Crossref] [PubMed]

A. Y. Yi and L. Li, “Design and fabrication of a microlens array by use of a slow tool servo,” Opt. Lett. 30(13), 1707–1709 (2005).
[Crossref] [PubMed]

D. Meister and O. World, “Methods for estimating lens thickness,” Opt. World 26(201), 1–5 (1997).

J. C. Miñano, M. Hernández, P. Benítez, J. Blen, O. Dross, R. Mohedano, and A. Santamaría, “Free-form integrator array optics,” Proc. SPIE 5942, 59420C (2005).
[Crossref]

S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt, and A. Tünnermann, “Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies,” Proc. SPIE 7927, 79270N (2011).
[Crossref]

P. Schreiber, S. Kudaev, P. Dannberg, and U. D. Zeitner, “Homogeneous LED-illumination using microlens arrays,” Proc. SPIE 5942, 59420K (2005).
[Crossref]

K. Totsu, K. Fujishiro, S. Tanaka, and M. Esashi, “Fabrication of three-dimensional microstructure using maskless gray-scale lithography,” Sens. Actuators A Phys. 130–131, 387–392 (2006).
[Crossref]

R. K. Jena, C. Y. Yue, Y. C. Lam, P. S. Tang, and A. Gupta, “Comparison of different molds (epoxy, polymer and silicon) for microfabrication by hot embossing technique,” Sens. Actuators B Chem. 163(1), 233–241 (2012).
[Crossref]

H. C. Pedersen, T. Brockmann, and C. Dam-Hansen, “Light engine for an illumination device,” EP2843301, International Bureau of the World Intellectual Property Organization (WIPO) (2015).

M. Chakrabarti, A. Thorseth, J. Jepsen, D. D. Corell, and C. Dam-Hansen, “Color control for tunable white LED lighting system,” Opt. Eng.in press.

M. Chakrabarti, H. C. Pedersen, P. B. Poulsen, and C. Dam-Hansen, “C., “Focusable, color tunable white and efficient LED stage lighting,” Opt. Eng.in press.

Micro.Chem., “MicroSprayTM,” 2016, < http://www.microchem.com/Prod-Microspray.htm >.

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