W. Zhou, Z. Cheng, X. Wu, B. Zhu, X. Sun, and H. K. Tsang, “Fully suspended slot waveguides for high refractive index sensitivity,” Opt. Lett. 42(7), 1245–1248 (2017).
[Crossref] [PubMed]

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

T. Li, D. Gao, D. Zhang, and E. Cassan, “High-Q and high-sensitivity one-dimensional photonic crystal slot nanobeam cavity sensors,” IEEE Photonics Technol. Lett. 28(6), 689–692 (2016).
[Crossref]

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

C. Y. Tan and Y.-X. Huang, “Dependence of refractive index on concentration and temperature in electrolyte solution, polar solution, nonpolar solution, and protein solution,” J. Chem. Eng. Data 60(10), 2827–2833 (2015).
[Crossref]

S. Kim, H. M. Kim, and Y. H. Lee, “Single nanobeam optical sensor with a high Q-factor and high sensitivity,” Opt. Lett. 40(22), 5351–5354 (2015).
[Crossref] [PubMed]

Y. Zhang, S. Han, S. Zhang, P. Liu, and Y. Shi, “High-Q and high-sensitivity photonic crystal cavity sensor,” IEEE Photonics J. 7(5), 1–6 (2015).

D. Yang, P. Zhang, H. Tian, Y. Ji, and Q. Quan, “Ultrahigh Q and Low-Mode-Volume Parabolic Radius-Modulated Single Photonic Crystal Slot Nanobeam Cavity for High-Sensitivity Refractive Index Sensing,” IEEE Photonics J. 7(5), 1–8 (2015).
[Crossref]

A. Bera, M. Häyrinen, M. Kuittinen, S. Honkanen, and M. Roussey, “Parabolic opening in atomic layer deposited TiO(2) nanobeam operating in visible wavelengths,” Opt. Express 23(11), 14973–14980 (2015).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

H. K. Hunt and A. M. Armani, “Label-free biological and chemical sensors,” Nanoscale 2(9), 1544–1559 (2010).
[Crossref] [PubMed]

Q. Quan, P. B. Deotare, and M. Loncar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[Crossref]

E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express 17(17), 14543–14551 (2009).
[Crossref] [PubMed]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express 17(14), 11366–11370 (2009).
[Crossref] [PubMed]

J. C. Yang, J. Ji, J. M. Hogle, and D. N. Larson, “Metallic nanohole arrays on fluoropolymer substrates as small label-free real-time bioprobes,” Nano Lett. 8(9), 2718–2724 (2008).
[Crossref] [PubMed]

B. J. Wiley, D. J. Lipomi, J. Bao, F. Capasso, and G. M. Whitesides, “Fabrication of surface plasmon resonators by nanoskiving single-crystalline gold microplates,” Nano Lett. 8(9), 3023–3028 (2008).
[Crossref] [PubMed]

I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008).
[Crossref] [PubMed]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[Crossref] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[Crossref] [PubMed]

E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express 17(17), 14543–14551 (2009).
[Crossref] [PubMed]

H. K. Hunt and A. M. Armani, “Label-free biological and chemical sensors,” Nanoscale 2(9), 1544–1559 (2010).
[Crossref] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[Crossref] [PubMed]

E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express 17(17), 14543–14551 (2009).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

B. J. Wiley, D. J. Lipomi, J. Bao, F. Capasso, and G. M. Whitesides, “Fabrication of surface plasmon resonators by nanoskiving single-crystalline gold microplates,” Nano Lett. 8(9), 3023–3028 (2008).
[Crossref] [PubMed]

A. Bera, M. Häyrinen, M. Kuittinen, S. Honkanen, and M. Roussey, “Parabolic opening in atomic layer deposited TiO(2) nanobeam operating in visible wavelengths,” Opt. Express 23(11), 14973–14980 (2015).
[Crossref] [PubMed]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[Crossref] [PubMed]

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

B. J. Wiley, D. J. Lipomi, J. Bao, F. Capasso, and G. M. Whitesides, “Fabrication of surface plasmon resonators by nanoskiving single-crystalline gold microplates,” Nano Lett. 8(9), 3023–3028 (2008).
[Crossref] [PubMed]

T. Li, D. Gao, D. Zhang, and E. Cassan, “High-Q and high-sensitivity one-dimensional photonic crystal slot nanobeam cavity sensors,” IEEE Photonics Technol. Lett. 28(6), 689–692 (2016).
[Crossref]

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

W. Zhou, Z. Cheng, X. Wu, B. Zhu, X. Sun, and H. K. Tsang, “Fully suspended slot waveguides for high refractive index sensitivity,” Opt. Lett. 42(7), 1245–1248 (2017).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

Q. Quan, P. B. Deotare, and M. Loncar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[Crossref]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008).
[Crossref] [PubMed]

T. Li, D. Gao, D. Zhang, and E. Cassan, “High-Q and high-sensitivity one-dimensional photonic crystal slot nanobeam cavity sensors,” IEEE Photonics Technol. Lett. 28(6), 689–692 (2016).
[Crossref]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express 17(14), 11366–11370 (2009).
[Crossref] [PubMed]

Y. Zhang, S. Han, S. Zhang, P. Liu, and Y. Shi, “High-Q and high-sensitivity photonic crystal cavity sensor,” IEEE Photonics J. 7(5), 1–6 (2015).

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

A. Bera, M. Häyrinen, M. Kuittinen, S. Honkanen, and M. Roussey, “Parabolic opening in atomic layer deposited TiO(2) nanobeam operating in visible wavelengths,” Opt. Express 23(11), 14973–14980 (2015).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[Crossref] [PubMed]

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

J. C. Yang, J. Ji, J. M. Hogle, and D. N. Larson, “Metallic nanohole arrays on fluoropolymer substrates as small label-free real-time bioprobes,” Nano Lett. 8(9), 2718–2724 (2008).
[Crossref] [PubMed]

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

A. Bera, M. Häyrinen, M. Kuittinen, S. Honkanen, and M. Roussey, “Parabolic opening in atomic layer deposited TiO(2) nanobeam operating in visible wavelengths,” Opt. Express 23(11), 14973–14980 (2015).
[Crossref] [PubMed]

E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express 17(17), 14543–14551 (2009).
[Crossref] [PubMed]

C. Y. Tan and Y.-X. Huang, “Dependence of refractive index on concentration and temperature in electrolyte solution, polar solution, nonpolar solution, and protein solution,” J. Chem. Eng. Data 60(10), 2827–2833 (2015).
[Crossref]

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

H. K. Hunt and A. M. Armani, “Label-free biological and chemical sensors,” Nanoscale 2(9), 1544–1559 (2010).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

J. C. Yang, J. Ji, J. M. Hogle, and D. N. Larson, “Metallic nanohole arrays on fluoropolymer substrates as small label-free real-time bioprobes,” Nano Lett. 8(9), 2718–2724 (2008).
[Crossref] [PubMed]

D. Yang, P. Zhang, H. Tian, Y. Ji, and Q. Quan, “Ultrahigh Q and Low-Mode-Volume Parabolic Radius-Modulated Single Photonic Crystal Slot Nanobeam Cavity for High-Sensitivity Refractive Index Sensing,” IEEE Photonics J. 7(5), 1–8 (2015).
[Crossref]

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

S. Kim, H. M. Kim, and Y. H. Lee, “Single nanobeam optical sensor with a high Q-factor and high sensitivity,” Opt. Lett. 40(22), 5351–5354 (2015).
[Crossref] [PubMed]

S. Kim, H. M. Kim, and Y. H. Lee, “Single nanobeam optical sensor with a high Q-factor and high sensitivity,” Opt. Lett. 40(22), 5351–5354 (2015).
[Crossref] [PubMed]

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[Crossref] [PubMed]

A. Bera, M. Häyrinen, M. Kuittinen, S. Honkanen, and M. Roussey, “Parabolic opening in atomic layer deposited TiO(2) nanobeam operating in visible wavelengths,” Opt. Express 23(11), 14973–14980 (2015).
[Crossref] [PubMed]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[Crossref] [PubMed]

J. C. Yang, J. Ji, J. M. Hogle, and D. N. Larson, “Metallic nanohole arrays on fluoropolymer substrates as small label-free real-time bioprobes,” Nano Lett. 8(9), 2718–2724 (2008).
[Crossref] [PubMed]

S. Kim, H. M. Kim, and Y. H. Lee, “Single nanobeam optical sensor with a high Q-factor and high sensitivity,” Opt. Lett. 40(22), 5351–5354 (2015).
[Crossref] [PubMed]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express 17(14), 11366–11370 (2009).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

T. Li, D. Gao, D. Zhang, and E. Cassan, “High-Q and high-sensitivity one-dimensional photonic crystal slot nanobeam cavity sensors,” IEEE Photonics Technol. Lett. 28(6), 689–692 (2016).
[Crossref]

B. J. Wiley, D. J. Lipomi, J. Bao, F. Capasso, and G. M. Whitesides, “Fabrication of surface plasmon resonators by nanoskiving single-crystalline gold microplates,” Nano Lett. 8(9), 3023–3028 (2008).
[Crossref] [PubMed]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express 17(14), 11366–11370 (2009).
[Crossref] [PubMed]

Y. Zhang, S. Han, S. Zhang, P. Liu, and Y. Shi, “High-Q and high-sensitivity photonic crystal cavity sensor,” IEEE Photonics J. 7(5), 1–6 (2015).

Q. Quan, P. B. Deotare, and M. Loncar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[Crossref]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

D. Yang, P. Zhang, H. Tian, Y. Ji, and Q. Quan, “Ultrahigh Q and Low-Mode-Volume Parabolic Radius-Modulated Single Photonic Crystal Slot Nanobeam Cavity for High-Sensitivity Refractive Index Sensing,” IEEE Photonics J. 7(5), 1–8 (2015).
[Crossref]

Q. Quan, P. B. Deotare, and M. Loncar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[Crossref]

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

A. Bera, M. Häyrinen, M. Kuittinen, S. Honkanen, and M. Roussey, “Parabolic opening in atomic layer deposited TiO(2) nanobeam operating in visible wavelengths,” Opt. Express 23(11), 14973–14980 (2015).
[Crossref] [PubMed]

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

Y. Zhang, S. Han, S. Zhang, P. Liu, and Y. Shi, “High-Q and high-sensitivity photonic crystal cavity sensor,” IEEE Photonics J. 7(5), 1–6 (2015).

E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express 17(17), 14543–14551 (2009).
[Crossref] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

W. Zhou, Z. Cheng, X. Wu, B. Zhu, X. Sun, and H. K. Tsang, “Fully suspended slot waveguides for high refractive index sensitivity,” Opt. Lett. 42(7), 1245–1248 (2017).
[Crossref] [PubMed]

C. Y. Tan and Y.-X. Huang, “Dependence of refractive index on concentration and temperature in electrolyte solution, polar solution, nonpolar solution, and protein solution,” J. Chem. Eng. Data 60(10), 2827–2833 (2015).
[Crossref]

D. Yang, P. Zhang, H. Tian, Y. Ji, and Q. Quan, “Ultrahigh Q and Low-Mode-Volume Parabolic Radius-Modulated Single Photonic Crystal Slot Nanobeam Cavity for High-Sensitivity Refractive Index Sensing,” IEEE Photonics J. 7(5), 1–8 (2015).
[Crossref]

W. Zhou, Z. Cheng, X. Wu, B. Zhu, X. Sun, and H. K. Tsang, “Fully suspended slot waveguides for high refractive index sensitivity,” Opt. Lett. 42(7), 1245–1248 (2017).
[Crossref] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[Crossref] [PubMed]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[Crossref] [PubMed]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[Crossref] [PubMed]

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008).
[Crossref] [PubMed]

B. J. Wiley, D. J. Lipomi, J. Bao, F. Capasso, and G. M. Whitesides, “Fabrication of surface plasmon resonators by nanoskiving single-crystalline gold microplates,” Nano Lett. 8(9), 3023–3028 (2008).
[Crossref] [PubMed]

B. J. Wiley, D. J. Lipomi, J. Bao, F. Capasso, and G. M. Whitesides, “Fabrication of surface plasmon resonators by nanoskiving single-crystalline gold microplates,” Nano Lett. 8(9), 3023–3028 (2008).
[Crossref] [PubMed]

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

W. Zhou, Z. Cheng, X. Wu, B. Zhu, X. Sun, and H. K. Tsang, “Fully suspended slot waveguides for high refractive index sensitivity,” Opt. Lett. 42(7), 1245–1248 (2017).
[Crossref] [PubMed]

D. Yang, P. Zhang, H. Tian, Y. Ji, and Q. Quan, “Ultrahigh Q and Low-Mode-Volume Parabolic Radius-Modulated Single Photonic Crystal Slot Nanobeam Cavity for High-Sensitivity Refractive Index Sensing,” IEEE Photonics J. 7(5), 1–8 (2015).
[Crossref]

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

J. C. Yang, J. Ji, J. M. Hogle, and D. N. Larson, “Metallic nanohole arrays on fluoropolymer substrates as small label-free real-time bioprobes,” Nano Lett. 8(9), 2718–2724 (2008).
[Crossref] [PubMed]

E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express 17(17), 14543–14551 (2009).
[Crossref] [PubMed]

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

T. Li, D. Gao, D. Zhang, and E. Cassan, “High-Q and high-sensitivity one-dimensional photonic crystal slot nanobeam cavity sensors,” IEEE Photonics Technol. Lett. 28(6), 689–692 (2016).
[Crossref]

D. Yang, P. Zhang, H. Tian, Y. Ji, and Q. Quan, “Ultrahigh Q and Low-Mode-Volume Parabolic Radius-Modulated Single Photonic Crystal Slot Nanobeam Cavity for High-Sensitivity Refractive Index Sensing,” IEEE Photonics J. 7(5), 1–8 (2015).
[Crossref]

Y. Zhang, S. Han, S. Zhang, P. Liu, and Y. Shi, “High-Q and high-sensitivity photonic crystal cavity sensor,” IEEE Photonics J. 7(5), 1–6 (2015).

Y. Zhang, S. Han, S. Zhang, P. Liu, and Y. Shi, “High-Q and high-sensitivity photonic crystal cavity sensor,” IEEE Photonics J. 7(5), 1–6 (2015).

W. Zhou, Z. Cheng, X. Wu, B. Zhu, X. Sun, and H. K. Tsang, “Fully suspended slot waveguides for high refractive index sensitivity,” Opt. Lett. 42(7), 1245–1248 (2017).
[Crossref] [PubMed]

W. Zhou, Z. Cheng, X. Wu, B. Zhu, X. Sun, and H. K. Tsang, “Fully suspended slot waveguides for high refractive index sensitivity,” Opt. Lett. 42(7), 1245–1248 (2017).
[Crossref] [PubMed]

Q. Quan, P. B. Deotare, and M. Loncar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[Crossref]

Y. Zhang, S. Han, S. Zhang, P. Liu, and Y. Shi, “High-Q and high-sensitivity photonic crystal cavity sensor,” IEEE Photonics J. 7(5), 1–6 (2015).

D. Yang, P. Zhang, H. Tian, Y. Ji, and Q. Quan, “Ultrahigh Q and Low-Mode-Volume Parabolic Radius-Modulated Single Photonic Crystal Slot Nanobeam Cavity for High-Sensitivity Refractive Index Sensing,” IEEE Photonics J. 7(5), 1–8 (2015).
[Crossref]

A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, and P. Van Dorpe, “Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532–900 nm wavelength window fabricated within a CMOS pilot line,” IEEE Photonics J. 5(6), 2202809 (2013).
[Crossref]

T. Li, D. Gao, D. Zhang, and E. Cassan, “High-Q and high-sensitivity one-dimensional photonic crystal slot nanobeam cavity sensors,” IEEE Photonics Technol. Lett. 28(6), 689–692 (2016).
[Crossref]

P. Yu, H. Qiu, H. Yu, F. Wu, Z. Wang, X. Jiang, and J. Yang, “High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon,” IEEE Photonics Technol. Lett. 28(20), 2121–2124 (2016).

C. Y. Tan and Y.-X. Huang, “Dependence of refractive index on concentration and temperature in electrolyte solution, polar solution, nonpolar solution, and protein solution,” J. Chem. Eng. Data 60(10), 2827–2833 (2015).
[Crossref]

J. C. Yang, J. Ji, J. M. Hogle, and D. N. Larson, “Metallic nanohole arrays on fluoropolymer substrates as small label-free real-time bioprobes,” Nano Lett. 8(9), 2718–2724 (2008).
[Crossref] [PubMed]

B. J. Wiley, D. J. Lipomi, J. Bao, F. Capasso, and G. M. Whitesides, “Fabrication of surface plasmon resonators by nanoskiving single-crystalline gold microplates,” Nano Lett. 8(9), 3023–3028 (2008).
[Crossref] [PubMed]

H. K. Hunt and A. M. Armani, “Label-free biological and chemical sensors,” Nanoscale 2(9), 1544–1559 (2010).
[Crossref] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421(6926), 925–928 (2003).
[Crossref] [PubMed]

I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008).
[Crossref] [PubMed]

A. Bera, M. Häyrinen, M. Kuittinen, S. Honkanen, and M. Roussey, “Parabolic opening in atomic layer deposited TiO(2) nanobeam operating in visible wavelengths,” Opt. Express 23(11), 14973–14980 (2015).
[Crossref] [PubMed]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express 17(14), 11366–11370 (2009).
[Crossref] [PubMed]

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

E. S. Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express 17(17), 14543–14551 (2009).
[Crossref] [PubMed]

M. Chemnitz, G. Schmidl, A. Schwuchow, M. Zeisberger, U. Hübner, K. Weber, and M. A. Schmidt, “Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths,” Opt. Lett. 41(22), 5377–5380 (2016).
[Crossref] [PubMed]

S. Kim, H. M. Kim, and Y. H. Lee, “Single nanobeam optical sensor with a high Q-factor and high sensitivity,” Opt. Lett. 40(22), 5351–5354 (2015).
[Crossref] [PubMed]

W. Zhou, Z. Cheng, X. Wu, B. Zhu, X. Sun, and H. K. Tsang, “Fully suspended slot waveguides for high refractive index sensitivity,” Opt. Lett. 42(7), 1245–1248 (2017).
[Crossref] [PubMed]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004).
[Crossref] [PubMed]

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