Development of a general model for direct laser interference patterning of polymers

Sabri Alamri; Andrés Fabián Lasagni

doi:10.1364/OE.25.009603

Optics Express
Vol. 25,
Issue 9,
pp. 9603-9616
(2017)
•https://doi.org/10.1364/OE.25.009603

Development of a general model for direct laser interference patterning of polymers

Sabri Alamri and Andrés Fabián Lasagni

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Sabri Alamri and Andrés Fabián Lasagni, "Development of a general model for direct laser interference patterning of polymers," Opt. Express 25, 9603-9616 (2017)

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Related Topics
Table of Contents Category
- Laser Machining and Material Processing
Optics & Photonics Topics
?

The topics in this list come from the Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Laser materials processing (140.3390)
- Polymers (160.5470)
- Microstructure fabrication (220.4000)
- Interference (260.3160)

About this Article
History
- Original Manuscript: February 23, 2017
- Revised Manuscript: March 20, 2017
- Manuscript Accepted: March 20, 2017
- Published: April 18, 2017

Abstract

This study investigates the general mechanism of Direct Laser Interference Patterning (DLIP) involved in the structuring process of polymer materials. An empirical model is developed taking into account experimental observations of DLIP-treated pigmented and transparent polycarbonate substrates with UV (263 nm) and IR (1053 nm) laser radiation. Depending on the used laser processing conditions, the type of material as well as the spatial period of the interference pattern, four different structuring mechanisms can be identified. The treated surfaces are investigated using confocal microscopy, scanning electron microscopy and focus ion beam and as a result from the experimental data analysis, the developed model predicts the material surface topography after the patterning process, by means of a set of material-dependent coefficients.

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References

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Year
Author
Publication

A. Y. Vorobyev and C. Guo, “Direct femtosecond laser surface nano/microstructuring and its applications,” Laser Photonics Rev. 7(3), 385–407 (2013).
[Crossref]
S. C. Singh, H. Zeng, C. Guo, W. Cai, Nanomaterials: Laser-Induced Nano/Microfabrications (Wiley-VCH Verlag GmbH & Co. KGaA, 2012).
M. Röhrig, M. Thiel, M. Worgull, and H. Hölscher, “3D Direct Laser Writing of Nano- and Microstructured Hierarchical Gecko-Mimicking Surfaces,” Small 8(19), 3009–3015 (2012).
[Crossref] [PubMed]
K. Koch, B. Bhushan, Y. C. Jung, and W. Barthlott, “Fabrication of artificial Lotus leaves and significance of hierarchical structure for superhydrophobicity and low adhesion,” Soft Matter 5(7), 1386–1393 (2009).
[Crossref]
A. Ingenito, O. Isabella, and M. Zeman, “Nano‐cones on micro‐pyramids: modulated surface textures for maximal spectral response and high‐efficiency solar cells,” Res. Appl. 23, 1649–1659 (2015).
W. Barthlott and C. Neinhuis, “Purity of the sacred lotus, or escape from contamination in biological surfaces,” Planta 202(1), 1–8 (1997).
[Crossref]
A. Marmur, “The Lotus effect: superhydrophobicity and metastability,” Langmuir 20(9), 3517–3519 (2004).
[Crossref] [PubMed]
D. Xia, Z. Ku, S. C. Lee, and S. R. J. Brueck, “Nanostructures and functional materials fabricated by interferometric lithography,” Adv. Mater. 23(2), 147–179 (2011).
[Crossref] [PubMed]
Y. C. Jung and B. Bhushan, “Contact angle, adhesion and friction properties of micro-and nanopatterned polymers for superhydrophobicity,” Nanotechnology 17(19), 4970–4980 (2006).
[Crossref]
I. Etsion, G. Halperin, and E. Becker, “Testing piston rings with partial laser surface texturing for friction reduction,” Wear 261, 7–8 (2006).
A. Kovalchenko, O. Ajayi, A. Erdemir, G. Fenske, and I. Etsion, “The effect of laser surface texturing on transitions in lubrication regimes during unidirectional sliding contact,” Tribol. Int. 38(3), 219–225 (2005).
[Crossref]
B. Podgornik, B. Zajec, S. Strnad, and K. Stana-Kleinschek, “Influence of surface energy on the interactions between hard coatings and lubricants,” Wear 262(9-10), 1199–1204 (2007).
[Crossref]
C. Cottin-Bizonne, J.-L. Barrat, L. Bocquet, and E. Charlaix, “Low-friction flows of liquid at nanopatterned interfaces,” Nat. Mater. 2(4), 238–240 (2003).
[Crossref] [PubMed]
A. F. Lasagni, T. Roch, M. Bieda, D. Benke, and E. Beyer, “High speed surface functionalization using direct laser interference patterning, towards 1 m2/min fabrication speed with sub-μm resolution,” Proc. SPIE 8968, 89680A (2014).
[Crossref]
S. Eckhardt, C. Sachse, and A. F. Lasagni, “Light management in transparent conducting oxides by direct fabrication of periodic surface arrays,” Phys. Proc. 41, 552–557 (2013).
[Crossref]
T. Roch, F. Klein, K. Guenther, A. Roch, T. Mühl, and A. Lasagni, “Laser interference induced nano-crystallized surface swellings of amorphous carbon for advanced micro tribology,” Mat. Res. Expr. 1(3), 035042 (2014).
[Crossref]
A. F. Lasagni and F. A. Lasagni, Fabrication and Characterization in the Micro-Nano Range (Springer-Verlag, 2011).
M. Soldera, K. Taretto, J. Berger, and A. F. Lasagni, “Potential of Photocurrent Improvement in μc‐Si: H Solar Cells with TCO Substrates Structured by Direct Laser Interference Patterning,” Adv. Mater. Eng. 18(9), 1674–1682 (2016).
[Crossref]
M. Bieda, M. Siebold, and A. F. Lasagni, “Fabrication of sub-micron surface structures on copper, stainless steel and titanium using picosecond laser interference patterning,” Appl. Surf. Sci. 387, 175–182 (2016).
[Crossref]
A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large area direct fabrication of periodic arrays using interference patterning,” Phys. Procedia 12, 214–220 (2011).
[Crossref]
B. Voisiat, M. Gedvilas, S. Indrisiunas, and G. Raciukaitis, “Picosecond-Laser 4-beam-Interference Ablation as a Flexible Tool for Thin Film Microcstructuring,” Phys. Procedia 12, 116–124 (2011).
[Crossref]
A. F. Lasagni, A. Manzoni, and F. Mücklich, “Micro/Nano Fabrication of Periodic Hierarchical Structures by Multi-Pulsed Laser Interference Structuring,” Adv. Eng. Mater. 10(9), 872–875 (2007).
[Crossref]
A. F. Lasagni, D. F. Acevedo, C. A. Barbero, and F. Mücklich, “One-Step Production of Organized Surface Architectures on Polymeric Materials by Direct Laser Interference Patterning,” Adv. Eng. Mater. 9(1-2), 99–103 (2007).
[Crossref]
T. Zhai, X. Zhang, Z. Pang, and F. Dou, “Direct writing of polymer lasers using interference ablation,” Adv. Mater. 23(16), 1860–1864 (2011).
[Crossref] [PubMed]
K. S. Kim, H. Jeong, M. S. Jeong, and G. Y. Jung, “Polymer-templated hydrothermal growth of vertically aligned single-crystal zno nanorods and morphological transformations using structural polarity,” Adv. Funct. Mater. 20(18), 3055–3063 (2010).
[Crossref]
D. Yuan, R. Guo, Y. Wei, W. Wu, Y. Ding, Z. L. Wang, and S. Das, “Heteroepitaxial growth of vertically aligned and periodically distributed ZnO nanowires on GaN using laser interference ablation,” Adv. Funct. Mater. 20(20), 3484–3489 (2010).
[Crossref]
K. Paivasaari, J. J. J. Kaakkunen, M. Kuittinen, and T. Jaaskelainen, “Enhanced optical absorptance of metals using interferometric femtosecond ablation,” Opt. Express 15(21), 13838–13843 (2007).
[Crossref] [PubMed]
R. Guo, D. Yuan, and S. Das, “Large-area microlens arrays fabricated on flexible polycarbonate sheets via single-step laser interference ablation,” J. Micromech. Microeng. 21(1), 015010 (2011).
[Crossref]
C. S. Lim, M. H. Hong, Y. Lin, Q. Xie, B. S. Lukyanchuk, A. Senthil Kumar, and M. Rahman, “Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning,” Appl. Phys. Lett. 89, 87–90 (2006).
[Crossref]
L. Guo, H. Jiang, R. Shao, Y. Zhang, S. Xie, J. Wang, X. Li, F. Jiang, Q. Chen, T. Zhang, and H. Sun, “Two-beam-laser interference mediated reduction, patterning and nanostructuring of graphene oxide for the production of a flexible humidity sensing device,” Carbon 50(4), 1667–1673 (2012).
[Crossref]
E. Stankevicius, E. Balciunas, M. Malinauskas, G. Raciukaitis, D. Baltriukiene, and V. Bukelskiene, “Holographic lithography for biomedical applications,” Proc. SPIE 8433, 843312 (2012).
[Crossref]
M. Maldovan, C. K. Ullal, J. H. Jang, and E. L. Thomas, “Sub-Micrometer Scale Periodic Porous Cellular Structures: Microframes Prepared by Holographic Interference Lithography,” Adv. Mater. 19(22), 3809–3813 (2007).
[Crossref]
A. F. Lasagni, D. F. Acevedo, C. A. Barbero, and F. Mücklich, “Direct patterning of polystyrene–polymethyl methacrylate copolymer by means of laser interference lithography using UV laser irradiation,” Polym. Eng. Sci. 48(12), 2367–2372 (2008).
[Crossref]
M. F. Broglia, D. F. Acevedo, D. Langheinrich, H. R. Perez-Hernandez, C. A. Barbero, and A. F. Lasagni, “Rapid Fabrication of Periodic Patterns on Poly (styrene-co-acrylonitrile) Surfaces Using Direct Laser Interference Patterning,” Int. J. Polym. Sci. 2015, 721035 (2015).
[Crossref]
V. Lang, T. Roch, and A. F. Lasagni, “High‐Speed Surface Structuring of Polycarbonate Using Direct Laser Interference Patterning: Toward 1 m2 min−1 Fabrication Speed Barrier,” Adv. Eng. Mater. 18(8), 1342–1348 (2016).
[Crossref]
A. F. Lasagni, T. Roch, J. Berger, T. Kunze, V. Lang, and E. Beyer, “To use or not to use (direct laser interference patterning), that is the question,” Proc. SPIE 9351, 935115 (2015).
[Crossref]
F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Micro-lens arrays generated by UV laser irradiation of doped PMMA,” Appl. Phys., A Mater. Sci. Process. 68(6), 709–713 (1999).
[Crossref]
J. Shao, Y. Ding, W. Wang, X. Mei, H. Zhai, H. Tian, X. Li, and B. Liu, “Generation of fully-covering hierarchical micro-/nano- structures by nanoimprinting and modified laser swelling,” Small 10(13), 2595–2601 (2014).
[Crossref] [PubMed]
D. Bäuerle, Laser Processing and Chemistry (Springer-Verlag, 2000).
A. Costela, I. García-Moreno, F. Florido, J. M. Figuera, R. Sastre, S. M. Hooker, J. S. Cashmore, and C. E. Webb, “Laser ablation of polymeric materials at 157 nm,” J. Appl. Phys. 77(6), 2343–2350 (1995).
[Crossref]
H. Mishina and T. Asakura, “Two gaussian beam interference,” Nouv. Rev. Optique 5(2), 101–107 (1974).
[Crossref]

2016 (3)

M. Soldera, K. Taretto, J. Berger, and A. F. Lasagni, “Potential of Photocurrent Improvement in μc‐Si: H Solar Cells with TCO Substrates Structured by Direct Laser Interference Patterning,” Adv. Mater. Eng. 18(9), 1674–1682 (2016).
[Crossref]

M. Bieda, M. Siebold, and A. F. Lasagni, “Fabrication of sub-micron surface structures on copper, stainless steel and titanium using picosecond laser interference patterning,” Appl. Surf. Sci. 387, 175–182 (2016).
[Crossref]

V. Lang, T. Roch, and A. F. Lasagni, “High‐Speed Surface Structuring of Polycarbonate Using Direct Laser Interference Patterning: Toward 1 m2 min−1 Fabrication Speed Barrier,” Adv. Eng. Mater. 18(8), 1342–1348 (2016).
[Crossref]

2015 (3)

A. F. Lasagni, T. Roch, J. Berger, T. Kunze, V. Lang, and E. Beyer, “To use or not to use (direct laser interference patterning), that is the question,” Proc. SPIE 9351, 935115 (2015).
[Crossref]

M. F. Broglia, D. F. Acevedo, D. Langheinrich, H. R. Perez-Hernandez, C. A. Barbero, and A. F. Lasagni, “Rapid Fabrication of Periodic Patterns on Poly (styrene-co-acrylonitrile) Surfaces Using Direct Laser Interference Patterning,” Int. J. Polym. Sci. 2015, 721035 (2015).
[Crossref]

A. Ingenito, O. Isabella, and M. Zeman, “Nano‐cones on micro‐pyramids: modulated surface textures for maximal spectral response and high‐efficiency solar cells,” Res. Appl. 23, 1649–1659 (2015).

2014 (3)

A. F. Lasagni, T. Roch, M. Bieda, D. Benke, and E. Beyer, “High speed surface functionalization using direct laser interference patterning, towards 1 m2/min fabrication speed with sub-μm resolution,” Proc. SPIE 8968, 89680A (2014).
[Crossref]

J. Shao, Y. Ding, W. Wang, X. Mei, H. Zhai, H. Tian, X. Li, and B. Liu, “Generation of fully-covering hierarchical micro-/nano- structures by nanoimprinting and modified laser swelling,” Small 10(13), 2595–2601 (2014).
[Crossref] [PubMed]

T. Roch, F. Klein, K. Guenther, A. Roch, T. Mühl, and A. Lasagni, “Laser interference induced nano-crystallized surface swellings of amorphous carbon for advanced micro tribology,” Mat. Res. Expr. 1(3), 035042 (2014).
[Crossref]

2013 (2)

S. Eckhardt, C. Sachse, and A. F. Lasagni, “Light management in transparent conducting oxides by direct fabrication of periodic surface arrays,” Phys. Proc. 41, 552–557 (2013).
[Crossref]

A. Y. Vorobyev and C. Guo, “Direct femtosecond laser surface nano/microstructuring and its applications,” Laser Photonics Rev. 7(3), 385–407 (2013).
[Crossref]

2012 (3)

M. Röhrig, M. Thiel, M. Worgull, and H. Hölscher, “3D Direct Laser Writing of Nano- and Microstructured Hierarchical Gecko-Mimicking Surfaces,” Small 8(19), 3009–3015 (2012).
[Crossref] [PubMed]

L. Guo, H. Jiang, R. Shao, Y. Zhang, S. Xie, J. Wang, X. Li, F. Jiang, Q. Chen, T. Zhang, and H. Sun, “Two-beam-laser interference mediated reduction, patterning and nanostructuring of graphene oxide for the production of a flexible humidity sensing device,” Carbon 50(4), 1667–1673 (2012).
[Crossref]

E. Stankevicius, E. Balciunas, M. Malinauskas, G. Raciukaitis, D. Baltriukiene, and V. Bukelskiene, “Holographic lithography for biomedical applications,” Proc. SPIE 8433, 843312 (2012).
[Crossref]

2011 (5)

R. Guo, D. Yuan, and S. Das, “Large-area microlens arrays fabricated on flexible polycarbonate sheets via single-step laser interference ablation,” J. Micromech. Microeng. 21(1), 015010 (2011).
[Crossref]

T. Zhai, X. Zhang, Z. Pang, and F. Dou, “Direct writing of polymer lasers using interference ablation,” Adv. Mater. 23(16), 1860–1864 (2011).
[Crossref] [PubMed]

D. Xia, Z. Ku, S. C. Lee, and S. R. J. Brueck, “Nanostructures and functional materials fabricated by interferometric lithography,” Adv. Mater. 23(2), 147–179 (2011).
[Crossref] [PubMed]

A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large area direct fabrication of periodic arrays using interference patterning,” Phys. Procedia 12, 214–220 (2011).
[Crossref]

B. Voisiat, M. Gedvilas, S. Indrisiunas, and G. Raciukaitis, “Picosecond-Laser 4-beam-Interference Ablation as a Flexible Tool for Thin Film Microcstructuring,” Phys. Procedia 12, 116–124 (2011).
[Crossref]

2010 (2)

K. S. Kim, H. Jeong, M. S. Jeong, and G. Y. Jung, “Polymer-templated hydrothermal growth of vertically aligned single-crystal zno nanorods and morphological transformations using structural polarity,” Adv. Funct. Mater. 20(18), 3055–3063 (2010).
[Crossref]

D. Yuan, R. Guo, Y. Wei, W. Wu, Y. Ding, Z. L. Wang, and S. Das, “Heteroepitaxial growth of vertically aligned and periodically distributed ZnO nanowires on GaN using laser interference ablation,” Adv. Funct. Mater. 20(20), 3484–3489 (2010).
[Crossref]

2009 (1)

K. Koch, B. Bhushan, Y. C. Jung, and W. Barthlott, “Fabrication of artificial Lotus leaves and significance of hierarchical structure for superhydrophobicity and low adhesion,” Soft Matter 5(7), 1386–1393 (2009).
[Crossref]

2008 (1)

A. F. Lasagni, D. F. Acevedo, C. A. Barbero, and F. Mücklich, “Direct patterning of polystyrene–polymethyl methacrylate copolymer by means of laser interference lithography using UV laser irradiation,” Polym. Eng. Sci. 48(12), 2367–2372 (2008).
[Crossref]

2007 (5)

M. Maldovan, C. K. Ullal, J. H. Jang, and E. L. Thomas, “Sub-Micrometer Scale Periodic Porous Cellular Structures: Microframes Prepared by Holographic Interference Lithography,” Adv. Mater. 19(22), 3809–3813 (2007).
[Crossref]

K. Paivasaari, J. J. J. Kaakkunen, M. Kuittinen, and T. Jaaskelainen, “Enhanced optical absorptance of metals using interferometric femtosecond ablation,” Opt. Express 15(21), 13838–13843 (2007).
[Crossref] [PubMed]

A. F. Lasagni, A. Manzoni, and F. Mücklich, “Micro/Nano Fabrication of Periodic Hierarchical Structures by Multi-Pulsed Laser Interference Structuring,” Adv. Eng. Mater. 10(9), 872–875 (2007).
[Crossref]

A. F. Lasagni, D. F. Acevedo, C. A. Barbero, and F. Mücklich, “One-Step Production of Organized Surface Architectures on Polymeric Materials by Direct Laser Interference Patterning,” Adv. Eng. Mater. 9(1-2), 99–103 (2007).
[Crossref]

B. Podgornik, B. Zajec, S. Strnad, and K. Stana-Kleinschek, “Influence of surface energy on the interactions between hard coatings and lubricants,” Wear 262(9-10), 1199–1204 (2007).
[Crossref]

2006 (3)

Y. C. Jung and B. Bhushan, “Contact angle, adhesion and friction properties of micro-and nanopatterned polymers for superhydrophobicity,” Nanotechnology 17(19), 4970–4980 (2006).
[Crossref]

I. Etsion, G. Halperin, and E. Becker, “Testing piston rings with partial laser surface texturing for friction reduction,” Wear 261, 7–8 (2006).

C. S. Lim, M. H. Hong, Y. Lin, Q. Xie, B. S. Lukyanchuk, A. Senthil Kumar, and M. Rahman, “Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning,” Appl. Phys. Lett. 89, 87–90 (2006).
[Crossref]

2005 (1)

A. Kovalchenko, O. Ajayi, A. Erdemir, G. Fenske, and I. Etsion, “The effect of laser surface texturing on transitions in lubrication regimes during unidirectional sliding contact,” Tribol. Int. 38(3), 219–225 (2005).
[Crossref]

2004 (1)

A. Marmur, “The Lotus effect: superhydrophobicity and metastability,” Langmuir 20(9), 3517–3519 (2004).
[Crossref] [PubMed]

2003 (1)

C. Cottin-Bizonne, J.-L. Barrat, L. Bocquet, and E. Charlaix, “Low-friction flows of liquid at nanopatterned interfaces,” Nat. Mater. 2(4), 238–240 (2003).
[Crossref] [PubMed]

1999 (1)

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Micro-lens arrays generated by UV laser irradiation of doped PMMA,” Appl. Phys., A Mater. Sci. Process. 68(6), 709–713 (1999).
[Crossref]

1997 (1)

W. Barthlott and C. Neinhuis, “Purity of the sacred lotus, or escape from contamination in biological surfaces,” Planta 202(1), 1–8 (1997).
[Crossref]

1995 (1)

A. Costela, I. García-Moreno, F. Florido, J. M. Figuera, R. Sastre, S. M. Hooker, J. S. Cashmore, and C. E. Webb, “Laser ablation of polymeric materials at 157 nm,” J. Appl. Phys. 77(6), 2343–2350 (1995).
[Crossref]

1974 (1)

H. Mishina and T. Asakura, “Two gaussian beam interference,” Nouv. Rev. Optique 5(2), 101–107 (1974).
[Crossref]

Acevedo, D. F.

Ajayi, O.

Asakura, T.

H. Mishina and T. Asakura, “Two gaussian beam interference,” Nouv. Rev. Optique 5(2), 101–107 (1974).
[Crossref]

Balciunas, E.

Baltriukiene, D.

Barbero, C. A.

Barrat, J.-L.

C. Cottin-Bizonne, J.-L. Barrat, L. Bocquet, and E. Charlaix, “Low-friction flows of liquid at nanopatterned interfaces,” Nat. Mater. 2(4), 238–240 (2003).
[Crossref] [PubMed]

Barthlott, W.

W. Barthlott and C. Neinhuis, “Purity of the sacred lotus, or escape from contamination in biological surfaces,” Planta 202(1), 1–8 (1997).
[Crossref]

Becker, E.

I. Etsion, G. Halperin, and E. Becker, “Testing piston rings with partial laser surface texturing for friction reduction,” Wear 261, 7–8 (2006).

Beinhorn, F.

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Micro-lens arrays generated by UV laser irradiation of doped PMMA,” Appl. Phys., A Mater. Sci. Process. 68(6), 709–713 (1999).
[Crossref]

Benke, D.

Berger, J.

A. F. Lasagni, T. Roch, J. Berger, T. Kunze, V. Lang, and E. Beyer, “To use or not to use (direct laser interference patterning), that is the question,” Proc. SPIE 9351, 935115 (2015).
[Crossref]

Beyer, E.

A. F. Lasagni, T. Roch, J. Berger, T. Kunze, V. Lang, and E. Beyer, “To use or not to use (direct laser interference patterning), that is the question,” Proc. SPIE 9351, 935115 (2015).
[Crossref]

Bhushan, B.

Y. C. Jung and B. Bhushan, “Contact angle, adhesion and friction properties of micro-and nanopatterned polymers for superhydrophobicity,” Nanotechnology 17(19), 4970–4980 (2006).
[Crossref]

Bieda, M.

A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large area direct fabrication of periodic arrays using interference patterning,” Phys. Procedia 12, 214–220 (2011).
[Crossref]

Bocquet, L.

C. Cottin-Bizonne, J.-L. Barrat, L. Bocquet, and E. Charlaix, “Low-friction flows of liquid at nanopatterned interfaces,” Nat. Mater. 2(4), 238–240 (2003).
[Crossref] [PubMed]

Broglia, M. F.

Brueck, S. R. J.

D. Xia, Z. Ku, S. C. Lee, and S. R. J. Brueck, “Nanostructures and functional materials fabricated by interferometric lithography,” Adv. Mater. 23(2), 147–179 (2011).
[Crossref] [PubMed]

Bukelskiene, V.

Cashmore, J. S.

Charlaix, E.

C. Cottin-Bizonne, J.-L. Barrat, L. Bocquet, and E. Charlaix, “Low-friction flows of liquid at nanopatterned interfaces,” Nat. Mater. 2(4), 238–240 (2003).
[Crossref] [PubMed]

Chen, Q.

Costela, A.

Cottin-Bizonne, C.

C. Cottin-Bizonne, J.-L. Barrat, L. Bocquet, and E. Charlaix, “Low-friction flows of liquid at nanopatterned interfaces,” Nat. Mater. 2(4), 238–240 (2003).
[Crossref] [PubMed]

Das, S.

Ding, Y.

Dou, F.

T. Zhai, X. Zhang, Z. Pang, and F. Dou, “Direct writing of polymer lasers using interference ablation,” Adv. Mater. 23(16), 1860–1864 (2011).
[Crossref] [PubMed]

Eckhardt, S.

S. Eckhardt, C. Sachse, and A. F. Lasagni, “Light management in transparent conducting oxides by direct fabrication of periodic surface arrays,” Phys. Proc. 41, 552–557 (2013).
[Crossref]

Erdemir, A.

Etsion, I.

I. Etsion, G. Halperin, and E. Becker, “Testing piston rings with partial laser surface texturing for friction reduction,” Wear 261, 7–8 (2006).

Fenske, G.

Figuera, J. M.

Florido, F.

García-Moreno, I.

Gedvilas, M.

Guenther, K.

Guo, C.

A. Y. Vorobyev and C. Guo, “Direct femtosecond laser surface nano/microstructuring and its applications,” Laser Photonics Rev. 7(3), 385–407 (2013).
[Crossref]

Guo, L.

Guo, R.

Halperin, G.

I. Etsion, G. Halperin, and E. Becker, “Testing piston rings with partial laser surface texturing for friction reduction,” Wear 261, 7–8 (2006).

Hölscher, H.

Hong, M. H.

Hooker, S. M.

Ihlemann, J.

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Micro-lens arrays generated by UV laser irradiation of doped PMMA,” Appl. Phys., A Mater. Sci. Process. 68(6), 709–713 (1999).
[Crossref]

Indrisiunas, S.

Ingenito, A.

Isabella, O.

Jaaskelainen, T.

Jang, J. H.

Jeong, H.

Jeong, M. S.

Jiang, F.

Jiang, H.

Jung, G. Y.

Jung, Y. C.

Y. C. Jung and B. Bhushan, “Contact angle, adhesion and friction properties of micro-and nanopatterned polymers for superhydrophobicity,” Nanotechnology 17(19), 4970–4980 (2006).
[Crossref]

Kaakkunen, J. J. J.

Kim, K. S.

Klein, F.

Koch, K.

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A. F. Lasagni, T. Roch, J. Berger, T. Kunze, V. Lang, and E. Beyer, “To use or not to use (direct laser interference patterning), that is the question,” Proc. SPIE 9351, 935115 (2015).
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A. F. Lasagni, T. Roch, J. Berger, T. Kunze, V. Lang, and E. Beyer, “To use or not to use (direct laser interference patterning), that is the question,” Proc. SPIE 9351, 935115 (2015).
[Crossref]

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A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large area direct fabrication of periodic arrays using interference patterning,” Phys. Procedia 12, 214–220 (2011).
[Crossref]

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D. Xia, Z. Ku, S. C. Lee, and S. R. J. Brueck, “Nanostructures and functional materials fabricated by interferometric lithography,” Adv. Mater. 23(2), 147–179 (2011).
[Crossref] [PubMed]

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Adv. Eng. Mater. (3)

Adv. Funct. Mater. (2)

Adv. Mater. (3)

T. Zhai, X. Zhang, Z. Pang, and F. Dou, “Direct writing of polymer lasers using interference ablation,” Adv. Mater. 23(16), 1860–1864 (2011).
[Crossref] [PubMed]

D. Xia, Z. Ku, S. C. Lee, and S. R. J. Brueck, “Nanostructures and functional materials fabricated by interferometric lithography,” Adv. Mater. 23(2), 147–179 (2011).
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Adv. Mater. Eng. (1)

Appl. Phys. Lett. (1)

Appl. Phys., A Mater. Sci. Process. (1)

F. Beinhorn, J. Ihlemann, K. Luther, and J. Troe, “Micro-lens arrays generated by UV laser irradiation of doped PMMA,” Appl. Phys., A Mater. Sci. Process. 68(6), 709–713 (1999).
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Appl. Surf. Sci. (1)

Carbon (1)

Int. J. Polym. Sci. (1)

J. Appl. Phys. (1)

J. Micromech. Microeng. (1)

Langmuir (1)

A. Marmur, “The Lotus effect: superhydrophobicity and metastability,” Langmuir 20(9), 3517–3519 (2004).
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Laser Photonics Rev. (1)

A. Y. Vorobyev and C. Guo, “Direct femtosecond laser surface nano/microstructuring and its applications,” Laser Photonics Rev. 7(3), 385–407 (2013).
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Mat. Res. Expr. (1)

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Opt. Express (1)

Phys. Proc. (1)

S. Eckhardt, C. Sachse, and A. F. Lasagni, “Light management in transparent conducting oxides by direct fabrication of periodic surface arrays,” Phys. Proc. 41, 552–557 (2013).
[Crossref]

Phys. Procedia (2)

A. F. Lasagni, T. Roch, D. Langheinrich, M. Bieda, and A. Wetzig, “Large area direct fabrication of periodic arrays using interference patterning,” Phys. Procedia 12, 214–220 (2011).
[Crossref]

Planta (1)

W. Barthlott and C. Neinhuis, “Purity of the sacred lotus, or escape from contamination in biological surfaces,” Planta 202(1), 1–8 (1997).
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Polym. Eng. Sci. (1)

Proc. SPIE (3)

A. F. Lasagni, T. Roch, J. Berger, T. Kunze, V. Lang, and E. Beyer, “To use or not to use (direct laser interference patterning), that is the question,” Proc. SPIE 9351, 935115 (2015).
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Res. Appl. (1)

Small (2)

Soft Matter (1)

Tribol. Int. (1)

Wear (2)

B. Podgornik, B. Zajec, S. Strnad, and K. Stana-Kleinschek, “Influence of surface energy on the interactions between hard coatings and lubricants,” Wear 262(9-10), 1199–1204 (2007).
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A. F. Lasagni and F. A. Lasagni, Fabrication and Characterization in the Micro-Nano Range (Springer-Verlag, 2011).

D. Bäuerle, Laser Processing and Chemistry (Springer-Verlag, 2000).

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Fig. 1 (a) Two-beams interference patterning principle; (b) calculated intensity distribution obtained by overlapping two Gaussian (TEM00) laser beams with a spatial period of 6 µm; (c) DLIP-µFAB compact system for direct laser interference patterning equipped with an IR-DLIP optical head.

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Fig. 2 Confocal microscope profiles showing periodic line-like structures produced on the transparent Lexan SLX treated with 3 ns single pulses at 263nm laser wavelength; in Fig. 2a the influence of the laser fluence on the pattern morphology is shown, while in 2b the spatial period is varied at constant laser fluence.

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Fig. 3 SEM image of a DLIP-treated transparent Lexan SLX polycarbonate showing the Gaussian non-periodically ablated zone in the center of the DLIP pixel (wavelength: 263 nm, pulse duration: 3 ns, fluence: 3.5 J/cm², spatial period: 0.56 µm).

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Fig. 4 Confocal microscope profiles showing periodic line-like structures produced on the black Lexan FR25A treated with 6 ns single pulses at 1053nm laser wavelength; in Fig. 3(a) the influence of the laser fluence on the pattern morphology is shown, while in 3b the spatial period is varied at constant laser fluence.

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Fig. 5 Absorption spectra of the transparent PC (Lexan SLX, red line) and the black-doped PC (Lexan FR25A, black line) for wavelengths ranging from 200 to 1500 nm.

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Fig. 6 SEM images of the DLIP-treated black Lexan FR25A using a wavelength of 1053 nm, showing (a) a swelled single-scale line-like ridges (fluence: 0.86 J/cm², spatial period: 7.13 µm), (b) a swelled double-scale structure (fluence: 1.3 J/cm², spatial period: 7.13 µm) and (c) a FIB-cross section of a swelled double-scale pixel (fluence: 1.3 J/cm², spatial period: 7.13 µm).

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Fig. 7 Confocal microscope profiles showing periodic line-like structures produced on the black Lexan FR25A, treated with 3 ns single pulses at 263 nm laser wavelength with 2.13 µm structure period, showing the influence of the laser fluence on the pattern morphology.

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Fig. 8 (a) Ablation curves reporting the periodic (d_I ) and non-periodic (d_G) contributions for the transparent Lexan SLX treated with 266 nm laser radiation for line-like structuring with a period of 2.13 µm; (b) swelling curves reporting the periodic (d_S ) and non-periodic (d_GS) contributions for the black Lexan FR25A treated at 1053 nm laser radiation with a 7.31 µm periodic line-like interference pattern.

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Fig. 9 Dependence of the k_I, k_G and k_S coefficients on the spatial period for (a) the transparent Lexan SLX treated at 263 nm, (b) the black Lexan FR25A treated at 1053 nm and (c) the black Lexan FR25A treated at 263 nm laser wavelength. k_I, k_G, k_S and k_GS denote the periodic ablation, non-periodic ablation, periodic swelling and non-periodic swelling contributions, respectively.

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Fig. 10 Comparison between (a) experimental and (b) calculated profiles for different structuring conditions: complete periodic-modulated ablation (Lexan SLX, λ = 263 nm, Λ = 2.13 µm, E_p = 2 µJ), predominant Gaussian-modulated ablation mechanism (Lexan SLX, λ = 263 nm, Λ = 0.56 µm, E_p = 0.37 µJ), simultaneous ablation-swelling periodic modulated pattern (Lexan FR25A, λ = 263 nm, Λ = 2.13 µm, E_p = 1.1 µJ), and combined periodic and Gaussian-modulated swelling (Lexan SLX, λ = 1053 nm, Λ = 7.31 µm, E_p = 0.24 mJ). Also a comparison between (c) experimental and (d) calculated double-scale swelled surface is shown, created on Lexan FR25A with λ = 1053 nm, Λ = 7.31 µm, E_p = 0.19 mJ and 100 µm pixel distance.

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Tables (1)

Table 1 Constants a, b, c and d (from Eq. (4) to calculate both ablation ( $k_{I}$ and $k_{G}$ ) and swelling ( $k_{S}$ and $k_{G S}$ ) coefficients

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Equations (5)

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d (x) = \frac{1}{α (λ)} \cdot \ln (\frac{F (x)}{F_{t h}})

d (x) = d_{I} (x) + d_{G} (x) + d_{S} (x) + d_{G S} (x)

d (x) = k_{I} (Λ) \cdot \ln (\frac{F (x, θ)}{F_{t h}}) + k_{G} (Λ) \cdot \ln (\frac{F (x, 0)}{F_{t h}}) + k_{S} (Λ) \cdot \ln (\frac{F (x, θ)}{F_{t h}^{S}}) + k_{G S} (Λ) \cdot \ln (\frac{F (x, 0)}{F_{t h}^{S}})

k (Λ) = a + b Λ^{- 1} + c Λ + d Λ^{2}

F (x, θ) = 2 A \cdot f (x, θ) \cdot e^{- \frac{x^{2} \cos^{2} θ}{σ / 2}}

			$λ = 263 n m$		$λ = 1053 n m$
Coefficient [µm]		Constant	LEXAN SLX – transp	LEXAN FR25A - black	LEXAN SLX - transp	LEXAN FR25A - black
Ablation	$k_{I}$	a	−0.26	–	0	0
		b	0.05	−0.14	0	0
		c	0.39	0.57	0	0
		d	−0.07	−0.15	0	0
		R²	0.93	0.86

	$k_{G}$	a	−0.34	−0.57	0	0
		b	0.28	0.33	0	0
		c	0.11	0.31	0	0
		d	–	−0.05	0	0
		R²	0.68	0.99

Swelling	$k_{S}$	a	0	0.03	0	18.19
		b	0	−0.01	0	−18.59
		c	0	−0.03	0	−5.27
		d	0	0.01	0	0.36
		R²		0.88		0.99

	$k_{GS}$	a	0	0	0	−4.21
		b	0	0	0	−19.14
		c	0	0	0	0.12
		d	0	0	0	–
		R²				0.96